臺灣博碩士論文加值系統

近年來，奈米以及微米的應用越來越受到重視，而許多利用奈米科技製作的產品中，很多皆為塑膠的製品，微射出成型在塑膠製作的產業上是一個很重要的製程。如果想要能夠成功的成型微奈米的結構，塑料如何充填微結構的能力是最重要的，所以在整個成型的過程中，塑料的流動情形以及狀態就需要進一步的研究及探討，在這研究中，我們會從理論上以及實驗上來探討成型的條件對於微結構充填的影響。首先利用類LIGA的製程做出具有微米或是奈米結構的模仁來進行實驗，接下來利用理論推導出塑料在充填微結構的模型，再拿來和實驗結果進行驗證。有了這個驗證過的模型，就可以利用這模型來預估塑料在微結構中充填的深度，當然也可以反過來利用這模型找出適當的製程參數。由於奈米結構在一般條件中難以充填滿，所以在模仁的充填中，我們導入紅外線加熱系統，來提高模仁溫度，進而提升塑料在微結構中的充填深度。

Nano and micro technology is attracting more attention and has increasing applications in recent years. Among the products with applications of nano technology, many of them are made of polymer plastics. Micro injection molding is one of the important processes for polymer plastics. In micro injection molding, the ability for the polymer melt to flow into the micro/nano features is a crucial factor for successful molding. The flow behavior of polymer in micro/nano features needs to be explored further to facilitate the molding process. In this study, we investigated the effects of the processing conditions on the filling of micro/nano features analytically and experimentally. Firstly, mold inserts with micro or nano features were constructed by LIGA-LIKE process. Secondly, an analytical model was developed to model the filling of polymer melt in the micro/nano features. Molding experiments were performed to verify the analytical filling model. With this verified model, a theoretical filling distance can be predicted for the micro/nano injection molding, and the suitable processing conditions can be estimated for different geometries of product. Finally, the Infrared heating system is introduced to improve the penetration distance in nano feature filling.

ABSTRACT IN CHINESE i
ABSTRACT v
ACKNOWLEDGMENTS vi
CONTENTS vii
LIST OF TABLES x
LIST OF FIGURES xi
NOMENCLATURE xvi
CHAPTER 1 INTRODUCTION 1
1-1 Background 1
1-2 LIGA-LIKE Process 2
1-2-1 UV Thick Film Resist Lithography 3
1-2-2 Electron Beam Lithography 4
1-2-3 Electroforming 4
1-2-4 Micro Injection Molding 5
1-2-5 Variotherm 7
1-3 Literature review 8
1-3-1 X-Ray Lithography 8
1-3-2 UV Thick Film Resist Lithography 8
1-3-3 Electron Beam Lithography 10
1-3-4 Electroforming 10
1-3-5 Micro injection molding 11
1-3-6 Variotherm 12
1-4 Motive 13
1-5 Studying procedure 14
CHAPTER 2 ANALYTICAL MODEL 15
2-1 MoldFlow 15
2-2 Model assumption 17
2-3 Cross-WLF viscosity model 20
2-4 Pressure distribution 24
2-5 Temperature distribution 29
CHAPTER 3 EXPERIMENTAL SETUP 34
3-1 Substrate with micro channels 34
3-1-1 UV Lithography 36
3-2 Substrate with nano channels 42
3-2-1 Electron Beam Lithography 42
3-2-2 ICP-RIE 45
3-3 E-Beam PVD 47
3-4 Electroforming through channels 47
3-5 Injection Molding 54
3-6 Infrared heating system 60
3-7 Measurement 61
CHAPTER 4 INJECTION MOLDING IN MICRO CHANNELS 66
4-1 Injection molding 66
4-1-1 Filling rate 68
4-1-2 Controller temperature 69
4-1-3 Melt temperature 70
4-1-4 Packing pressure 71
4-1-5 Effects for different plastics 72
4-2 Mold surface temperature 72
4-2-1 Experimental 73
4-2-2 Simulation by Ansys 74
4-3 Geometry 80
4-3-1 Geometric factor 80
4-3-2 Heat transfer coefficient between mold and polymer 81
4-3-3 Air trap 82
4-3-4 Verification of the analytical model 83
4.3.4.1 Mold temperature 84
4.3.4.2 Melt temperature 85
4.3.4.3 Packing pressure 87
4-4 Channel width 88
4-5 Thickness of cavity 89
CHAPTER 5 INJECTION MOLDING IN NANO CHANNELS 91
5-1 Nano Molding 91
5-1-1 Mold temperature 94
5-1-2 Melt temperature 95
5-1-3 Packing pressure 95
5-1-4 Application 96
5-2 Molding with infrared heating system 98
5-2-1 Heating with coolant on or off 99
5-2-2 Heating with an insert bakelite 104
5-2-3 Cycle time 107
CHAPTER 6 CONCLUSIONS AND SUGGESTIONS FOR FUTURE WORK 109
6-1 Conclusion 109
6-2 Suggestions for future work 112
REFERENCES 113
APPENDIX A-1 118
APPENDIX A-2 123
APPENDIX A-3 125
APPENDIX A-4 128
ABSTRACT IN CHINESE i
ABSTRACT v
ACKNOWLEDGMENTS vi
CONTENTS vii
LIST OF TABLES x
LIST OF FIGURES xi
NOMENCLATURE xvi
CHAPTER 1 INTRODUCTION 1
1-1 Background 1
1-2 LIGA-LIKE Process 2
1-2-1 UV Thick Film Resist Lithography 3
1-2-2 Electron Beam Lithography 4
1-2-3 Electroforming 4
1-2-4 Micro Injection Molding 5
1-2-5 Variotherm 7
1-3 Literature review 8
1-3-1 X-Ray Lithography 8
1-3-2 UV Thick Film Resist Lithography 8
1-3-3 Electron Beam Lithography 10
1-3-4 Electroforming 10
1-3-5 Micro injection molding 11
1-3-6 Variotherm 12
1-4 Motive 13
1-5 Studying procedure 14
CHAPTER 2 ANALYTICAL MODEL 15
2-1 MoldFlow 15
2-2 Model assumption 17
2-3 Cross-WLF viscosity model 20
2-4 Pressure distribution 24
2-5 Temperature distribution 29
CHAPTER 3 EXPERIMENTAL SETUP 34
3-1 Substrate with micro channels 34
3-1-1 UV Lithography 36
3-2 Substrate with nano channels 42
3-2-1 Electron Beam Lithography 42
3-2-2 ICP-RIE 45
3-3 E-Beam PVD 47
3-4 Electroforming through channels 47
3-5 Injection Molding 54
3-6 Infrared heating system 60
3-7 Measurement 61
CHAPTER 4 INJECTION MOLDING IN MICRO CHANNELS 66
4-1 Injection molding 66
4-1-1 Filling rate 68
4-1-2 Controller temperature 69
4-1-3 Melt temperature 70
4-1-4 Packing pressure 71
4-1-5 Effects for different plastics 72
4-2 Mold surface temperature 72
4-2-1 Experimental 73
4-2-2 Simulation by Ansys 74
4-3 Geometry 80
4-3-1 Geometric factor 80
4-3-2 Heat transfer coefficient between mold and polymer 81
4-3-3 Air trap 82
4-3-4 Verification of the analytical model 83
4.3.4.1 Mold temperature 84
4.3.4.2 Melt temperature 85
4.3.4.3 Packing pressure 87
4-4 Channel width 88
4-5 Thickness of cavity 89
CHAPTER 5 INJECTION MOLDING IN NANO CHANNELS 91
5-1 Nano Molding 91
5-1-1 Mold temperature 94
5-1-2 Melt temperature 95
5-1-3 Packing pressure 95
5-1-4 Application 96
5-2 Molding with infrared heating system 98
5-2-1 Heating with coolant on or off 99
5-2-2 Heating with an insert bakelite 104
5-2-3 Cycle time 107
CHAPTER 6 CONCLUSIONS AND SUGGESTIONS FOR FUTURE WORK 109
6-1 Conclusion 109
6-2 Suggestions for future work 112
REFERENCES 113
APPENDIX A-1 118
APPENDIX A-2 123
APPENDIX A-3 125
APPENDIX A-4 128
PUBLICATION LIST 132
VITA 133

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