臺灣博碩士論文加值系統

赤銅鐵礦p型透明導電氧化物(TCO)如CuYO2、CuCrO2與CuAlO2逐漸受到學者研究興趣而使p型TCO發展逐年成熟。而延續本實驗室先前之抗菌薄膜研究，為了改善其透明度及符合歐盟ROHS環保規章，故本實驗以射頻磁控濺鍍法於玻璃基板上沉積銅釔氧化物薄膜，並探討不同熱處理氣氛及溫度條件對其性質之影響。熱處理後試片以X光繞射分析儀(X-ray Diffractometer, XRD)分析結構、以紫外可見光光譜儀(Ultraviolet-visible spectroscopy, UV-Vis)分析穿透率、以光譜式橢偏移(Spectroscopic ellipsometer)量測膜厚、以X射線光電子能譜儀(X-ray photoelectron spectroscopy,XPS)進一步確定薄膜元素價態。
本實驗首次將銅釔氧化物薄膜應用於透明抗菌塗層。根據ISO 22196規範進行銅釔氧薄膜之抗菌特性研究，結果顯示其光學穿透率可達80%以上，而薄膜厚度約為23.1nm，且其薄膜抗菌率可高於99%，故Cu2Y2O5薄膜可應用於觸碰面板等作為透明抗菌薄膜。

Delafossite type of CuYO2, CuCrO2, and CuAlO2 are the potential candidates for p type transparent conducting oxide films (TCOs). Due to the wide range of applications for TCOs in electronic devices has generated interest in understanding the growth and characterization of these materials.
Continue our previous research of antibacterial thin films, in order to improve the transparency and fit the RoHs guide in this work employed a radio-frequency (RF) magnetron sputtering method to prepare Cu2Y2O5 thin film on quartz substrate and followed by post-deposition annealing at 800˚C in air. The structure of the Cu2Y2O5 thin films was confirmed by X-ray diffraction. The transmittance properties were measured by a UV-Vis spectrometer. The film thickness was measured by an ellipsometer.
The antibacterial property was followed the ISO 22196 method to evaluate the colony forming unit (CFU) of E. coli on the Cu2Y2O5 surface after several hours. The experimental results find the Cu2Y2O5 surface to exhibit superior antibacterial performance and an optical transparency of >80% in the visible region with a thickness of 23 nm. A novel transparent antibacterial coating has been demonstrated in the present study.

摘要 I
Abstract II
誌謝 IV
目錄 V
圖目錄 VIII
表目錄 X
第一章 緒論 1
1.1 前言 1
1.2研究動機與目的 4
第二章 文獻回顧與理論背景 5
2.1赤銅鐵礦結構 5
2.2 銅釔氧化物結構 6
2.3 透明導電氧化物 7
2.4透明導電氧化物電學性質 9
2.5透明導電氧化物光學性質 11
2.6透明導電氧化物抗菌特性 13
2.7磁控濺鍍法 14
2.8電漿原理 15
2.9薄膜成長理論 17
第三章 研究方法及流程 20
3.1實驗方法 20
3.1.1實驗藥品 20
3.1.2基板準備 20
3.1.3銅釔氧化物靶材製備 21
3.1.4濺鍍實驗 23
3.1.5薄膜熱處理 25
3.2分析方法 26
3.2.1結構分析 26
3.2.2表面形貌分析 28
3.2.3表面粗糙度分析 29
3.2.4表面性質及膜厚分析 30
3.2.5光學特性分析 31
3.2.6元素價態分析 33
3.2.7抗菌特性分析 34
第四章 結果與討論 36
4.1 Cu2Y2O5薄膜分析 36
4.1.1 Cu2Y2O5靶材分析 36
4.1.2 Cu2Y2O5薄膜之結晶結構分析 38
4.1.3 Cu2Y2O5薄膜元素價態分析 40
4.1.4 Cu2Y2O5薄膜表面形貌分析 42
4.1.5 Cu2Y2O5薄膜表面粗糙度分析 46
4.2 Cu2Y2O5薄膜光學性質與膜厚分析 50
4.2.1 鍍膜之膜厚分析 50
4.2.2 鍍膜光學性質分析 51
4.3 Cu2Y2O5薄膜抗菌特性分析 54
第五章 結論 60
未來工作 61
參考文獻 62

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