臺灣博碩士論文加值系統

本研究以氧化鋅奈米片狀結構製作出氣體感測器元件為主題，且以簡單與低成本之水熱法，對氧化鋅奈米結構進行摻雜不同濃度之銀離子，探討如何成功製作穩定且特性良好之氣體感測器元件，主要研究可分為兩部分：

第一部分：利用射頻磁控濺鍍儀器(Radio frequency magnetron sputtering)，在玻璃基板上濺鍍一層氧化鋅薄膜做為晶種層，並放入配置硝酸鋅(Zn(NO3)2‧6H2O)、四氮六甲圜(HMTA)以及不同濃度之硝酸銀(AgNO3)溶液中，使用不同容器、不同溫度、不同時間，成長出不同奈米結構，接著，藉由快速熱退火(RTA)進行處理，以減少晶格不匹配等等因素，透過高解析掃描式電子顯微鏡(HR-SEM)及能量散射光譜儀(EDS)、X光繞射分析儀(XRD)、紫外光/可見光光譜儀(UV/Visible)、螢光光譜儀(PL)、高解析分析電子顯微鏡(HR-AEM)等等儀器，對硝酸銀摻雜氧化鋅奈米結構之型態、成份、晶格、光學等等，進行材料特性分析，探討出特性較佳的濃度。

第二部分：透過黃光微影技術，在矽基板上定義成長區域，以射頻磁控濺鍍儀器，濺鍍一層氧化鋅薄膜做為晶種層，並由水熱法進行特性較佳之成長條件，備製出一維(1D)奈米結構，藉由一維奈米結構之長寬比與大面積之吸附氣體條件，來提升氣體感測器元件(Gas sensors)之響應。

本研究發現使用硝酸鋅及四氮六甲圜，濃度分別為0.06 M，而硝酸銀濃度為0.002 M，在溫度為120 oC，時間為6小時，成長出來之奈米片結構最為優化，且氣體量測操作溫度在200 oC時，對一氧化氮(NO)氣體具有良好之80 %氣體響應，故銀摻雜之分析對往後元件影響非常深遠。

In this study, the zinc oxide (ZnO) nanosheets produce gas sensors were investigated. By using the hydrothermal method, the Ag-doped zinc oxide nanosheets were synthesized, explored to produce stable and good characteristics of gas sensors. There are two sections of study are as follows.

The first section : The zinc oxide films as seed layers were deposited on glass substrates by radio frequency magnetron sputtering (RF-sputtering) technique. The zinc nitrate (Zn(NO3)2‧6H2O), hexamethylenetetramine (HMTA) and different concentrations of silver nitrate (AgNO3) were added into the solution. The growth of different nanostructures was with different container, temperature, and time. It was to reduce the lattice mismatch and so on by rapid thermal annealing (RTA) process, High Resolution Scanning Electron Microscope (HR-SEM), Energy Dispersive Spectrometer (EDS), X-Ray Diffractometer (XRD), UV/Visible light Spectrophotometer (UV/Visible), Photoluminescence spectrum (PL), and High Resolution Analytical Electron Microscope (HR-AEM) were then to determine the morphology, composition, lattice, optics, and so on of the Ag-doped zinc oxide nanostructures. Additionally, it is to explore the better characteristics of concentration.

The second section : It is to define the growth areas by yellow photolithography technology. The zinc oxide films as seed layers were deposited on silicon substrates by radio frequency magnetron sputtering (RF-sputtering) technique. The one dimensional (1D) nanostructures were fabricated by hydrothermal method under better characteristics of growth conditions. Enhance the responsivity of gas sensors by the ratio of length/width and a large area of gas adsorption conditions in one dimensional nanostructures.

In the study, the concentration of zinc nitrate (0.06 M) and hexamethylenetetramine (0.06 M) was added into the solution. The results show that the growth time of Ag-doped (0.002 M) zinc oxide nanosheets is 6 hours under 120 oC would be optimization. Meanwhile, in 200 oC gas measurement temperature, the 80 % responsivity of NO gas significantly excellence, respectively. This also indicated that the doping Ag would be more effect in gas devices.

摘要..........i
Abstract..........ii
誌謝..........iv
目錄..........vi
表目錄..........viii
圖目錄..........ix
第一章 緒論..........1
1-1 研究背景..........1
1-2 研究動機..........1
1-3 實驗設計..........2
1-4 文獻回顧..........3
第二章 基礎理論與文獻探討..........4
2-1 奈米科技材料簡介..........4
2-1-1 奈米材料尺寸定義..........4
2-1-2 奈米材料能階密度定義..........5
2-2 半導體(Semiconductor)簡介..........7
2-2-1 氧化鋅材料結構之特性..........7
2-2-2 氧化鋅物理之特性..........8
2-2-3 氧化鋅壓電之特性..........9
2-2-4 氧化鋅力學之特性..........9
2-2-5 氧化鋅化學之特性..........9
2-2-6 氧化鋅電學之特性..........10
2-2-7 氧化鋅光學之特性..........10
2-2-8 銀材料結構之特性..........13
2-2-9 製備氧化鋅(ZnO)結構方法之文獻回顧..........14
2-2-10 成長氧化鋅奈米線一維(1D)結構方法之文獻回顧..........16
2-3 氣體感測器簡介..........25
2-3-1 氣體感測器之原理..........25
2-3-2 氣體感測器之分類..........29
2-3-3 一氧化氮(NO)氣體之特性..........33
第三章 實驗方法及步驟..........34
3-1 實驗基本結構..........34
3-1-1 實驗架構..........34
3-1-2 實驗流程..........36
3-1-3 實驗設備..........39
3-2 實驗藥品..........56
第四章 實驗結果與討論..........57
4-1 銀摻雜氧化鋅奈米結構之材料與元件特性探討..........57
4-1-1 銀摻雜氧化鋅奈米結構之SEM分析..........59
4-1-2 銀摻雜氧化鋅奈米結構之EDS分析..........77
4-1-3 銀摻雜氧化鋅奈米結構之XRD分析..........86
4-1-4 銀摻雜氧化鋅奈米結構之UV/Visible分析..........88
4-1-5 銀摻雜氧化鋅奈米結構之PL分析..........90
4-1-6 銀摻雜氧化鋅奈米結構之AEM分析..........92
4-1-7 銀摻雜氧化鋅奈米結構之氣體響應分析..........97
第五章 實驗結論..........110
5-1 結論..........110
5-2 未來展望..........110
參考文獻..........112
Extended Abstract..........115

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