臺灣博碩士論文加值系統

隨著半導體的生產技術日新月異，CMOSFET已經從100微米進步到20奈米或更小的世代，半導體元件的微縮除了增加了積體電路元件密度進而降低製造成本外，主要還是在提昇元件速度與減低消耗功率。近年提出的鰭式場效電晶體(FinFET)由於其元件的設計原理，可以有效改善尺寸微縮後CMOSFET所造成的高漏電問題。在FinFET的架構下將其閘極設計成類似魚鰭的3D架構，這種鰭式架構的設計有非常高的高寬比，當閘極施加偏壓後使得通道全然空乏，可以有效抑止短通道效應產生的高漏電流，進而使得元件的可控制性增加。這種設計改善了傳統CMOSFET中的缺陷，也在尺寸不斷微縮的短通道元件找到一種解決方法。
本次研究主要對於不同尺寸的鰭式場效電晶體(FinFET)元件電壓-電流曲線進行分析，並使用以爾利效應模組為基礎的演算法，將門檻電壓參數化與分析。
另外，科技的進步為人類帶來許多的便利，其中範疇最廣泛的應該就屬於自動控制，其科技所帶來的便利性與我門日常生活有密切的相關，像是自動門、自動沖水、電燈...等，更甚至到工廠裡的自動機械手臂、運送WAFER的天車。
本次實驗使用數位電錶為基礎的架構勾勒出一個完整自動控制的樣式，首先使用一個變動的電壓輸入來模擬感測器的訊號，再將訊號送入 ADC0804進行類比數位轉換後，將其數位訊號送入嵌入式系統8051，並對信號進行處理，再將處理過的訊號判斷後輸出送至所需的控制端，完成一整個自動控制的流程。

CMOSFET devices of 18 nanometers have been manufactured by using FinFET structure to achieve higher speeds of transferring signals and, in the mean time, to lower the consuming power. FinFET has gained the reputation because of its less leaky fin-like channel and higher controllability with elimination of body such that the whole channel is thus depleted as the gate is biased. One is intrigued in how the measured ID-VD curves fit the conventional parameterized ID-VD model, in which many physical quantities are even revealed.
On the other hand, one of the CMOS applications is concerning automatic control system, in which 8051 CPU is proposed to deal with the digital signals coming from the sensor and, therefore, send commands. For example, the temperature sensor senses the temperature of the circumstance and there appears the analog voltage, which is converted into digital signal via ADC0804. The criteria set in the program helps to determine when to execute the consecutive actions.

第一章 概論 1
1.1半導體發展簡介 1
1.2研究動機與方法 2
第二章 元件物理 3
2.1 P-N接面與內建電位 3
2.2 電場分析與空乏區寬度 8
2.3 非平衡(施加偏壓) 11
2.4 MOSFET的基本結構 13
2.5 理想的MOS元件 14
2.6 電流密度 18
2.7金氧半場效電晶體操作特性 22
2.8 FinFET架構 27
第三章 自動控制 29
3.1自動控制簡介與架構 29
3.2嵌入式系統介紹 32
3.3 8051元件 33
第四章 實驗方法與結果 36
4.1.1半導體量測分析實驗架構說明 36
4.1.1 元件製程介紹 38
4.1.2量測條件 38
4.1.3 量測實驗結果 39
4.1.3.1ID- VD與溫度 39
4.1.3.2N型與P型比較 43
4.1.3.3模擬ID-VD曲線 44
4.2嵌入式系統的溫度監控 48
4.2.1 實驗架構說明 48
4.2.2主架構電路圖 53
4.2.3程式碼 55
第五章 結論 58
參考文獻 59
作者簡介 60

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