臺灣博碩士論文加值系統

本實驗旨在研究高溫超導約瑟芬元件的製作與特性分析。元件的製程，首先採用微影與乾式離子束蝕刻製作低角度的氧化鎂階梯基座，以及離軸磁控濺鍍成長釔鋇銅氧薄膜，再以原子力顯微鏡檢驗階梯的斜面與薄膜的平整度。實驗的結果顯示，階梯的斜面十分均勻，薄膜表面的平整度亦達8埃，直流式超導量子干涉元件在4 K時元件電壓受磁場調制的振幅達130 μV，N = 50、100、150的一維串聯接面陣列均可在微波照射下量到giant Shapiro steps。此外，根據電流-電壓的量測，所有的樣品均顯示，低角度氧化鎂階梯接面僅含一個晶界結

This work studied the fabrication and characterization of high-Tc Josephson devices on low angle step-edge MgO substrate. In the sample preparation, microlithography and ion beam etching (IBE) were used to fabricate the step-edge substrate, off-axis magnetron rf-sputtering to grow YBCO thin film, and atomic force microscope (AFM) to analyze the surface of step-edge and YBCO thin film. The results showed that the uniform step-edge is obtained and the surface roughness is about 8 Angstrom. The voltage response of dc-SQUID is 130 μV under the applied magnetic field at 4 K. Giant Shapiro steps of one dimensional series-junction array with N = 50, 100, and 150 were observed. Besides, according to the measurement of I-V curves, all samples revealed that only one-grain boundary is formed in the low angle step-edge YBCO junction on MgO substrate.

CONTENTS
Abstract (in Chinese) i
Abstract (in English) ii
Contents iii
List of figures iv
Chapter 1 Introduction 1
Chapter 2 General Background 3
2-1 Development and application of YBCO Josephson devices 3
2-2 Development of YBCO step-edge Josephson junction 6
2-3 Josephson junction 8
2-4 The dc-SQUID 11
Chapter 3 Motivation 14
Chapter 4 Experiments 16
4-1 Sample preparation 16
4-2 Measurement 20
Chapter 5 Results 31
5-1 The dc-SQUID 31
5-2 Series-connected step-edge Josephson junction array 33
Chapter 6 Conclusion 52
Reference 54

Reference
Adam R., Benacka S., Chromik S., Darula M., Strbik V., Gazi S., Kostic I., and Pincik E., IEEE Trans. Appl. Supercond. V.5 N.2 pp.2774 (1995)
Anderson P.W. and Rowell J.M., Phys. Rev. Lett. 10 pp.230 (1963)
Bednorz J.G.and Muller K.A., Z.Phys. B 64 pp.189 (1986)
Black R.C., Mathai A., Wellstood F.C., Dantsker E., Miklich A.H., Nemeth D.T., Kingston J.J., and Clarke J., Appl. Phys. Lett. V.62 pp.2128 (1993)
Braginski A.I., SQUID sensors: Fundementals, Fabrication and Applications pp.235 (1995)
Burkhardt H., Rauther A., Schilling M.; Physica C 326-327 pp.93 (1999)
Cantor R., SQUID sensors: Fundementals, Fabrication and Applications pp.179 (1995)
Chaudhari P., Mannhart P.J., Dimos D., Tsuei C.C., Chi C.C., Oprysko M.M., and Scheuermann M., Phys. Rev. Lett. 60 pp.1653 (1988)
Chen K., Tsai S.H., Horng J.H., and Huang C.Y., Chinese Journal of physics V.38 N.2-II pp.268 (2000a)
Chen K., Lin R.J., Chen M.J., Yu H.W., Chiu N.L., Yang H.C., Wang L.M., and Huang C.Y., IEEE Applied Superconductivity Conference 2000,submitted
(2000b)
Chou D.C., NTU master thesis (1999)
Dilorio M.S., Yoshizumi S., Yang K.Y., Zhang J., and Maung M., Appl. Phys. Lett. V.58 pp.2552 (1991)
Enpuku K.G., Tokita G., Maruo T., and Minotani T., J. Appl. Phys. 78 pp.3498 (1995)
Eom C.B., Sun J.Z., Lairson B.M., Streiffer S.K., Marshall A.F., Yamamoto K., Anlage S.M., Bravman J.C., and Geballe T.H., Physica C 171 pp.354 (1990)
Foley C.P., Macfarlane J.C., Hao L., Wilson Y., and Sankrithyan B., IEEE Trans. Appl. Supercond. V.7 N.2 pp.3185 (1997)
Foley C.P., Mitchell E.E., Lam S.K.H., Sankrithan B., Wilsom Y.M., Tilbrook D.L., and Morris S.J., IEEE Trans. Appl. Supercond. V.9 N.2 pp.4281 (1999)
Gao J., Aarnink A.M., Gerritsma G.J., and Rogalla H., Physica C 171 pp.126 (1990)
Gustafsson M., Olsson E., Yi H.R., Winkler D., and Claeson T., Appl. Phys. Lett. V.70 N.21 pp.2903 (1997)
Greenberg Y.S., Rev. Mod. Phys. V.70 N.1 pp.175 (1998)
Gross R. and Mayer B., Physica C 180 pp.235 (1991)
Gross R., Interfaces in High-Tc Superconducting Systems pp.176 (1994)
Gross R., Alff L., Beck A., Froehlich O.M., Koelle D., and Marx A., IEEE Trans. Appl. Supercond. V.7 N.2 pp.2929 (1997)
Forgacs R.L. and Warnick A.F., Rev. Sci. Instrum. 38 pp.214 (1967)
Forrester M.G., Davidson A., Talvacchio J., Gavaler J.R., and Przybysz J.X., Appl. Phys. Lett. V.65 N.14 pp.1835 (1994)
Herrmann K., Kunkel G., Siegel M., Schubert J., Zander W., Braginski A.I., Jia C.L., Kabius B., and Urban K., J. Appl. Phys. 78(2) pp.1131 (1995)
Jaklevic R.C., Lambe J., Silver, and A.H., Mercereau J.E., Phys. Rev. Lett. 12 pp.159 (1964)
Jia C.L., Kabius B., Urban K., Herrman K., Cui G.J., Schubert, Zander W., Braginski A.I., and Heiden C., Physica C 175 pp.545 (1991)
Josephson B.D., Phys. Lett. 1 pp.251 (1962)
Klushin A.M., Prusseit W., Sodtke E., Borovitski S.I., Amatuni L.E., and Kohlstedt H., Appl. Phys. Lett. V.69 N.11 pp.1634 (1996)
Koelle D., Kleiner R., Ludwig F., Dantsker E., and Clarke J., Rev. Mod. Phys. V.71 N.3 pp.631 (1999)
Konopka J., Wolff I., Beuven S., Siegel M., and Braginski A.I., IEEE Trans. Appl. Supercond. V.5 N.2 pp.3263 (1995)
Krey S., Brugmann O., and Schilling M., Appl. Phys. Lett. V.74 N.2 pp.294 (1999)
Kuriki S., Kamiyama T., Suzuki D., and Matsuda M., IEEE Trans. Appl. Supercond. V.3 N.1 pp.2461 (1993)
Lee L.P., Longo J., Vinetskiy V., and Cantor R.., Appl. Phys. Lett. V.66 N.12 pp.1539 (1995)
Lombardi F., Ivanov Z.G., Fischer G.M., Olsson E., and Claeson T., Appl. Phys. Lett. V.72 N.2 pp.249 (1998)
Lu J.H., NTU PhD thesis (1995)
McCumber D.E., J. Appl. Phys. 39 pp.3113 (1968)
Minotani T., Kawakami S., Kiss T., Kuroki Y., and Enpuku K., Jpn. J. Appl. Phys. Pt.2 36 pp. L1092 (1997)
Reuter W., Siegel M., Herrmann K., Schubrt J., Zander W., Braginski A.I., and Mfler P., Appl. Phys. Lett. V.62 N.18 pp.2280 (1993)
Seidel P., Zakosarenko V., Schmidl F., Dorrer L., Schneidewind H., Linzen S., IL'ichev E.V., and Darula M., IEEE Trans. Appl. Supercond. V.5 N.2 pp.2931 (1995)
IL'ichev E., Dorrer L., Schmidl F., Zakosarenko V., Seidel P., and Hildebrandt G., Appl. Phys. Lett. V.68 N.5 pp.708 (1996)
Shapiro S., Phys. Rev. Lett. 11 pp.80 (1963)
Siegel M., Herrmann K., Copetti C., Jia C.L., Kabius B., Schubert J., Zander W., and Braginski A.I., IEEE Trans. Appl. Supercond. V.3 N.1 pp.2369 (1993)
Simon R., Bulman J.B., Burch J.F., coons S.B., Daly K.P., Dozier W.D., Hu R., Lee A.E., Luine J.A., Platt C.E., and Zani M.J., IEEE Trans. Magn. V.27 pp.3209 (1991)
Song I., Huh Y., Park G., Lee E.H., Lee J.W., Kwok, and S., kang J., IEEE Trans. Appl. Supercond. V.7 N.2 pp.2738 (1997)
Stewart W.C., Appl. Phys. Lett. 12 pp.277 (1968)
Sun J.Z., Gallagher W.J., Callegari A.C., Foglietti V., and Koch R.H., Appl. Phys. Lett. V.63 N.11 pp.1561 (1993)
Tinkham M., Introduction to Supercibductivity pp.211 (1996)
Yang S.Y., NTNU PhD thesis (1999)
Yi H.R., D.,Ivanov Z.G., Winkler D., Zhang Y.M., Olin H., Larsson P., and Claeson T., Appl. Phys. Lett. V.65 N.9 pp.1177 (1994)
Yi H.R., Winkler D.,Ivanov Z.G., and Claeson T., IEEE Trans. Appl. Supercond. V.5 N.2 pp.2778 (1995)
Yi H.R., Winkler D., and Claeson T., IEEE Trans. Appl. Supercond. V.7 N.2 pp.2623 (1997)
Yoshikawa S., Yamaguchi K., Hayashi K., Suzuki K., and Enomoto Y., Jpn. J. Appl. Phys. V.35 pp.4307 (1996)
Yu H.W., Chen M.J., Yang H.C., Yang S.Y., and Horng H.E., IEEE Trans. Appl. Supercond. V.9 N.2 pp.3101 (1999)
Wang L.M., Yu H.W., Yang H.C., and Horng H.E., Physica C 256 pp.57 (1996)
Wang L.M., Sung H.H., Yang H.C., Chen M.J., Wu C.H., Chiu N.L., and Horng H.E., to be published in Physica C (2000)
Wikswo, Jr., J.P., IEEE Trans. Appl. Supercond. 5 pp.74 (1995)
Wu M.K., Ashburn J.R., Torng C.J., Hor P.H., Meng R.L., Gao L., Huang N.Z., Wang Y.Q., and Chu C.W., Phys. Rev. Lett. 58 pp.908 (1987)
Zang Y., Muck M., Bode M., Herrmann K., Schubert J., Lander W., Braginski A.I., Heiden C., Appl. Phys. Lett. pp.2303 (1992)
Zang Y., Tarvin Y., Muck M., Braginski A.I., Heiden C., Hampson S., Pantev C., and Elbert T., Brain Topography 5 pp.379 (1993)
Zhai H.Y., ZhangL., Chu W.K., Morishita T., Tanaka S., Xu F.Z., and Yang Q.S., Appl.Phys. Lett. pp.1312 (2000)