Abstract (in Chinese) I Abstract (in English) III 誌謝 V Contents VII Table Captions IX Figure Captions X Chapter 1 Introduction 1 1-1 Background 1 1-2 Motivation 3 1-3 Organization of this thesis 4 Chapter 2 Relevant Theory and Experimental Apparatus 9 2-1 Theory of Metal-Semiconductor-Metal photodetectors 9 2-1-1 Metal-Semiconductor-Metal photodetectors 9 2-1-2 Current Transport Mechanism 10 2-2 Experiment Apparatus 11 2-2-1 Radio frequency (RF) sputter 11 2-2-2 Horizontal vacuum furnace 13 2-2-3 Electron-beam (E-beam) evaporator 14 2-2-4 X-ray Diffraction (XRD) system 14 2-2-5 Current-Voltage (I-V) measurement system 15 Chapter 3 Improvement of thermal-induced degradation in ZnO-based photodetector 24 3-1 Introduction 24 3-2 Experimental processes 25 3-3 Material investigation of ZnO and ZnO/Ag 27 3-4 I-V measurement and analysis of ZnO-based photodetectors 28 3-5 Summary 33 Chapter 4 Conclusions and Future Works 53 4-1 Conclusions 53 4-2 Future Works 54 4-2-1 The other ways to fabricate p-n junction with ZnO 54 4-2-2 Synthesis three-dimension (3D) nanostructure of ZnO 54 References 56
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