臺灣博碩士論文加值系統

在奈米壓印製程中，高分子薄膜是最常使用的壓印材料。而金屬薄膜較少應用於壓印製程的原因是其需要極大之成型壓力且金屬薄膜成型後有回彈的問題。如何改變製程溫度與薄膜結構以降低成型壓力成為重要的研究工作。本研究應用有限元素法模擬鋁金屬薄膜之壓印製程，配合適應性網格化法，解決壓印模擬中網格變形過大之問題。模擬所需之鋁金屬薄膜熱機械性質是經由微拉力實驗得到微米鋁線之熱機械應力-應變曲線，並藉由比較常溫下之單層金屬薄膜奈米壓印實驗結果加以修正。此外，根據參考文獻之雙層奈米壓印製程(NIMB)實驗，建立模擬雙層薄膜壓印之分析模型。討論雙層薄膜(Aluminum/polymer)在各個厚度比、壓印溫度對其成型性與所需壓力的影響，對於進行雙層薄膜奈米壓印的製程設計將有相當的幫助。

The polymer thin film layer is mainly used in nano imprint process. It is uncommonly applied imprint process to metal thin film due to it needs ultra-high stamp pressure and spring back problems. How to choose working temperature and metal layer structures to reduce the imprint force is the major research topics nowadays. The research works presented in this thesis uses the finite element method to simu-late nano imprint process on Aluminum thin film. The numerical mesh quality problems due to large deformation are improved by adaptive meshing technique. The temperature dependent strain-stress curves of Aluminum wire were given from micro-force tensile test, and modi-fied by compared with real imprint experimental results. Referring to the literature produced metal/polymer bi-layer structures (NIMB) ex-periment; we modified the single metal layer simulation model to bi-layer Aluminum/polymer thin film. Various thickness ratios and form-ing temperatures are studied by bi-layer simulation model to reveal how they affected the imprint force. The results presented in this study could great help to choose better bi-layer structure as well as the imprint parameters.

表目錄 III
圖目錄 IV
第一章 緒論 1
1-1 前言 1
1-2 研究動機與目的 2
1-3 文獻回顧 4
1-3-1 奈米壓印技術文獻回顧 4
1-3-2 奈米壓印成型性文獻回顧 6
1-3-3 奈米壓印有限元素分析文獻回顧 7
1-4 本文內容 11
第二章 數值模擬方法理論介紹 15
2-1 有限元素法動態顯式分析方法介紹[21] 16
2-2 自動時間增量和穩定性介紹[21] 19
2-2-1 顯式方法的條件穩定性 19
2-2-2 穩定性限制的定義 19
2-2-3 材料對穩定性的影響 21
2-2-4 網格對穩定性的影響 22
第三章 微米鋁線溫度拉伸實驗 23
3-1 拉伸實驗設備與架構 23
3-2 試片製作與實驗參數 26
3-3 實驗方法與步驟 28
3-4 實驗結果與討論 29
第四章 奈米壓印有限元素模型建立 31
4-1 奈米壓印實驗介紹[20] 31
4-2 有限元素模型之建立 32
4-2-1 模型幾何建立 34
4-2-2 邊界條件給定 36
4-2-3 材料參數給定 37
4-3 數值模擬結果與實驗結果比較與討論 38
4-3-1 奈米壓印成形現象的討論 38
4-3-2 奈米壓印模擬與實驗結果比較 40
第五章 奈米壓印數值模擬 45
5-1 緩衝層的設計與模擬分析 45
5-2 探討雙層材料之材料厚度比的影響 47
5-3 探討雙層材料之溫度效應的影響 53
第六章 結論與未來發展 65
6-1 結論 65
6-2 未來發展 66
參考文獻 67

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