臺灣博碩士論文加值系統

本實驗將開發旋轉塗佈摻雜(spin-on dopant, SOD)擴散製程，並應用於製作N型PERT雙面太陽能電池，藉由兩次擴散驅動溶質(硼、磷)進入矽晶格形成電池射極 (Emitter) 與背表面電場 (Back surface field, BSF)，相較於傳統的氣體擴散源(BBr3或POCl3)製程，SOD製程技術具有成本低、製程速度快等優點；此外也不具有毒性可提高生產線運作的安全性。
首先我們對溶劑成分進行調配，初始先在小尺寸基板上開發出能均勻析出之溶劑，接著配合塗佈時轉速配置使其在5x5 cm2面積上也可達到均勻化，並探討擴散製程參數如氣氛、時間、濃度與溫度達其最佳化，製作出具低電阻率Emitter與BSF層並有效降低其少數載子複合。
最終我們結合所探討的條件條件，將其結果應用於太陽能電池元件上，得到太陽能電池轉換效率(η) = 12.8 %；開路電壓 (Voc ) =579.99 mV；短路電流 (Jsc) = 34.53 mA/cm2；填充因子 (FF) = 63,9 %。

In this experiment, we have developed a spin-on dopant (SOD) diffusion technique for fabrication of n-type passivated emitter and rear cell (PERC) solar cells. Compared with traditional diffusion of gases dopant (BBr3 or POCl3), SOD technique could lower the manufacturing cost and improve production efficiency. Furthermore, it is not toxic which can raise safety on production line.
We first adjusted component ratio of dopant source, which can be spreaded on a small-sized substrate uniformly. Then we explore the rotation speed of spin coating to achieve uniformity of sheet resistance on 5x5 cm2 and investigate the parameters of diffusion such as atmosphere, time, concentration and temperature to get low sheet-resistance and high lifetime.
Finally, we fabricated monocrystalline N-type silicon solar cell base on optimized conditions and the electro-optical convertion efficiency = 12.8 % ; the open-circuit voltage (Voc) = 579.99 mV, short-circuit current density (Jsc) = 34.53 mA/cm2 and the fill factor (FF) = 63.9 %.

摘要 i
Abstract ii
圖目錄 v
表目錄 vii
第一章 緒論 1
1-1 前言 1
1-2 研究背景 2
第二章 基礎理論及文獻回顧 4
2-1 矽晶太陽能電池理論 4
2-2 太陽能電池基礎參數 6
2-3 表面鈍化效應 11
2-3-1 磷擴散的表面鈍化效應 12
2-3-2 硼擴散的表面鈍化效應 13
2-3-3 硼擴散與磷擴散製程 15
2-4 射極製程技術簡介 18
2-4-1 氣體摻雜擴散源 18
2-4-2 摻雜氧化層 19
2-4-3 旋轉塗佈摻雜源(SOD) 20
2-4-4 噴塗摻雜源 21
2-4-5 網印摻雜源 21
2-4-6 離子佈植 22
2-4-7 摻雜製程討論 23
第三章 研究方法 26
3-1 實驗流程 26
3-2 擴散源溶液鋪排分析 27
3-3 表面鈍化效應分析 29
3-4 雙面PERT電池電性量測 30
第四章 結果與討論 32
4-1 擴散源於矽基板上鋪排分析 32
4-1-1 接觸角與溶解度測量 32
4-1-2 擴散源旋塗分析 33
4-2 旋轉塗佈參數探討 39
4-2-1 旋轉參數建立 39
4-2-2 硼、磷SOD片電阻分佈 41
4-3 硼、磷SOD運用於擴散製程 43
4-3-1 射極擴散條件分析 43
4-3-2 背表面電場擴散條件分析 47
4-4 太陽能電池電性量測 52
第五章 結論 54
參考文獻 55

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