臺灣博碩士論文加值系統

本論文提出並實作了一個包含了溫度感測器與低雜訊的類比數位轉換器。此電路實作於台積電180奈米製程，為了減少電路的面積，將一個溫度感測電路與二階連續時間的三角積分類比數位轉換器(2nd-order Continuous-Time Delta-Sigma ADC)整合，省去了傳統系統中的儀表放大器，並達到重複利用電路的功效。為了達成低雜訊，使用了一個電阻式數位類比轉換器(R-DAC)來減少訊號輸入端的閃爍雜訊。為了達成低雜訊，截波器(Chopper)來消除第一級運算放大器雙端輸入之間的不匹配和閃爍雜訊。而加入截波器會對輸入回授產生一個低頻的雜訊，為了去除這種雜訊，電阻式數位類比轉換器中加入了有限脈衝響應濾波器(Finite Impulse Response Filter, FIR Filter)。
提出的晶片核心面積僅0.59平方毫米，支援的量測範圍為 -40°C到100°C，轉換時間為333 微秒。在功耗為183.6 微瓦下，溫度解析度高達0.00371°C。經過批量校正後不準確度為" ±1.8 °C" ，相對應的Resolution FoM = 0.84 pJ°C2 。

中文審定書 i
英文審定書 iii
摘要 vii
Abstract ix
List of Figures xiii
List of Tables xix
Chapter 1 Introduction 1
1.1 Background 1
1.2 Dissertation Overview 1
Chapter 2 Fundamental of Sensor Circuits and Low Noise Technique 3
2.1 Basic Sensor Read-Out Systems 3
2.2 Non-Idealities in Sensor Read-Out Systems 4
2.2.1 Offset Voltage 5
2.2.2 Noise Response 6
2.3 Low Noise Technique 10
2.3.1 Auto-zeroing 10
2.3.2 Chopping 12
2.3.3 Digitally-assisted Offset Trimming 14
2.4 Introduction to Sensors for Temperature Sensing Systems 15
2.4.1 BJT-based Temperature Sensors 15
2.4.2 Temperature-to-Phase Sensors 17
2.4.3 Wheatstone Bridge Sensor 18
2.5 Variation of Wheatstone Bridge Sensor 20
2.5.1 Process Corner 20
2.5.2 Variation in Intrinsic Resistance 22
2.5.3 Variation in Temperature Coefficient 23
Chapter 3 Review of Delta-Sigma Modulators 27
3.1 Introduction 27
3.2 DT Loop Filter 27
3.2.1 A N-Bit Quantizer 28
3.2.2 Order of Loop Filter 30
3.2.3 Over-Sampling in ADC 33
3.2.4 Brief Summary 34
3.3 Introduction of CTDSM 34
3.3.1 Difference Between DT/CTDSM 35
3.3.2 Anti-Aliasing Behavior 36
3.3.3 Excess Loop Delay 39
3.3.4 Topology of common CTDSM 41
3.4 Design from DTDSM to CTDSM 42
3.4.1 Design Flow 43
3.4.2 Simulation Results 43
Chapter 4 Design of a Temperature Sensor Embedded Second-Order 1-Bit Continuous-Time Delta-Sigma ADC 51
4.1 Introduction 51
4.2 Analysis of RC-Based Integrator CTDSM Incorporating Chopper 53
4.2.1 System Architecture 53
4.2.2 Noise Analysis 54
4.2.3 Chopper Induced Noise Issue 59
4.2.4 Proposed FIR Filter 62
4.3 Proposed Sensor Embedded CTDSM ADC 64
4.3.1 Detailed System Architecture 64
4.3.2 Operational Amplifier 66
4.3.3 1-Bit Quantizer 71
4.4 Circuit Implementation and Simulation Result 72
4.4.1 Wheatstone Bridge Sensor 72
4.4.2 Read-out circuit 74
Chapter 5 Measurement Results of Proposed Temperature Sensor 81
5.1 Review of Temperature Sensor Specification 81
5.2 Measurement Results 82
5.2.1 Die Photo 82
5.2.2 Measurement Environment Setup 82
5.2.3 Measured Results 84
5.3 Discussion and Summary 92
Chapter 6 Conclusions and Future Works 93
6.1 Conclusions 93
6.2 Future Works 93
References 95

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