臺灣博碩士論文加值系統

在以往步態分析中，並無法直接由自身的輔具求得足底壓力分佈，必須藉由外部的感測器，如壓力板，以得到足部壓力或是地面反射力，乃至於肢體之動作。本研究將提出一嶄新的概念，即穿戴式及符合智慧型輔具之撓性壓力感測陣列，以突破傳統上離散的剛性矽質微壓力計在製造與封裝完成後，不易應用於一些穿戴式輔具的限制。經由本研究的實現，不但可免去購買昂貴設備的經費，更可擺脫空間限制，而將感測器的應用普及化；患者只需將感測器直接穿戴在身上，便可正確且迅速得到自身的生理訊號，以便即時監控、即時反應。

In the past gait analysis, the distribution of the sole pressure cannot be got by the appliance put on patients; the sole pressure or the reaction force, even the physical movement can only be got by an outside sensor, for instance, the pressure board. This research will provide a brand-new concept, that is, the flexible pressure sensors array which is wearable and can be considered as an intelligence device. The concept is for breaking the limitation that, the dispersed rigid silicon-based micro pressure sensor has been hard to apply for some wearing device after fabrication and packaging traditionally. With the achievement of this research, not only cost for purchasing high-priced equipment can be saved, but space limit will no longer be a problem; therefore, application of sensor will be much more popular; all patients have to do is to put on the sensor, and they can get their own physical signals correctly and swiftly for monitoring and reacting in time.

中文摘要 I
英文摘要 II
致謝 III
目錄 V
圖目錄 VII
表目錄 XII
第一章 序論 1
1-1 前言 1
1-2 文獻回顧 2
1-2.1 壓力感測器 2
1-2.2 撓性感測器 6
1-3 研究目標 10
第二章 設計與分析 25
2-1 壓阻效應 25
2-2 惠斯同電橋 28
2-3 元件設計與模擬 29
第三章 製程與實驗 40
3-1 製程步驟 40
3-2 製程結果與問題改善 42
3-2.1 壓力感測器 42
3-2.2 撓性PDMS電路層 45
3-2.3 穿透晶圓之垂直式導線 47
第四章 量測與結果 63
4-1 壓力感測器量測 63
4-2 撓性感測器量測 66
4-3 圖形化資料擷取與分析 67
第五章 結論與未來工作 79
5-1 結論 79
5-2 未來工作 80
參考文獻 83

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