臺灣博碩士論文加值系統

因應現代半導體產業追求微小化及需求快速的檢測，本研究利用新穎共軛焦顯微鏡達到非侵入式的光學量測。此顯微鏡具有次微米等級橫向解析度與奈米等級縱向解析度，其特色為能夠迅速量測樣品表面三維影像或折射率所導致微小奈米光程差的變化，對於產品的良率檢測以及了解運作狀況有很好的幫助效果。本研究通過發光電化學元件加電壓運作時內部離子濃度分布狀況，量測出其折射率之細微變化。另一方面利用電輔助液晶在各種電壓運作時，分析其不同偏振下光程差之特性。

This study uses an advanced confocal microscope to achieve non-invasive optical measurements, In order to pursuit the demand of miniaturization and rapid detection of modern semiconductor industry. This microscope is provided with properties such as horizontal submicron resolutions and longitudinal nanometer resolutions, which can measure the three-dimensional image of the surface of the sample, and the minor change of the nanoscale optical path difference caused by refractive index rapidly. It is helpful for yield detection of the product and the understanding of the operational status. This research while applying voltage operation of the luminescent electrochemical component, the tiny variations of refractive index of the sample can be measured by the change of the ion concentration distribution of the internal. On the other hand, this research also uses the electrically assisted liquid crystal to analyze the characteristics of optical path difference at different polarizations, when operating at various voltages.

中文摘要 I
Abstract II
誌謝 III
目錄 IV
圖表目錄 VI
第一章 緒論 1
1.1前言 1
1.2研究動機 2
1.3論文大綱 5
第二章 實驗原理 6
2.1傳統顯微術原理 6
2.2共軛焦顯微術原理 7
(1)共軛焦顯微術原理 7
(2)從廣域發展至共焦成像之比較 9
2.3 彩色共軛焦顯微術原理 11
2.4差動共軛焦顯微術原理 12
第三章 實驗架構與流程 15
3.1本顯微鏡特色 15
3.2系統架構 16
3.3硬體介紹 19
3.3軟體介紹 28
3.4實驗流程 32
第四章 實驗結果 33
4.1樣品介紹 33
(1)發光電化學元件(LEC) 33
(2)電輔助液晶(EALC) 35
4.2樣品掃描結果分類 37
4.3發光電化學元件(LEC) 41
4.4電輔助液晶(EALC) 50
第五章 結論與未來展望 61
5.1結論 61
5.2未來展望 62
(一)系統架構光纖化 62
(二)使用光源的選擇 62
(三)掃描程式優化與後端資料處理整合 63
(四)各式樣品之檢測 63
參考文獻 64

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