臺灣博碩士論文加值系統

二氧化錫在氣體偵測器應用方面是一種極為普遍使用的材料，因為其在還原性氣氛中會與氧化物表面吸附的氧氣反應造成電阻的改變。過去已成功地應用在偵測或辨別多種有毒氣體及可燃燒性的氣體，如一氧化碳、二氧化氮、硫化氫、乙醇、甲烷等等。本研究首先利用真空壓鑄方式將亞共晶、共晶與過共晶相熔融的錫鉛合金金屬溶液鑄入陽極氧化鋁奈米模板中，待金屬液固化後，可得到陣列式錫鉛合金奈米線，經熱處理得到氧化後的陣列式錫鉛合金奈米線，再以濕蝕刻方式將模板移除使線材裸露，最後於上方蒸鍍銅薄膜完成金屬半導體氣體感測元件製作。而元件之成份、微結構及性質檢測則以Mapping、EDS、SEM、TEM、XRD與DSC做分析。本文之目的在研究以薄膜式感測器元件作為對照組，而陣列式奈米線感測元件作為設計組，將兩組元件置於相同檢測條件中，比較其對一氧化碳響應之靈敏度。而氣體檢測部分則是自行設計之量測平台，藉由MFC控制待測氣體濃度，再以自己撰寫之LabView進行微訊號量測與訊號數據擷取，最後證實具陣列式奈米線之感測元件比表面積遠大於薄膜式感測元件，因此靈敏度大幅上升，於濃度500ppm一氧化碳氛圍下顯示，具有奈米線陣列之感測元件靈敏度排列順序SnO2(25.13%)＞Sn70%-Pb30%(17.83%)＞Sn63%-Pb37%(14.89%)＞Sn50%-Pb50%(14.02%)。

SnO2 is a very common materials used in gas sensor applications, caused by the change of resistance in a reducing atmosphere with the oxygen of the oxide surface adsorption reaction. Has been successfully applied to detect or identify a variety of toxic gases and combustion gases, such as CO, NO2, H2S, C2H6O2, CH4, etc. In this study, the use of vacuum die-casting will hypoeutectic, eutectic and hypereutectic molten tin-lead alloy molten metal cast into the nano template of anodic aluminum oxide(AAO), after curing of the liquid metal, the available array of tin-lead alloy nanowires after heat treatment oxidation array of tin-lead alloy nanowires, use wet etching to remove the template so that the wire bare copper thin films to complete device fabrication. Finally, on top of steamed copper thin films of metal semiconductor gas sensor production. The components of the composition, micro structure and nature of the detection while the Mapping、EDS、SEM、TEM、 XRD and DSC for analysis. The purpose of this study thin film sensor element as a control group, while the array of nanowire sensing element as a design group, the two groups of components in the same testing conditions, comparison of the sensitivity of the carbon monoxide response. Gas detection part is to design the measurement platform, the concentration of gas to be measured by MFC controls, signal measurement and signal data capture their writing LabView, finally confirmed with arrays of nanowire sensing element is much larger than than the surface area of thin film sensing element, therefore, the sensitivity increased substantially, the concentration of 500 ppm carbon monoxide atmosphere, nanowire array sensitivity of the sensing elements arranged in order SnO2(25.13%)＞Sn70%-Pb30%(17.83%)＞Sn63%-Pb37%(14.89%)＞Sn50%-Pb50%(14.02%).

中文摘要 i
英文摘要 ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 前言 1
1.2 研究目的及動機 2
1.3 陣列式陽極氧化鋁模板簡介 3
1.4 錫鉛合金簡介 5
1.5 感測器簡介 6
1.5.1 氣體感測器反應機制 7
1.5.2 氣體感測器性能要素 8
1.6 研究流程與論文架構 11
第二章 基礎理論與文獻回顧 14
2.1 陽極氧化鋁文獻回顧 14
2.1.1 陽極氧化鋁成長因素與機制 14
2.1.2 陽極氧化鋁製備方式與結構 21
2.2 金屬熔煉與鑄造介紹 24
2.2.1 一維奈米線製程介紹 26
2.2.2 鉛錫合金之電遷移效應與應用 32
2.3 氣體感測器發展與種類 39
2.3.1金屬半導體氣體感測器 39
2.3.2電化學氣體感測器 41
2.3.3固態電解質氣體感測器 43
2.3.4觸媒燃燒式氣體感測器 44
2.3.5光電式氣體感測器 46
2.3.6場效電晶體氣體感測器 46
2.3.7壓電型氣體感測器 47
第三章 陣列式鉛錫合金奈米線氣體感測元件設計與製作 50
3.1 陽極氧化鋁奈米模板製作 50
3.1.1 實驗方法與流程 50
3.1.2 電解拋光 51
3.1.3 一次陽極化處理 52
3.1.4 鉻酸蝕刻 53
3.1.5 二次陽極化處理 54
3.1.6 去背蝕刻與薄膜通孔 55
3.2 錫鉛合金真空熔煉 57
3.2.1 實驗方法及流程 57
3.3 真空壓鑄法製備陣列式錫鉛合金感測元件 62
3.3.1 實驗方法及流程 63
第四章 實驗結果與討論 65
4.1 陽極氧化鋁奈米模板探討 65
4.2 合金檢測與成份分析 66
4.2.1 Mapping成份分析 66
4.2.2 EDS成份分析 68
4.2.3 XRD性質檢測 69
4.2.4 DSC性質檢測 70
4.3 錫鉛合金奈米線微結構檢測 72
4.4 一氧化碳氣體檢測系統 74
4.5 氣體檢測 75
4.5.1 實驗程序 75
4.5.2 一氧化碳氣體檢測 76
4.5.2.1 SnO2 100%訊號量測 77
4.5.2.2 亞共晶Sn50%-Pb50%訊號量測 79
4.5.2.3 共晶Sn63%-Pb37%訊號量測 80
4.5.2.4 過共晶Sn70%-Pb30%訊號量測 82
4.6 氣體檢測訊號跳動與修正 84
第五章 結論與未來展望 85
5.1 結論 85
5.2 未來展望 86
參考文獻 88

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