臺灣博碩士論文加值系統

本論文主要目的在於探討奈米壓痕試驗進行過程中黏滯效應對壓痕作用力與壓痕曲線圖之影響，建立微/奈米硬度之理論關係式，並配合探討離子束沉積純類鑽碳薄膜(a-C:H)及不同氮氣體積流量比例類鑽碳(a-H(N))薄膜之薄膜結構、微/奈米機械性質機械性質及潤滑性質之影響。奈米硬度常應用在很多微加工力學上，對於材料微變形與應力之計算有很大的影響。因此在薄膜微/奈米機械性質方面，我們藉由奈米壓痕(nanoindentation)試驗機求得薄膜楊氏模數及硬度的方法，並以理論計算得到壓頭與薄膜間的毛細管作用力與凡得瓦作用力，藉以評估黏滯效應對奈米壓痕試驗之影響，並分析得到不同氮氣氣體流量比例對類鑽碳薄膜材料硬度與楊氏模數之影響。在殘留應力方面，利用三維微細形貌量測儀量測鍍膜前後表面形貌數據，以擬合的方式得到鍍膜前後表面之曲面半徑，將所計算得到之曲面半徑代入殘留應力理論以求得薄膜殘留應力，以評估不同氮氣氣體流量比例對類鑽碳薄膜殘留應力之影響。

在摩潤性質量測上，我們主要以掃描探針顯微鏡(SPM)量測薄膜表面之表面形貌，求得不同含氮量類鑽碳薄膜之摩潤性質。並以奈米測試機(Nanotest)以不同的負載與刮痕速度來對所鍍之薄膜進行摩耗試驗，再利用三維微細形貌量測儀量測摩耗體積，藉以評估本實驗鍍膜之抗摩耗性。在薄膜性質的探討方面，我們使用拉曼光譜儀及化學分析電子儀分析薄膜之組成及鍵結，並輔以橢圓偏光儀量測其光學參數，藉分析所鍍薄膜之結構特性與光學性質。

由實驗結果發現黏滯效應在壓痕深度小於 時，對壓痕作用力與壓痕深度圖有極大之影響，而且此現象隨著壓痕深度下降而急劇上升。並同時發現極薄之類鑽碳薄膜( )有相當大之硬度與楊氏模數，而且擁有極佳的抗磨耗性能與表面粗糙度。

本論文最大特色在於(1)在奈米尺度下，考慮凡得瓦力及毛細管作用力對於奈米壓痕試驗之影響，並發現如果不考慮黏滯效應所得之硬度將遠大於薄膜真實硬度﹔(2)以能量的方式求得硬度，並考慮材料彈性回復所產生的彈性功與黏滯效應所產生的黏滯功兩者對硬度之影響。

The adhesion effects to the load-depth curves of nano-indentation test and the theoretical relation of micro/nano hardness are researched in this study. The effect of nitrogen containing and film thickness to the a-C:H and a-H(N) diamond like carbon film structures and micro/nano mechanical and tribological properties is involved, too. The hardness and Young’s modulus are measured by nano-indentation performed by NanoTest, and the capillary attraction and van der Wall force calculated in order to assess the adhesion effect of different nitrogen containing and film thickness. In the residual stresses of films, the profile data are measured before and after coating by 3-D profilemeter and the radius of curvature are calculated by regression; therefore the residual stress can be obtained by the radius of curvature before and after coating according to the stress theory and the effect of the residual stress can be discussed.
In measuring tribological properties, we scanned and scratched sample surfaces by Scanning Probe Microscope and NanoTest with different speeds and loads. In examining samples, we measured composition and bonding by ESCA and Raman spectrum, and measured the optical properties by Ellipsometer.
According to the experimental results, the adhesion effects to the load-depth curves are significant as the indentation depth is lower than 50 nm, and the effect gets larger as depth decreases. And we found that the very thin (about 50 nm) diamond like carbon film has large hardness and Young’s modulus and excellent anti-wear property and surface roughness.
There are two characters in this study: (1) considering the capillary attraction and van der Wall force under nano-scale and observing the fact that the hardness without considering adhesion effect is much larger; (2) Obtaining hardness by the energy method and considering the effects of elastic work due to elastic recovery and adhesion work due to adhesive forces.

中文摘要Ⅰ
英文摘要 Ⅲ
致謝 Ⅳ
目錄 Ⅴ
表目錄 Ⅷ
圖目錄 Ⅸ
符號說明 ⅩⅦ
第一章 緒論1
1-1前言1
1-2文獻回顧2
1-3研究目的及內容9
第二章 基本理論 14
2-1類鑽碳薄膜之組成及成膜機制14
2-1-1 膜之組成14
2-1-2 成膜機制16
2-2 鍍膜系統之基本原理 18
2-2-1 離子披覆系統(Ion Plating System) 18
2-2-2 電漿化學(Plasma Chemistry) 19
2-2-3 線性離子束源(Linear Ion Beam Source) 23
2-3 薄膜分析儀器之基本原理 26
2-3-1 歐傑電子儀(AES)及化學分析電子儀(ESCA) 26
2-3-2 掃描式電子顯微鏡(SEM)28
2-3-3 拉曼光譜儀(Raman Spectroscopy) 29
2-3-4橢圓偏光儀 (Ellipsometer) 31
2-4類鑽碳薄膜之拉曼光譜及ESCA分析35
2-4-1 Raman Analysis 35
2-4-2 ESCA Analysis 38
2-5薄膜殘留內應力及量測理論39
2-5-1薄膜內應力之產生原因 40
2-5-2薄膜殘留內應力理論41
2-5-3曲率法求殘留內應力之理論45
2-6 奈米壓痕試驗之彈性模數理論建立49
2-7 奈米壓痕試驗之薄膜硬度理論建立54
2-8 黏滯效應(Stiction Effect)基本理論建立.63
2-5-1毛細管作用力(Capillary Interaction)65
2-5-2凡得瓦作用力(van der Waals Interaction)67
2-5-3以Lifshitz理論計算哈馬克常數(Hamaker constant)76
第三章 實驗方法與實驗步驟 104
3-1實驗目的 104
3-2 薄膜之製鍍 104
3-2-1鍍膜系統設備 104
3-2-2實驗材料 106
3-2-2步驟106
3-3薄膜特性分析及鑑定107
第四章 結果與討論 122
4-1拉曼光譜分析122
4-2 ESCA成分定量分析127
4-3光學性質探討：折射率（n）、消光係數（K）128
4-4殘留內應力分析結果129
4-5奈米壓痕試驗結果分析131
4-6薄膜之抗磨耗性能與摩擦力分析139
4-7薄膜粗糙度分析141
4-8綜合分析141
第五章 結論及建議 239
參考文獻242

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