臺灣博碩士論文加值系統

本研究以水溶液法分別在濺鍍氧化鋅(ZnO)與氧化鋅摻雜鋁(AZO)晶種層之可撓性基板PDMS上合成一維氧化鋅奈米柱陣列，探討氧化鋅成長結構與特性分析，並將其製作為可撓式複合功能壓阻式觸覺感測器。本研究以硝酸鋅六水合物(Zinc nitrate hexahydrate)與六亞甲基四胺 (HTMA) 濃度 1 : 1， 在ZnO 晶種層反應溫度為 95°C 與 AZO 晶種層 90°C，反應時間 10 小時下，合成出高品質與高深寬比之一維氧化鋅奈米柱陣列，且分別利用 X 光射線粉末繞射分析儀、場發射掃描式電子顯微鏡、能量散射光譜儀，分析與探討 ZnO 奈米柱結晶、微結構、品質特性。將兩片成長一維氧化鋅奈米柱陣列之可撓性 PDMS 基板相互組裝，使上、下兩片ZnO奈米柱陣列形成仿生交互鏈鎖結構，藉由施加壓力使奈米柱間之接觸電阻產生改變，以壓阻的方式作為觸覺感測機制，分別量測與探討靜態及動態之施加壓力，另外本研究也利用 ZnO 材料之半導體熱阻效應感測環境溫度，製作可撓式複合功能觸覺感測器，期能應用於人工電子皮膚、人工義肢、穿戴式裝置等領域上。

關鍵字: ZnO奈米柱、可撓式複合功能觸覺感測器、水溶液法

In this study, the flexible PDMS substrates are coated with zinc oxide and zinc oxide doped with aluminum films respectively as seed layers. And the aqueous solution method is used to synthesize one-dimensional zinc oxide nanorods. Then, the PDMS substrates with zinc oxide nanorods are combined to make a multifunctional piezoresistive tactile sensors for artificial electronic skins. The growth solution with aqueous solution method are mixed by dissolving the zinc nitrated and hexamethylenetetramine in the deionized water in a 1:1 ratio. The reaction temperature of solution is 95 degrees for zinc oxide seed layers and 90 degrees for zinc oxide doped with aluminum seed layers, and the reaction time of solution is 10 hours. Then successfully synthesized the high quality and high aspect ratio one-dimensional zinc oxide nanorods on PDMS substrates. Crystal structure and growth morphology of zinc oxide nanorods were investigated by X-ray power diffractometer and field emission scanning electron microscopy respectively, and energy-dispersive X-ray spectroscopy was used to analyze the composition of Zinc oxide nanorods. The two PDMS substrates with zinc oxide nanorod arrays as the upper and lower electrode were combined each other to form interlocked structure by zinc oxide nanorods. In this interlocked geometry, an applied pressure induces a change in the contact area between interlocked zinc oxide nanorods, thus changing the contact resistance. In addition, the semiconductor thermal properties of zinc oxide can be applied to detect environmental temperature. The flexible multifunctional tactile sensor may find applications such as artificial electronic skins, artificial prosthetics, and wearable devices.

摘要 I
英文摘要 II
致謝 III
目錄 IV
圖目錄 VII
表目錄 XIII
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 研究動機與目標 9
1.4 論文架構 11
第二章 理論基礎與原理 12
2.1氧化鋅基本結構與特性 12
2.2氧化鋅摻雜鋁（ZnO:Al, AZO）薄膜特性 15
2.3壓阻效應原理 16
2.4熱阻效應原理 17
2.5濺鍍原理 19
2.6水溶液法 21
第三章 實驗架構與流程 25
3.1實驗架構 25
3.2基板製備 25
3.3濺鍍 ZnO、AZO 晶種層 27
3.4水溶液法製程 28
3.5實驗分析儀器 30
3.5.1 X光射線粉末繞射分析儀 30
3.5.2場發射掃描式電子顯微鏡 32
3.5.3能量散射光譜儀 33
第四章 實驗結果與討論 35
4.1 場發射掃描式電子顯微鏡分析 35
4.2 成長溫度對氧化鋅奈米柱成長之影響 36
4.3 成長時間對氧化鋅奈米柱成長之影響 49
4.4 X光射線粉末繞射儀分析(XRD) 58
4.5 能量散射光譜儀分析(EDS) 60
4.6 觸覺感測元件 61
4.6.1觸覺感測元件之設計與製作 61
4.6.2電流-電壓特性曲線(I-V curve)量測 64
4.6.3靜態壓力量測 66
4.6.4動態壓力量測 68
4.6.4.1不同頻率動態壓力量測 69
4.6.4.2脈搏訊號量測 74
4.6.4.3動態波形辨識 75
4.6.5感測器延遲時間量測 77
4.6.6環境溫度量測 77
4.6.7 3 × 3觸覺感測陣列 80
第五章 結論與未來工作 84
5.1結論 84
5.2未來工作 86
參考文獻 87

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