臺灣博碩士論文加值系統

摘要
本研究係探討N含量對Fe90Co10濺鍍薄膜磁性之影響。利用RF濺鍍法通入
氬氣與氮氣 混合氣體。其中N2的體積含量在N2/(Ar+N2)=0∼15vol%之間
，經由反應氣體濺鍍成 (Fe90Co10)100-xNx薄膜，其中x=0~40。薄
膜在氫氣還原爐中post annealing後，可得到 不同結構與成分性質之(
Fe90Co10)100-xNx之薄膜。
由X光繞射分析，剛濺鍍完薄膜之結構為納米晶，由TEM觀察與Auger成分
分析可知 ,濺鍍時N2的體積含量在N2/(Ar+N2)小於5 vol%時，薄膜會
形成具有磁性的低濃度Fe-N 或Co-N化合物相，若濺鍍的N2體積含量大
於5 vol %時便會形成高濃度的Fe-N或Co-N化物 相，薄膜的磁性便會消失
。磁性測量結果顯示，當濺鍍時N2的體積含量在1 vol%所形成 的薄膜其
飽和磁化量(4πMs)比Fe90Co10薄膜大3%。此外，Co含量的增加會增加薄
膜的 熱穩定性，當薄膜中Co含量佔總(Fe+Co)的50 at %以上時，薄膜
在300℃時仍具有非晶質 相。

ABSTERACT
(Fe90Co10)100-x Nx ;(x=0~40) thin films were prepared by
reactive RF magnetron sputtering. The flow rate ratio of
nitrogen (N2/Ar+N2) in the system was controlled at 0~15
vol %. The films were post-annealed in hydrogen furnace between
200 and 400℃in order to get high moment structures and
compositions.
X-ray diffraction indicated that the structure of the films was
nanocrystal for as-deposited films. TEM study and AES
compositions analysis revealed that the contents of nitrogen
under 20 at%, low nitrogen concentrated compound was
formed in the film that it is a magnetic phase. As the
content of nitrogen in films is larger than 30 at %, high
nitrogen concentrated compound was formed that it is a
magnetic phase. It is a magnetic phase. VSM measurements
showed that the saturation magnetization of (Fe90Co10)100-x
Nx ;(x=10~20) thin film was 3% larger than that of Fe90
Co10 thin film. After annealing at 200℃, the nitrogen in the
film would disappeared rapidly . The content of nitrogen was
decreased dramatically as heat-treated temperate increased.
Meanwhile,α-Fe and FeCo phases were formed at the films. After
heat-treated at high temperature , the magnetic
properties of low nitrogen concentrated and high nitrogen
concentrated (Fe90Co10)100-x Nx films were identical。