臺灣博碩士論文加值系統

光學Tamm模態是一種電漿共振發生在光子晶體表面與金屬薄膜之間的一種侷域的表面模態。在常見的光學Tamm模態結構中通常會使用布拉格反射器(DBR)做為Tamm模態中的光子晶體，藉由改變DBR上層薄膜的厚度或是製作DBR孔洞陣列，可以用來調控模態的共振波長。但是這類樣品在製作完之後，很難藉由控制薄膜的品質或是調整DBR的厚度去作調控共振波長。在這篇論文中，我們利用奈米球堆疊而成的三維光子晶體取代DBR，並加上間隔層與金屬層來激發光學Tamm模態，這種架構稱為混合型光子晶體。混合型光子晶體可以藉由改變外在環境來輕易調控Tamm模態的共振波長。本論文另一部分的研究是針對氮化鈦來開發可應用在可見光與紅外光波段的新穎電漿子材料，使用多靶磁控共濺鍍系統與高功率脈衝磁控濺鍍技術製造符合電漿子特性之氮化鈦薄膜，並嘗試用氮化鈦薄膜替代Tamm模態架構中之金屬薄膜來觀察其Tamm電漿子共振。

Optical Tamm state is a localized surface mode that plamonic resonance occurred at the boundary between a photonic crystal and metal.
Conventional optical Tamm states have been used distributed Bragg reflector (DBR) as the photonic crystal. By varying the thickness of the top layer of DBR or making DBR porous, it could possibly tune the resonant wavelengths. However, it is very difficult to control the quality or modify the thickness of DBR after a sample is fabricated. In this thesis, we choose 3D photonic crystal fabricated by nanosphere to replace DBR to excite optical Tamm state. This structure is called "Hybrid Photonic Crystal ". Hybird photonic crystal can easily tune the resonant wavelengths of Tamm state by changing the environment. In the second part of this thesis, we report the titanium nitride (TiN) as an alternative plasmonic material in visible and near-infrared region. The multi-target magnetron co-sputter system with combined high power impulse magnetron sputtering (HIPIMS) is used to fabricate TiN thin film. The optimization processing condition as well as optical characterization of TiN is introduced. We also replace the metal in optical Tamm state structure by TiN thin film to observe the Tamm plasmon resonance.

致謝 I
中文摘要 II
Abstract III
Contents IV
圖目錄 VI
表目錄 X
第1章 簡介 1
1.1 研究動機 1
1.2 替代性電漿子材料 3
1.3 光學Tamm模態 4
1.4 光子晶體 7
1.5 奈米球與自組裝排列機制 8
第2章 研究設計與數值模擬模型 11
2.1 時域有限差分法 11
2.1.1 一維光子晶體之Tamm電漿子架構 11
2.1.2 奈米球架構 13
第3章 替代性電漿子材料 17
3.1 氮化鈦薄膜製程 17
3.1.1 多靶式磁控共濺鍍系統 17
3.1.2 光譜儀 20
3.1.3 橢偏儀 20
3.2 氮化鈦薄膜之光學性質與電性的可調控性 21
3.2.1 光學特性 21
3.2.2 電性 23
3.2.3 結論 24
3.3 鋁薄膜之光學特性 25
3.4 一維光子晶體之Tamm電漿子模態 26
第4章 混合型光子晶體特性分析 28
4.1 遠場分析與模擬 28
4.1.1 奈米球陣列頻譜 29
4.1.2 混合型光子晶體頻譜 29
4.2 不同金屬之效應 34
4.3 實驗設備與方法 35
4.3.1 超音波洗淨機 35
4.3.2 旋轉塗佈機 36
4.3.3 電子束蒸鍍機 36
4.4 實驗製程步驟 36
4.4.1 金屬薄膜蒸鍍 36
4.4.2 奈米球溶液配置 37
4.4.3 奈米球堆積 37
4.5 實驗與模擬結果比較 39
4.5.1 奈米球頻譜 39
4.5.2 混合型光子晶體頻譜 42
第5章 混合型光子晶體於環境感測器之應用 44
5.1 奈米球頻譜 44
5.1.1 模擬結果 44
5.1.2 實驗與模擬結果比較 45
5.2 混合型光子晶體頻譜 46
5.2.1 模擬結果 46
5.2.2 實驗與模擬結果比較 47
第6章 結論 49
第7章 參考文獻 50

[1] C.-W. Lin, K.-P. Chen, M.-C. Su, T.-C. Hsiao, S.-S. Lee, S. Lin, et al., "Admittance loci design method for multilayer surface plasmon resonance devices," Sensors and Actuators B: Chemical, vol. 117, pp. 219-229, 2006.
[2] C.-W. Lin, K.-P. Chen, M.-C. Su, C.-K. Lee, and C.-C. Yang, "Bio-plasmonics: nano/micro structure of surface plasmon resonance devices for biomedicine," Optical and quantum electronics, vol. 37, pp. 1423-1437, 2005.
[3] C.-W. Su and K.-P. Chen, "Broadband gold nanoantennas arrays with transverse dimension effects," Optics Express, vol. 24, pp. 17760-17765, 2016.
[4] C.-W. Lin, K.-P. Chen, C.-N. Hsiao, S. Lin, and C.-K. Lee, "Design and fabrication of an alternating dielectric multi-layer device for surface plasmon resonance sensor," Sensors and Actuators B: Chemical, vol. 113, pp. 169-176, 2006.
[5] K.-P. Chen, V. P. Drachev, J. D. Borneman, A. V. Kildishev, and V. M. Shalaev, "Drude relaxation rate in grained gold nanoantennas," Nano letters, vol. 10, pp. 916-922, 2010.
[6] Z.-Y. Yang and K.-P. Chen, "Effective absorption enhancement in dielectric thin-films with embedded paired-strips gold nanoantennas," Optics express, vol. 22, pp. 12737-12749, 2014.
[7] Y.-C. Hsiao, C.-W. Su, Z.-H. Yang, Y. I. Cheypesh, J.-H. Yang, V. Y. Reshetnyak, et al., "Electrically active nanoantenna array enabled by varying the molecular orientation of an interfaced liquid crystal," RSC Advances, vol. 6, pp. 84500-84504, 2016.
[8] K.-P. Chen, S.-C. Ye, C.-Y. Yang, Z.-H. Yang, W. Lee, and M.-G. Sun, "Electrically tunable transmission of gold binary-grating metasurfaces integrated with liquid crystals," Optics Express, vol. 24, pp. 16815-16821, 2016.
[9] Y.-L. Kuo, S.-Y. Chuang, S.-Y. Chen, and K.-P. Chen, "Enhancing the Interaction between High-Refractive Index Nanoparticles and Gold Film Substrates Based on Oblique Incidence Excitation," ACS Omega, vol. 1, pp. 613-619, 2016.
[10] J.-H. Yang and K.-P. Chen, "Evanescent Wave-Assisted Symmetry Breaking of Gold Dipolar Nanoantennas," Scientific Reports, vol. 6, 2016.
[11] Z. Liu, K.-P. Chen, X. Ni, V. P. Drachev, V. M. Shalaev, and A. V. Kildishev, "Experimental verification of two-dimensional spatial harmonic analysis at oblique light incidence," JOSA B, vol. 27, pp. 2465-2470, 2010.
[12] S. Ishii, A. V. Kildishev, V. M. Shalaev, K.-P. Chen, and V. P. Drachev, "Metal nanoslit lenses with polarization-selective design," Optics letters, vol. 36, pp. 451-453, 2011.
[13] A. V. Kildishev, J. D. Borneman, K.-P. Chen, and V. P. Drachev, "Numerical modeling of plasmonic nanoantennas with realistic 3D roughness and distortion," Sensors, vol. 11, pp. 7178-7187, 2011.
[14] Y.-H. Chen, K.-P. Chen, M.-H. Shih, and C.-Y. Chang, "Observation of the high-sensitivity plasmonic dipolar antibonding mode of gold nanoantennas in evanescent waves," Applied Physics Letters, vol. 105, p. 031117, 2014.
[15] M.-Y. Lu, C.-Y. Tsai, H.-A. Chen, Y.-T. Liang, K.-P. Chen, S. Gradečak, et al., "Plasmonic enhancement of Au nanoparticle—embedded single-crystalline ZnO nanowire dye-sensitized solar cells," Nano Energy, vol. 20, pp. 264-271, 2016.
[16] X. Wang, K.-p. Chen, M. Zhao, and D. D. Nolte, "Refractive index and dielectric constant evolution of ultra-thin gold from clusters to films," Optics express, vol. 18, pp. 24859-24867, 2010.
[17] Z.-Y. Yang, Y.-H. Chen, B.-H. Liao, and K.-P. Chen, "Room temperature fabrication of titanium nitride thin films as plasmonic materials by high-power impulse magnetron sputtering," Optical Materials Express, vol. 6, pp. 540-551, 2016.
[18] J. Borneman, K.-P. Chen, A. Kildishev, and V. Shalaev, "Simplified model for periodic nanoantennae: linear model and inverse design," Optics express, vol. 17, pp. 11607-11617, 2009.
[19] Z.-y. Yang, S. Ishii, T. Yokoyama, T. D. Dao, M.-g. Sun, T. Nagao, et al., "Tamm plasmon selective thermal emitters," Optics Letters, vol. 41, pp. 4453-4456, 2016.
[20] C.-Y. Chang, Y.-H. Chen, Y.-L. Tsai, H.-C. Kuo, and K.-P. Chen, "Tunability and Optimization of Coupling Efficiency in Tamm Plasmon Modes," IEEE Journal of Selected Topics in Quantum Electronics, vol. 21, pp. 262-267, 2015.
[21] W. Chen, K. Chen, M. D. Thoreson, A. Kildishev, and V. M. Shalaev, "Ultrathin, ultrasmooth, and low-loss silver films via wetting and annealing," Applied Physics Letters, vol. 97, p. 211107, 2010.
[22] K. Leosson, S. Shayestehaminzadeh, T. Tryggvason, A. Kossoy, B. Agnarsson, F. Magnus, et al., "Comparing resonant photon tunneling via cavity modes and Tamm plasmon polariton modes in metal-coated Bragg mirrors," Optics letters, vol. 37, pp. 4026-4028, 2012.
[23] H. Zhou, G. Yang, K. Wang, H. Long, and P. Lu, "Multiple optical Tamm states at a metal–dielectric mirror interface," Optics letters, vol. 35, pp. 4112-4114, 2010.
[24] C. Liu, M. Kong, and B. Li, "Tamm plasmon-polariton with negative group velocity induced by a negative index meta-material capping layer at metal-Bragg reflector interface," Optics express, vol. 22, pp. 11376-11383, 2014.
[25] M. Kaliteevski, I. Iorsh, S. Brand, R. Abram, J. Chamberlain, A. Kavokin, et al., "Tamm plasmon-polaritons: Possible electromagnetic states at the interface of a metal and a dielectric Bragg mirror," Physical Review B, vol. 76, p. 165415, 2007.
[26] W. L. Zhang, F. Wang, Y. J. Rao, and Y. Jiang, "Novel sensing concept based on optical Tamm plasmon," Optics express, vol. 22, pp. 14524-14529, 2014.
[27] M. Sasin, R. Seisyan, M. Kaliteevski, S. Brand, R. Abram, J. Chamberlain, et al., "Tamm plasmon-polaritons: First experimental observation," Superlattices and Microstructures, vol. 47, pp. 44-49, 2010.
[28] C. Symonds, G. Lheureux, J. Hugonin, J. Greffet, J. Laverdant, G. Brucoli, et al., "Confined Tamm plasmon lasers," Nano letters, vol. 13, pp. 3179-3184, 2013.
[29] C. Symonds, A. Lemaître, P. Senellart, M. Jomaa, S. A. Guebrou, E. Homeyer, et al., "Lasing in a hybrid GaAs/silver Tamm structure," Applied Physics Letters, vol. 100, p. 121122, 2012.
[30] Y. Gong, X. Liu, H. Lu, L. Wang, and G. Wang, "Perfect absorber supported by optical Tamm states in plasmonic waveguide," Optics express, vol. 19, pp. 18393-18398, 2011.
[31] A. Capretti, Y. Wang, N. Engheta, and L. Dal Negro, "Comparative study of second-harmonic generation from epsilon-near-zero indium tin oxide and titanium nitride nanolayers excited in the near-infrared spectral range," ACS Photonics, vol. 2, pp. 1584-1591, 2015.
[32] P. Patsalas, N. Kalfagiannis, and S. Kassavetis, "Optical properties and plasmonic performance of titanium nitride," Materials, vol. 8, pp. 3128-3154, 2015.
[33] C. M. Zgrabik and E. L. Hu, "Optimization of sputtered titanium nitride as a tunable metal for plasmonic applications," Optical Materials Express, vol. 5, pp. 2786-2797, 2015.
[34] K. Vasu, M. G. Krishna, and K. Padmanabhan, "Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films," Applied Surface Science, vol. 257, pp. 3069-3074, 2011.
[35] Y. Wang, A. Capretti, and L. Dal Negro, "Wide tuning of the optical and structural properties of alternative plasmonic materials," Optical Materials Express, vol. 5, pp. 2415-2430, 2015.
[36] P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, "Searching for better plasmonic materials," Laser & Photonics Reviews, vol. 4, pp. 795-808, 2010.
[37] J. B. Khurgin and A. Boltasseva, "Reflecting upon the losses in plasmonics and metamaterials," MRS bulletin, vol. 37, pp. 768-779, 2012.
[38] J. D. Joannopoulos, S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic crystals: molding the flow of light: Princeton university press, 2011.
[39] N. Denkov, O. Velev, P. Kralchevski, I. Ivanov, H. Yoshimura, and K. Nagayama, "Mechanism of formation of two-dimensional crystals from latex particles on substrates," Langmuir, vol. 8, pp. 3183-3190, 1992.
[40] A. S. Dimitrov and K. Nagayama, "Continuous convective assembling of fine particles into two-dimensional arrays on solid surfaces," Langmuir, vol. 12, pp. 1303-1311, 1996.
[41] B. G. Prevo and O. D. Velev, "Controlled, rapid deposition of structured coatings from micro-and nanoparticle suspensions," Langmuir, vol. 20, pp. 2099-2107, 2004.
[42] J. Bohlmark, M. Lattemann, J. Gudmundsson, A. Ehiasarian, Y. A. Gonzalvo, N. Brenning, et al., "The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge," Thin Solid Films, vol. 515, pp. 1522-1526, 2006.
[43] M. Aiempanakit, A. Aijaz, D. Lundin, U. Helmersson, and T. Kubart, "Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides," Journal of Applied Physics, vol. 113, p. 133302, 2013.
[44] G. Kim, S. Lee, and J. Hahn, "Properties of TiAlN coatings synthesized by closed-field unbalanced magnetron sputtering," Surface and Coatings Technology, vol. 193, pp. 213-218, 2005.
[45] G. V. Naik, J. Kim, and A. Boltasseva, "Oxides and nitrides as alternative plasmonic materials in the optical range [Invited]," Optical Materials Express, vol. 1, pp. 1090-1099, 2011.
[46] S. G. Romanov, A. Regensburger, A. V. Korovin, A. S. Romanova, and U. Peschel, "Noninvasive manipulation of the optical response of opal photonic crystals," Physical Review B, vol. 88, p. 125418, 2013.
[47] T. L. Lin, J. H. Lin, J. T. Guo, and H. C. Kan, "Suppression of Photonic Bandgap Reflection by Localized Surface Plasmons in Self‐Assembled Plasmonic–Photonic Crystals," Advanced Optical Materials, vol. 3, pp. 1470-1475, 2015.
[48] A. V. Korovin and S. G. Romanov, "Unconventional optical Tamm states in metal-terminated three-dimensional photonic crystals," Physical Review B, vol. 93, p. 115440, 2016.
[49] B. Ding, M. Bardosova, M. E. Pemble, A. V. Korovin, U. Peschel, and S. G. Romanov, "Broadband Omnidirectional Diversion of Light in Hybrid Plasmonic‐Photonic Heterocrystals," Advanced Functional Materials, vol. 21, pp. 4182-4192, 2011.
[50] M. López‐García, J. F. Galisteo‐López, A. Blanco, J. Sánchez‐Marcos, C. López, and A. García‐Martín, "Enhancement and Directionality of Spontaneous Emission in Hybrid Self‐Assembled Photonic–Plasmonic Crystals," Small, vol. 6, pp. 1757-1761, 2010.
[51] L. Landström, D. Brodoceanu, D. Bäuerle, F. Garcia-Vidal, S. G. Rodrigo, and L. Martin-Moreno, "Extraordinary transmission through metal-coated monolayers of microspheres," Optics Express, vol. 17, pp. 761-772, 2009.
[52] X. Yu, L. Shi, D. Han, J. Zi, and P. V. Braun, "High quality factor metallodielectric hybrid plasmonic–photonic crystals," Advanced Functional Materials, vol. 20, pp. 1910-1916, 2010.
[53] S. G. Romanov, A. V. Korovin, A. Regensburger, and U. Peschel, "Hybrid Colloidal Plasmonic‐Photonic Crystals," Advanced Materials, vol. 23, pp. 2515-2533, 2011.
[54] L. Shi, X. Liu, H. Yin, and J. Zi, "Optical response of a flat metallic surface coated with a monolayer array of latex spheres," Physics Letters A, vol. 374, pp. 1059-1062, 2010.
[55] F. Fleischhaker, A. C. Arsenault, J. Schmidtke, R. Zentel, and G. A. Ozin, "Spin-coating of designed functional planar defects in opal film: generalized synthesis," Chemistry of materials, vol. 18, pp. 5640-5642, 2006.
[56] 廖力弘, "以自組光子晶體製作可調波段遮蔽器" 2015.