臺灣博碩士論文加值系統

本論文目的是使用高分子材料與環狀支撐來構成軸承主體並做成氣靜壓滑軌，環狀支撐可以提升軸承之剛性和負載力，高分子軸承體在氣壓下會形成內凹曲面，搭配其表面所披覆的金屬薄殼，可保持空氣高壓以提高負載力。薄膜不但提供均勻良好的表面粗糙度及平整度，一但氣膜瓦解時也可以保護高分子體表面，將以上優點應用於口形氣浮滑座，使其有更好的靜/動態特性。
實驗分為靜態與動態。靜態實驗將本體更改為高分子材料搭配環狀支撐後與披覆/不披覆金屬薄殼探討滑軌之負載能力、流量及剛性等特性；動態實驗進行動態特性的量測，探討本文更改設計後之口形氣浮滑座在不同負荷下是否具有受到振動時吸收振動的不穩定現象。
本實驗在供壓0.5 MPa (5bar) 的情況下，靜態實驗結果顯示本體更改為高分子材料搭配環狀支撐後與披覆金屬薄殼在比原始滑座更低 (約30％) 的空氣流量下，有更好的負載能力(增加18％)與平均剛性(增加24％)；動態實驗結果顯示，動態實驗結果顯示本體更改為高分子材料後搭配金屬薄殼與毛細管最大加速度為0.069 m/s^2，原始滑座最大加速度為0.116 m/s^2，顯示出本體更改為環狀支撐結構型式高分子體搭配金屬薄殼在振動狀況下其穩定性是較原始氣浮滑座來的好。






關鍵字：氣浮滑軌、矩形軸承、高分子、剛性、流量、振動

The objective of this thesis was to use polymer material and an annular support to form the bearing body for constructing an aerostatic guideway, where the annular support could improve the rigidity and load force of the bearing and such bearing body of polymer material would form a concave surface under air pressure. With the attachment of a metal membrane on the surface, the air pressure could be maintained to increase the load force. The membrane not only provided a uniform surface roughness and flatness, but also protected the surface of the polymer body when the air film was collapsed. The above advantages were applied in the hollow rectangular aerostatic guideway to provide a better static and dynamic properties.
The experiment involved a “static” discussion and a “dynamic” measurement. In the static experiment, when the bearing body of the guideway was switched to polymer material with annular support, its load capacity, aerodynamics and rigidity, either with or without a metal membrane, would be discussed; And, for the dynamic experiment, its performances were measured to investigate any instability in absorption of vibration when the re-designed hollow rectangular aerostatic guideway was placed under different loads.
Under pressure of 0.5 MPa (5 bar), in the static experiment, results showed that the body exhibited better load capacity (an increase of 18%) and average rigidity (an increase of 24%) when it was changed to polymer material with an annular support and metal membrane at a lower air flow (approximately 30%) than the original guideway. In the dynamic experiment, results showed that the change to polymer material and annular support with a metal membrane could achieve the maximum capillary acceleration of 0.069 m/s^2, in contrast with the maximum acceleration of the guideway at 0.116 m/s^2, indicating better stability of polymer body of annular support and metal membrane than the original guideway.
Keywords: Aerostatic guideway; Rectangular bearing; Polymer; Rigidity; Air flow; Vibration

目錄
摘要 i
ABSTRACT ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1前言 1
1.2文獻回顧 1
1.3研究動機 8
1.4論文架構 9
第二章 氣體軸承與氣浮滑軌簡介 10
2.1氣體軸承原理及分類 10
2.2氣體軸承的特色 11
2.3氣體軸承之不穩定現象 13
2.4氣靜壓滑軌簡介 15
2.5節流器之工作原理 17
2.6節流器形式與種類 19
2.7節流器曲線之特性 22
第三章 高分子氣靜壓滑座設計與架構 24
3.1 原始口形氣浮滑軌 24
3.2 氣靜壓氣浮滑座改良設計 26
3.3 供氣、量測系統與靜∕動態特性實驗設備 34
第四章 各種結構與材質之氣浮滑座靜態實驗結果 45
4.1 靜態特性實驗整體架構 45
4.2 氣浮滑座浮動高度值量測方式 46
4.3 靜態特性實驗流程 47
4.4 靜態特性實驗結果 47
第五章 各種結構與材質之氣浮滑座動態實驗結果 53
5.1 動態特性實驗整體架構 53
5.2 氣浮滑座振動頻率量測方式 54
5.3 動態特性實驗流程 55
5.4 動態特性實驗結果 55
第六章 結論與建議 96
6.1 靜態特性實驗結論 96
6.2 動態特性實驗結論 97
6.3 建議 101
參考文獻 102
附錄 109

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