臺灣博碩士論文加值系統

　　「光機電系統控制研究室」近年來於微夾持系統上之研究，已開發出形狀記憶合金驅動之撓性微夾持器，本文在實驗室既有之微夾持系統上，改善原有夾持系統之缺點，並將微夾持器尺寸縮小到500µm之下；在致動器方面，以形狀記憶合金致動器為基礎，強化致動器結構；此外利用SMA遲滯環模型的建立，透過影像回授，來對形狀記憶合金致動器作控制，以達到夾持系統開口大小的控制。利用致動器與端效器功能獨立的原理，同時進行製造與測試，最後經由軟體的模擬來估測夾持系統之夾持力量。

　According to the researches of micro-gripping system in the “OME System Lab” in recent years, a polymer micro-gripper actuated by shape memory alloy has been developed. This thesis is based on their experiences and resources, and we improve shortcomings of original micro-gripper. Also, we reduce the maximum size of micro-gripper to under 500micrometer.

　Based on Shape Memory Alloy (S.M.A.) actuator, we strengthen the structure of the actuator. In addition, we describe hysteresis phenomenon of S.M.A. actuator by Preisach Model of numerical implementation. We control S.M.A. actuator to control the opening of micro-gripper through image feedback. According to axioms of functional independence, we can fabricate S.M.A. actuator and micro-gripper simultaneously. Finally, we estimate the grasping force of micro gripper by simulation.

中文摘要------------------------------------I
ABSTRACT-----------------------------------II
誌謝--------------------------------------III
表目錄------------------------------------VII
圖目錄-----------------------------------VIII
符號表-------------------------------------XI
第一章 緒論---------------------------------1
1-1 引言------------------------------------1
1-2 文獻回顧--------------------------------1
1-2-1 微夾持器系統介紹----------------------1
1-2-2 形狀記憶合金驅動之應用----------------3
1-2-3 形狀記憶合金驅動之操夾持器------------4
1-3 研究目標--------------------------------8
1-4 研究方法--------------------------------8
1-5 本文架構-------------------------------10
第二章 形狀記憶合金及遲滯模型特性分析------12
2-1 形狀記憶合金簡介-----------------------12
2-1-1 形狀記憶合金特性---------------------12
2-1-2 形狀記憶合金模型比較-----------------13
2-2 Preisach model-------------------------14
2-2-1 Preisach model原理-------------------14
2-2-2 Preisach 平面邊界--------------------15
2-3 Preisach model 性質--------------------18
2-3-1 wiping out property------------------18
2-3-2 congruent minor loop property--------20
第三章 形狀記憶合金致動器之實現與模擬------22
3-1 形狀記憶合金致動器之製造---------------22
3-1-1 微致動器之改良-----------------------22
3-1-2 圓弧型致動器之製造-------------------23
3-2 SMA驅動電路----------------------------24
3-3 SMA致動器影像量測----------------------26
3-3-1 影像量測原理-------------------------27
3-3-2 影像量測誤差分析---------------------30
3-4 SMA致動器識別與數值實現----------------32
3-4-1 識別(identification) ----------------32
3-4-2 數值實現-----------------------------35
3-5 Inverse Preisach Model 補償------------37
第四章 撓性微夾持器之建模與分析------------41
4-1 微夾持器之設計與製造-------------------41
4-1-1 微夾持器之改進-----------------------41
4-1-2 微夾持器製造-------------------------42
4-1-3 微夾持器與致動器之組裝---------------45
4-2 微夾持器之建模-------------------------46
4-2-1 撓性軸承分析-------------------------46
4-2-2 微夾持器之位移增益分析---------------48
4-2-3 微夾持器之力量-位移增益分析----------50
4-3 微夾持器有限元素分析-------------------51
4-3-1 位移增益分析-------------------------52
4-3-2 力量-位移增益分析--------------------53
4-3-3 夾持力量估測-------------------------54
4-4 微夾持器閉迴路控制---------------------55
第五章 系統整合與測試----------------------60
5-1 系統架構-------------------------------60
5-2 開口大小測試---------------------------62
5-3 夾持測試-------------------------------63
5-4 搬運測試-------------------------------67
第六章 結論與未來展望----------------------69
6-1 結論-----------------------------------69
6-2 未來展望-------------------------------70
參考文獻-----------------------------------71
附錄---------------------------------------74
自述---------------------------------------76

[1] R. G. Gilbertson, ”Practical Robotic Interstellar Flight: Are We Ready?” The Journal of The British Interplanetary Society, Vol. 49, pp. 129-138, 1996.
[2] A. D. Johnson, M. Fanucchi, V. Gupta, V. Martynov, V.Galhotra, K. Clements, "TiNi as a Nano-Actuator: Experimental Verification of Excitation by Electron-beam Heating," NanoSpace 2000 - Advancing the Human Frontier.
[3] K. Ikuta, ”Micro/Minature Shape Memory Alloy Actuator,” IEEE, 1999.
[4] S. B. Choi, Y. M. Han, J. H. Kim, C. C. Cheong, ”Force Tracking Control of a Flexible Gripper future Shape Memory Alloy Actuator,” Mechatronics, November 2001.
[5] S. Aramaki, ”Tube Type Micro Manipulator Using Shape Memory Alloy,”Sixth internal symposium on micro machine and human science, 1995.
[6] I. Roch, ”Fabrication and Characterization of an SU-8 Gripper Actuated by a Shape Memory Alloy Thin Film,” Journal of Micromechanics and Microengineering, 2003.
[7] N. Torisfontaine, ”A New Inter-Phalangeal Actuator for Dexterous Micro-Grippers, ”International Conference on Robotics and Automation, Albuquerque, New Mexico, pp.1773-1778, April 1997.
[8] A. M. Bertetto, “A Two Degree of Freedom Gripper Actuated by SMA with Flexure Hinges,” Journal of Robotic Systems, 2003.
[9] H. Zhang, “Shape Memory Alloy Microgripper for Robotic Microassembly of Tissue Engineering Scaffolds,” Proceedings of the 2004 IEEE International Conference on Robotics & Automation New Orleans, LA, April 2004.
[10] 机啟成，「形狀記憶合金驅動生醫用高分子微夾持系統之發展」，國立成功大學機械工程學系碩士論文，中華民國九十三年六月。
[11] K. Ikuta, “Mathematical Model And Experimental Verification of Shape Memory Alloy for Design Micro Actuator,” IEEE, pp103-108, 1991.
[12] D. R. Madill, “Modeling and L2-Stability of a Shape Memory Alloy Position Control System,” IEEE Transaction on Control System Technology, Vol.6, pp.473-481, 1998.
[13] R. B. Gorbet, “Preisach Model Identification of a Two-Wire SMA Actuator,” International Conference on Robotics and Automation, Proceedings of the 1998 IEEE, pp.2161-2167, 1998.
[14] P. Ge, M. Jouaneh, “Tracking Control of a Piezoceramic Actuator,” IEEE Transaction on Control System Technology, Vol.4, pp. 209-216, May1996.
[15] I. D. Mayergoyz, “Mathematical Models of Hysteresis,” IEEE Transaction on Magnetics, Vol.MAG-22, NO.5, pp.603-608, September 1986.
[16] D. Hughes, J. T. Wen, “Preisach Modeling of Piezoceramic and Shape Memory Alloy hystersis,” IEEE, pp. 1086-1091, 1995.
[17] 張景堯，「形狀記憶合金驅動高分子微夾持系統之發展」，國立成功大學機械工程學系碩士論文，中華民國九十二年六月。
[18] D. Hughes, J. T. Wen, “Preisach Modeling of Piezoceramic and Shape Memory Alloy Hystersis,” Smart Mater. Struct. 6, pp.287-300, 1997.
[19] X. Tan, J. S. Baras, “Modeling and Control of Hysteresis in Magnetostrictive Actuator,” Automatica, pp. 1469-1480, 2004.
[20] 繆紹綱，「數位影像處理」，台灣培生教育出版股份有限公司，pp.744-750，中華民國92年八月。
[21] S. Maeda, k. Minami, M. Esashi, “Excimer laser induced CVD and its application to selective non-planar metalIization,” J. Micromech. Microeng,Vol. 5, pp. 237-242, 1995.
[22] 馮瑨，「微作業端效器之設計製造與測試」，國立成功大學機械工程學系碩士論文，中華民國八十九年六月。
[23] J. M. Paros, “How to Design Flexure Hinges,” Machine design, vol.36, pp151-156, 1965.
[24] 程永華，「壓電致動微型撓性挾持器之設計、製造與控制」，國立成功大學機械工程學系碩士論文，中華民國八十八年六月。
[25] S. Boudjabi, A. Ferreira, A. Krupa, “Modeling and Vision-based of a Micro Catheter Head for Teleoperated In-Pipe Inspection,” Proceeding of the 2003 IEEE Internation Conference On Robotics & Automations Taipei, Taiwan, September 2003.
[26] Y. H. Han, S. B. Choi, “Shear Stress Tracking Control of an Electroheological Fluid Considering Hysteresis non-linearity,” IMechE, 2004.
[27] G. V. Webb, D. C. Lagoudas, “Hysteresis Modeling of SMA Actuators for Control Application,” Journal of Intelligent Material Systems and Structures, Vol. 9, June, 1998.