臺灣博碩士論文加值系統

本研究主要以預混合磨漿水刀對玻璃與晶圓試片進行切削實驗。首先建立預混合磨漿水刀系統，利用高壓缸體與活塞的設計，建立預混合磨漿水刀系統。高壓水由上方注入推動活塞向下，並且擠壓磨漿經由噴嘴射出。水刀設備主要使用壓力在105MPa，噴嘴口徑為0.1 mm。
在切削實驗中，主要針對其切削參數（磨粒號數、磨粒體積濃度、進給速度及壓力）對切口性質（上切口寬度、下切口寬度、影響區域寬度、粗糙度、體積移除率）與最大進給速度的影響做一探討。並且利用SEM與光學顯微鏡觀察實驗切屑與切口受磨粒撞擊後表面性狀與下切口平整度。
經由實驗發現在高濃度時所得到的效率較差，最大進給速度的切削條件為：5％體積濃度、105MPa壓力，1500號碳化矽磨粒。而在壓力105MPa、1500號磨粒情況時，有最小的粗糙度約1~4μm。而利用SEM與光學顯微鏡可以觀察到切口表面波紋、受磨粒撞擊坑洞、塑性流動與快速進給時下切口的破裂情形。

The current study analyzes the properties of glass and silicon kerf under Abrasive Suspension Jet (ASJ) cutting. The system consists of a high-pressure cylinder and piston. The highly pressurized water from the pump pushes the isolator downward while the premixed slurry is pumped through the orifice. The system is operated under 105 MPa with a 0.1-mm diameter orifice.
The relations between the abrasive volume concentration, pressure, traverse speed, abrasive size, the kerf width at upper, bottom and affected zones, kerf ratio, kerf taper, roughness, and the maximum traverse speed were studied. Scanning Electron Microscope (SEM) and optical microscope were used to observe the surface waviness of kerf, plastic flow and trace of abrasives under impact.
The experiment results show that the maximum traverse speed occurs at the pressure of 105 MPa, 5% volume concentration, and 1500 mesh SiC abrasive, while the minimum roughness occurs at the pressure of 70 MPa and 2000 mesh SiC abrasive.

第一章 緒 論
1.1 研究背景
1.2 硬脆材料的切割
1.3 文獻回顧
1.3.1 加砂水刀文獻
1.3.2 預混加砂水刀文獻
1.4 研究目的
第二章 切削理論分析
2.1 切削機制
2.2 彈性/塑性理論
2.3 切削磨耗理論
2.4 變形磨耗理論
第三章 實驗設備與實驗規劃
3.1 實驗設備
3.1.1 高壓水刀設備
3.1.2 高壓缸體及組件設計
3.2實驗試片與規劃
3.2.1 實驗試片及耗材
3.2.2 實驗規劃
3.2.3 實驗量測
3.2.4 實驗步驟
第四章 實驗結果與討論
4.1 試片切削性狀觀察
4.1.1 SEM觀察
4.1.2 光學顯微鏡觀察
4.2 切口寬度
4.2.1 進給速率的影響
4.2.2 體積濃度的影響
4.2.3 壓力與磨粒號數的影響
4.2.4 結論
4.3 切口比例與切口梯度
4.3.1 進給速率的影響
4.3.2 體積濃度的影響
4.3.3 壓力與磨粒號數的影響
4.3.4 結論
4.4 體積移除率與切削參數分析
4.4.1 進給速率的影響
4.4.2 體積濃度的影響
4.4.3 壓力與磨粒號數的影響
4.4.4 結論
4.5 粗糙度與切削參數分析
4.5.1 進給速率的影響
4.5.2 體積濃度的影響
4.5.3 壓力與磨粒號數的影響
4.5.4 結論
4.6 最大進給速度與切削參數分析
4.6.1 體積濃度的影響
4.6.2 壓力的影響
4.6.3 磨粒號數的影響
4.6.4 結論
4.7 切屑SEM觀察
4.8 噴嘴磨耗觀察
第五章 結 論

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