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研究生:鄭禹廷
論文名稱:溝槽型鋯鈦酸鉛薄膜超音波元件製作研究及整合CMOSOP濾波測距系統之應用
論文名稱(外文):The study of groove type PbZr0.5Ti0.5O3 thin film ultrasonic sensors and its application in distance measurement system with CMOS op filter
指導教授:張忠誠張忠誠引用關係
學位類別:碩士
校院名稱:國立海洋大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:115
中文關鍵詞:鋯鈦酸鉛介電特性鐵電特性壓電特性GIC
相關次數:
  • 被引用被引用:1
  • 點閱點閱:263
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本論文研究的主題為探討溝槽型的矽基板對鋯鈦酸鉛薄膜超音波感測器的影響,其製作的超音波感測器接上放大濾波電路做測距應用。同時以不同時間沉積PZT薄膜以及不同溫度和時間退火來找出其最佳製作參數,實驗將對壓電薄膜之介電特性、鐵電特性和壓電特性進行測試分析,同時接上自己設計OP-AMPLIFIER,並接成Generalized Impedance Converter (GIC)帶通型濾波器,進一步拿來做測距感測器統,同時討論超音波元件接於GIC filter之前後側距情況。

Chapter 1. Introduction
1-1. Overview of piezoelectric materials
1-2. Research Motion
1-3. Outline
Chapter 2. Characterization of PZT thin film on the groove type substrate
2-1 Introduction
2-2 Characterization analysis of LNO thin films
2-2-1. Crystallography analysis of LNO thin films
2-2-2. EDS analysis of LNO thin films
2-2-3. Resistivity behavior of LNO thin films
2-3 Characterization analysis of PZT thin films
2-3-1 Crystallography analysis of PZT thin films
2-3-2 SEM analysis of PZT thin films
2-3-3 EDS analysis of PZT thin films
2-3-4 SIMS analysis of PZT thin films
2-4 Dielectric property
2-5 Ferroelectric property
2-6 Piezoelectric property
2-7 C-V Characteristics
2-8 I-V Characteristics
Chapter 3. The design and fabrication of contant-gm folded cascade CMOS op amplifier
3-1 Description
3-2 Circuit description
3-3 Simulation
3-4 Layout
3-5 Results
Chapter 4. The ultrasonic Sensor fabricated with PZT thin film applied in distance measurement
4-1. Introduction
4-2. The Measuring Method and Measuring System for ultrasonic sensor which is groove type underwater test
4-2-1 The reciprocity principle
4-2-2 Calculation of Reciprocity
4-2-3 The measuring system of underwater test
4-2-4 Measurement Result and Discuss
4-3. Acoustic Sound Field Measurement
4-4. The ultrasonic sensors fabricated by PZT thin film for distance measurement
4-4-1. The component of distance measure system
4-4-2. Experiment results of distance measurement
Chapter 5. Conclusion
Reference

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