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研究生:顧偉弘
研究生(外文):KU,WAI-HON
論文名稱:在氧氛圍下共鍍Al與TiSi2並探討其機械性質
論文名稱(外文):Discussing mechanical properties of co-sputtering Al and TiSi2 thin films in oxygen atmosphere
指導教授:彭坤增
指導教授(外文):PENG,KUN-CHENG
口試委員:李春穎徐富勇
口試委員(外文):LEE,CHUN-YINGHSU,FU-YUNG
口試日期:2018-06-28
學位類別:碩士
校院名稱:明志科技大學
系所名稱:材料工程系碩士班
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2018
畢業學年度:106
語文別:中文
論文頁數:84
中文關鍵詞:機械性質硬度薄膜
外文關鍵詞:Mechanical propertieshardnessthin film
相關次數:
  • 被引用被引用:0
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  • 下載下載:2
  • 收藏至我的研究室書目清單書目收藏:0
本研究分別使用射頻電源(RF)濺鍍鈦矽(TiSi2)靶,以及直流電源(DC)濺鍍純鋁靶(5N, Al)來共鍍(Co-Sputtering)製備含鈦(Ti)、矽(Si)、鋁(Al)的氧化物硬膜,其中並對基板施以偏壓以及製成多層(Multilayer)膜的方式來比較其硬度、抗腐蝕、機械性質的差異,希望能製備出在高溫環境下硬度與附著性皆佳的薄膜。以奈米壓痕試驗機進行分析研究結果顯示,指改變元素比例的實驗其硬度值、附著性、抗腐蝕能力皆低於添加氧氣後的實驗,而在添加偏壓之後硬度值又進一步的提升到了15.41 GPa,附著性則達到了20N以上,擁有較佳硬度與附著性。
本實驗還進行了退火後的分析,從XRD能明顯的觀察到結晶性變好的情況,並從奈米壓痕試驗中了解到即使在900 oC的退火下硬度值也不會有太大的改變,且抗腐蝕能力與附著性則與退火前幾乎相似,表面粗糙度也僅有0.0968 µm,可見擁有平整的表面。

In this study, the hard oxide film containing titanium (Ti), silicon (Si) and aluminum (Al) was prepared by co-sputtering of a titanium disilicide (TiSi2) target sputtered by RF power and a pure aluminum target sputtered by DC power; furthermore, the substrate was biased to form multilayer films. These films are compared in hardness, corrosion resistance and mechanical properties.
The analysis results of the nanoindentation tester show that the experiment after adding oxygen has good hardness value, adhesion and corrosion resistance. Moreover, after adding the bias, the hardness value is further increased to 15.41 GPa, and the adhesion reached over 20 N.
The analysis after annealing was also carried out, and the better crystallinity was obviously observed from XRD. There is not much difference in the hardness values of the films after annealing at 900 °C. The corrosion resistance and adhesion are almost similar to those before annealing. Besides, these films have a flat surface with the roughness of 0.0968 μm.

目錄
明志科技大學碩士學位論文口試委員審定書
中文摘要
英文摘要
目錄
圖目錄
表目錄
第一章 緒論
1-1 前言
1-2 研究動機
第二章 理論基礎
2-1 強化機制
2-2 結晶機制
2-3 鋁元素特性
2-4 TiSi2特性
第三章 實驗細節與流程
3-1 實驗流程
3-2 實驗步驟
3-2-1 實驗材料
3-2-2 基板製程前處理
3-2-3 靶材製程前處理
3-3 實驗材料
3-4 實驗參數
3-5 製程及檢驗儀器
3-5-1 製程儀器
3-5-2 檢測儀器
第四章 結果與討論
4-1 改變不同氬氣流量
4-2 改變濺鍍槍功率並製備薄膜
4-2-1 結論
4-3 含氧的氛圍下改變濺鍍槍功率並製備薄膜
4-3-1 結論
4-4 在養氛圍下使用偏壓去製備薄膜
4-4-1 結論
4-5 退火後的性質檢測
4-5-1 結論
第五章 結論
第六章 未來展望
參考文獻
圖目錄
圖2-1 結晶情況示意圖(a)單晶(b)多晶(c)非晶
圖2-2 鋁元素示意圖
圖3-1 實驗流程示意圖
圖3-2 磁控濺鍍示意圖
圖3-3 布拉格定律示意圖
圖3-4 掃描式電子顯微鏡結構圖
圖3-5 電子束轟擊試片表面所產生之訊號
圖3-6 壓痕形狀示意圖
圖3-7 負載與壓痕深度示意圖
圖3-8 試片表面粗糙度效應
圖3-9 試片表面突起和陷入效應
圖3-10 刮痕試驗儀示意圖
圖3-11 恆電位儀示意圖
圖3-12 原子力顯微鏡示意圖
圖4-1-1量測位置示意圖
圖4-1-2 固定其餘參數以5 sccm的氬氣流量的XRD分析數據
圖4-2-1 DC功率50W共摻RF功率50W於Si基板上之SEM (a)500倍
與(b)1000倍
圖 4-2-2 功率50W共摻RF功率50W於不銹鋼基板上之SEM (a)500
倍與(b)1000倍
圖4-2-3更改元素配比的XRD分析圖
圖4-2-4硬度值試驗位置示意圖
圖4-2-5刮痕試驗圖
圖4-2-21恆電位儀量測圖譜
圖4-2-22 AFM量測
圖4-3-1 DC功率50W共摻RF功率50W於Si基板上且含氧500倍(a)
與1000倍(b)之SEM
圖4-3-2 DC功率50W共摻RF功率50W於不銹鋼基板上且含氧500
倍(a)與1000倍(b)之SEM
圖4-3-3添加氧氣後的XRD分析圖
圖4-3-4添加氧氣後的刮痕試驗圖
圖4-3-5 添加氧氣後的恆電位儀量測圖譜
圖4-3-6 AFM量測結果
圖4-4-1相同功率且含氧於Si基板上並使用5 W偏壓之500倍(a)與
1000倍(b)SEM
圖4-4-24-4-2相同功率且含氧於不銹鋼基板上並使用25 W偏壓之500
倍(a)與1000倍(b)SEM
圖4-4-3使用偏壓後的XRD分析圖
圖4-4-4添加偏壓後的恆電位儀量測結果
圖4-4-5添加偏壓後的刮痕試驗圖
圖4-4-6添加偏壓後的AFM量測結果
圖4-5-1 600oC退火後之500倍(a)與1000倍(b)SEM
圖4-5-2 700oC退火後之500倍(a)與1000倍(b)SEM
圖4-5-3 800oC退火後之500倍(a)與1000倍(b)SEM
圖4-5-4 900oC退火後之500倍(a)與1000倍(b)SEM
圖4-5-5 退火後的XRD分析圖
圖4-5-6 800oC退火後的恆電位儀量測圖
圖4-5-7 800oC退火後的刮痕試驗量測圖
圖4-5-8 800oC退火後的AFM量測圖
表目錄
表一 濺鍍參數
表二 退火參數
表三、實驗參數
表四、各點膜厚數據
表五、濺鍍速率與均勻性
表六、改變濺鍍槍功率後的EDS分析
表七、改變濺鍍槍功率的實驗參數
表八、更改元素比例之晶粒尺寸數據
表九、以單晶矽為基板在未使用RF偏壓及添加氧氣的氛圍下並以
DC(Al靶)功率10-90W共摻RF(TiSi2靶)功率90-10W硬度值數據
表十、DC(Al靶)功率50W共摻RF(TiSi2靶)功率50W AFM數據
表十一、含氧的氛圍下改變濺鍍槍功率的實驗參數
表十二、含氧的氛圍下改變濺鍍槍功率後的EDS分析
表十三、添加氧氣後晶粒尺寸數據
表十四、以單晶矽為基板在添加氧氣的氛圍下未使用RF偏壓並以
DC(Al靶)功率10-90W共摻RF(TiSi2靶)功率90-10W硬度值數據
表十五、添加氧氣並以DC功率50W共摻RF功率50W AFM數據
表十六、添加偏壓後EDS檢測結果
表十七、添加偏壓後的實驗參數
表十八、添加偏壓後晶粒尺寸數據
表十九、以單晶矽為基板在添加氧氣的氛圍下使用RF偏壓並以DC(Al
靶)功率50W共摻RF(TiSi2靶)功率50W硬度值數據
表二十、添加偏壓後的AFM量測數據
表二十一、欲進行退火前的實驗參數
表二十二、退火後EDS檢測結果
表二十三、退火後Al的晶粒尺寸數據
表二十四、退火後TiSi2的晶粒尺寸數據
表二十五、退火後的硬度值數據
表二十六、800oC退火後的AFM數據


[1] Wang Da Yong, Zhang Yin You, Hong Zhi Ying, Mingdao University Department of Materials and Energy Engineering Development and application of cathode arc deposition of aluminum nitride titanium/chromium nitride nanometer multilayer film Journal of Science and Engineering Technology, Vol 1,1-6(2005)
[2] Wei Xing Shu, Cha Zhang, Fangni Zhang , Jhy Chern Liu , Tailored Mgand Cu contents affecting the microstructures and mechanical properties of high-strength Al–Zn–Mg–Cu alloys Materials Science&Engineering A657 (2016) 269–283
[3] Seung Hoon Jhi, Jisoon Ihm, Steven G. Louie & Marvin L. Cohen Electronic mechanism of hardness enhancement in transition-metal carbonitrides Nature 399, (1999) 132-134
[4] Robert E. Reed Hill,Lara Abbaschian Physical Metallurgy Principles Cengage Learning; 4 edition (2008)
[5] Wen Huang, Haichuan Chen, Investigation of the elastic, hardness, and thermodynamic properties of actinide oxides Physica-449(2014)133–137
[6] Wilbert David Wong Angel, Lucia Tellez Jurado, Elizabeth Chavira Martinez,Jose Federico Chavez Alcala, Enrique Rocha-Rangel, Effect of carbon on the density, microstructure and hardness of alloys formed by mechanical alloying Materials and Design 60 (2014) 605–611
[7] Tsai Cho Jen, Chen, Ming Yih National Chung Hsing University TiSi2 phase formation and stress changes Thesis 1997
[8] Dr.Wei Yu Ho, Dr.Yin Yu Chang, Chen Jui Wu Mingdao University Department of Materials and Engrgy Engineering Mechanical properties and cutting applications of titanium aluminum nitride nanocomposite film 2012
[9] Henry Wager Holleck, Advanced concepts of PVD hard coatings Vacuum 7-9 1990﹐2220 to 2222
[10] Haw Wen Hsiao, Jia Hong Huanga, Ge Ping Yub Effect of oxygen on fracture toughness of Zr(N,O) hard coatings Surface & Coatings Technology 304 (2016) 330–339
[11] Daishin. Ueyama, Satoshi. Semboshi, Modification of microstructure and hardness for Cu–Ti alloy by means of energetic ion beam irradiation Nuclear Instruments and Methods in Physics Research B 341 (2014) 53–57
[12] Chen Zhen Guang, Liu Guan Jun, National Taipei University of Technology Institute of Materials Science and Engineering Study on the Influence of Hot Rolling and Annealing Process on the Structure and Properties of Commercial Pure Titanium Thesis 2013
[13] Lin Zhi Zhong, Chen Zhao, National Chiao Tung Unioersity Institute of Physics Electrical study of titanium halide nanowire Thesis 2011
[14] Dong Won Leea, Hyung Jun Kim, Yong Nam Kim, Min Seok Jeon, Song Min Nam, Substrate hardness dependency on properties of Al2O3 thick films grown by aerosol deposition Surface and Coatings Technology Volume 209, 25 September 2012, Pages 160–16
[15] Liu Zhang, Hanqing Xu, Zhi Wang, Qinggang LiJunyan Wu, Mechanical properties and corrosion behavior of Al/SiC composites Journal of Alloys and Compounds 678 (2016) 23-30
[16] Wojciech Kasprzak1, Hirotka Kurita, Gabriel Birsan, Babak Shalchi Amirkhiz1, Hardness Control of Al-Si HPDC Casting Alloy via Microstructure Refinement and Tempering Parameters 2016 S0264-1275(16)30374-4
[17] Yu Xi Wang , Sam Zhang , Toward hard yet tough ceramic coatings Surface & Coatings Technology 258 (2014) 1–16
[18] Mingqi Zhao, Yuan Xing, Zhihong Jia, Qing Liu a, Xiaozhi Wu, Effects of heating rate on the hardness and microstructure of Al-Cu and Al-Cu-Zr-Ti-V alloys Journal of Alloys and Compounds 686 (2016) 312-317
[19] Wang Zhoucheng, Improved hardness and oxidation resistance for CrAlN hard coatingswith Y addition by magnetron co-sputtering Surface & Coatings Technology 259 (2014) 146–151
[20] Sina Izadi, Hesham Mraied,Wenjun Cai, Tribological andmechanical behavior of nanostructured Al/Ti multilayers Surface & Coatings Technology 275 (2015) 374–383
[21] Minyu Fan, Joseph Domblesky, Kai Jinc, Liang Qin, Shengqiang Cui, Xunzhong Guo, Naksoo Kimc, Jie Tao , Effect of original layer thicknesses on the interface bonding and mechanical properties of Ti/Al laminate composites Materials and Design 99 (2016) 535–542
[22] Morgana Martin Trexler . Thadhani Mechanical properties of bulk metallic glasses Progress in Materials Science 55 (2010) 759–839
[23] Dae Hee Choi, Je Ryung Leeb, Na Ri Kang, Tae Jin Je, Ju Young Kim, Eun chae Jeon, Study on ductile mode machining of single-crystal silicon by mechanical machining International Journal of Machine Tools & Manufacture 113 (2017) 1–9
[24] Qi Jun Liua , Zheng Ranc, Fu Sheng Liua, Zheng Tang Liud, Phase transitions and mechanical stability of TiO2 polymorphs under high pressure Volume 631, 15 May 2015, Pages 192–201
[25] Astrid van der Resta, , Hosni Idrissia, Audrey Favachea, Dominique Schryversc,Joris Proosta, Jean Pierre Raskinb, Quentin Van Overmeerea, Thomas Pardoena, Mechanical behavior of ultrathin sputter deposited porous amorphous Al2O3 films Volume 125,(2017) Pages 27–37
[26] Crystopher Brito , Talita Vida , Emmanuelle Freitas , Noe Cheung ,Jose Eduardo Spinelli , Amauri Garcia, Cellular/dendritic arrays and intermetallic phases affecting corrosion and mechanical resistances of an AleMgeSi alloy Journal of Alloys and Compounds 673 (2016) 220-230
[27] Maria. Brizuelaa,Garcia Luisa, Jōmyō ji.On˜atea, Sa´nchez Lo´pezb, Martı´nez Martı´nezb,Lo´pez Cartesb, Ferna´ndezb Magnetron sputtering of Cr(Al)N coatings:Mechanical and tribological study Surface & Coatings Technology 200 (2005) 192– 197
[28] Bone Cheneviera, Owan Chaix-Pluchery, Ivan Matko, Rose Madar, Fane La Via, O rigin of the C49–C54 volume anomaly in TiSi2 thin films:an in-situ XRD and TEM analysis Microelectronic Engineering 64 (2002) 181–
[29] Lh Allen Microstructural aspects and mechanism of the C49-to-C54 polymorphic transformation in titanium disilicide (Available online 11 July 2002)—Journal of Applied Physics Volume 77, Issue 9
[30]Rwei-Ching ChangSt. John's University Department of Mechanical and Computer-Aided Enginerring Nanoindentation technology and applicationMechanics Society News,Vol.114 (2006)
[31] Chi-Yu Lu,Wahyu Diyatmilk,Bih-Show Lou,Jyh-Wei Lee, Superimposition of high power impulse and middle frequency magnetron Available online 15 March 2018

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