臺灣博碩士論文加值系統

由於石墨烯在各方面的應用上皆表現出驚人的特性，人們對於石墨烯的研究及應用越來越重視，甚至有學者將它稱為能夠改變21世紀之材料。

本研究係使用PVD濺鍍配合高溫氧化及真空高溫處理之製程來製造石墨烯。在嘗試了不同濺鍍鍍層厚度、氧化處理時間、真空高溫還原溫度的實驗參數後，再利用拉曼光譜儀、熱重分析儀、原子力顯微鏡來分析，成功的在銅箔基板上製造出大面積且連續之石墨烯薄膜。

實驗結果顯示，多組實驗數據搭配皆能成功的製造出少層石墨烯，以銅箔為底材，利用原子力顯微鏡、熱重分析儀和拉曼光譜儀觀察並分析後，皆顯示出相當不錯的成果。

In recent years, the research and application of graphene becoming more and more popular. This two-dimensional material exhibits amazing properties on the application of all aspects, some scholars even say that graphene will change the way we live.

This study used PVD sputtering collocation high-temperature oxidation and high-temperature vacuum treatment to manufacture graphene. After trying different films thickness, oxidative induction time and high-temperature vacuum reducing, then use Raman spectroscopy, Thermogravimetry Analysis(TGA) and Atomic Force Microscope(AFM) to analyze. Finally succeed to manufacture large area of continuously graphene film.

In the result, most multiple groups of empirical data could succeed to manufacture grapheme. This empirical data had great achievement after using AFM, TGA and Raman spectroscopy to analyze.

摘要II
AbstractIII
目錄IV
圖目錄VI
表目錄VIII
第一章　緒論1
1-1研究動機1
1-2 石墨烯之簡介1
1-3 石墨烯之結構與其特色2
第二章 文獻回顧6
2-1 石墨烯常見的製備方法6
2-2 檢測石墨烯所需之儀器與原理介紹11
2-2-1拉曼光譜儀 (Raman spectroscopy)11
2-2-2 掃描式電子顯微鏡(Scanning electron microscope)17
2-2-3原子力顯微鏡(Atomic Force Microscopy)20
2-2-4 熱重分分析儀(Thermogravimetric Analysis)22
第三章　實驗流程與儀器分析23
3-1 實驗材料23
3-1-1 試片鍍膜前處理23
3-1-2 試片鍍膜25
3-2 石墨烯製備方法26
3-2-1 高溫氧化石墨26
3-2-2 真空高溫還原27
3-3 石墨烯轉印方式28
3-3-1 轉印過程中可能的PMMA殘留29
3-4 表証石墨烯使用之儀器參數31
3-4-1 拉曼光譜儀31
3-4-2 熱重分析儀31
3-4-3 原子力顯微鏡31
3-4-4 掃描式電子顯微鏡32
第四章　結果與討論 33
4-1 熱重分析儀分析石墨烯各型態熱穩定性33
4-2 探討石墨氧化機制與拉曼光譜儀分析35
4-3 氧化石墨還原機制與拉曼光譜儀分析39
4-4 原子力顯微鏡檢測石墨烯厚度45
4-5 掃描式電子顯微鏡觀察少層石墨烯表面結構53
第五章　結論56
第六章　參考文獻57

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