臺灣博碩士論文加值系統

本文主要的工作為製作一簡單使用的安裝配件(submount)，以完成光電元
件與光纖的耦合作業。安裝配件使用的材料為矽晶片，並通過半導體製程
方法完成。配件上將提供自動對準功能，以減短一般耦合程序上耗費的時
間。文中並針對自動對準機制作測試，以了解自動對準的經過與準確度。
最後把安裝配件應用在面射型雷射(SEL)與光纖的耦合包裝，其結果能達
到90％的耦合率。

A simple and useful Si-Submount was constructed and used to
finished the coupling between an opto-electronic device and an
optical fiber. Submount is made of Si(100)-wafer, in according
to the mature silicon fabrication technique. One of its
significant function, self-alignment, was to reduce the time
consuming during active alignment which was required in case
light coupling into an fiber-core. Testing on the accuracy of
self-alignment was performed with the submount we made and LED
devices. Finally, we conduct the whole self-aligned packaging
among SEL device, submount and optical fiber, and obtained an
coupling efficiency up to 90％.