臺灣博碩士論文加值系統

本論文中，我們將在CIGS太陽能電池內透明導電層(AZO層)與吸收層(CIGS層)的表面濺鍍一層奈米金屬薄膜，並透過熱退火技術改變奈米金屬薄膜的結構，形成金屬奈米顆粒(Metal NP)或金屬奈米孤島。我們對這兩種不同基板的樣本分別利用SEM( Scanning electron microscope )與AFM( Atomic force microscopy )量測，觀察金屬奈米結構的形狀、高度與大小，並對照穿透頻譜與吸收頻譜，觀察其光學特性，發現在AZO基板上成長5nm 厚的銀薄膜、熱退火溫度350℃的樣本有最高的穿透峰值與平均穿透率，其穿透峰值在340nm處為146.97％，平均穿透率相較於沒有成長金屬奈米結構的基板為74.7%，雖然其平均穿透率比沒有成長金屬奈米結構的基板還低，但在短波長處（約300-400n之間）的穿透率比沒有成長金屬奈米結構的基板還高，推測是因為侷域表面電漿共振效應所導致。至於CIGS樣本的部分，由於金與銀在熱退火的時候會與CIGS反應，導致晶格結構改變，因此無法從SEM與AFM中分辨奈米金屬顆粒的大小與形狀。

In our study, we sputtering a metal nano structures on the surface of absorption layer (CIGS layer) and TCO layer (AZO layer) of CIGS Solar Cell, and then annealing so that the metal nano structures on the substrate will become a nano particle or nano island. We using scanning electron microscope and atomic force microscope to observe the metal nano particle’s shape and size to compare the transmittance and absorbance spectrums, then we can find out the optical properties of nano particles.
We find out that the sample which annealing with Ag 5nm thickness and temperature 350℃ has the highest peak and the best average transmittance rates, which the peak is at 340nm has 146.97％ and the average transmittance rate about 74.7%, though the sample’s transmittance do not higher than the reference, but at the wave band (about 300-400nm ), the transmittance has a peak higher than the reference, we speculate that is because of the LSP resonance effect enhancement. About samples of CIGS, because the metal Ag and Au will interact with CIGS when annealing, so we can’t distinguished the shapes and size with SEM and AFM.

致謝 i
摘要 iii
Abstract iv
圖目錄 vii
表目錄 x
第一章　前言 1
1-1太陽能電池的發展 1
1-1-1太陽能電池的發展史及各國的新能源政策 2
1-1-2太陽能電池的近況發展 3
1-2奈米尺度的光擷取技術 4
1-2-1薄膜矽太陽能電池 4
1-2-2薄膜太陽能電池的吸收效率 5
1-2-3電漿子增益機制 5
1-2-4奈米球殼的應用 8
1-3 銅銦鎵硒太陽能電池 9
1-4將表面電漿子應用於太陽能電池 12
1-5研究動機與目的 14
第二章　表面電漿簡介與理論介紹 19
2-1理論原理與文獻回顧－金屬表面電漿共振模態 19
2-2表面電漿共振效應的基本原理 20
2-2-1探討電磁波與物質交互作用的行為模式 21
2-2-2金屬等效介電常數的推導 24
2-2-3金屬的表面電漿子共振模態 28
2-3侷域性表面電漿共振 32
2-4金屬奈米粒子的光散射機制 34
第三章　實驗流程與方法 38
3-1CIGS基板的製程 39
3-1-1 Al:ZnO 蝕刻 40
3-1-2 CdS 蝕刻 41
3-1-3 CIGS 薄膜蝕刻 41
3-2 AZO基板的製備 42
3-3金屬奈米微顆粒的製作 42
第四章　實驗結果與討論 50
4-1 SEM與AFM的量測 51
4-2 AZO樣本的光穿透率與片電阻率 52
4-3 CIGS反射頻譜量測 53
第五章　結論 92
參考文獻 94

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