臺灣博碩士論文加值系統

均熱板是利用兩相變化原理的導熱元件， 本研究利用鈦為做密閉容器材質，
利用 銅網作為毛細結構 並在蒸發區上製備氧 化鎢奈米線後利用雷射銲接技術封
裝，探討 蒸發區奈米結構與工作流體注水量 對均熱板熱性能之影響。
本研究利用 厚度 0.3mm與 0.15mm鈦薄片製成均熱板 並利用200網目具有
氣液分流的銅網作為毛細結構 在其蒸發區上製備氧化鎢奈米線 ，利用擴散接合、
雷射接合封裝並抽真空注水 後 封合 注水管 。實驗結果顯示 在相同工作流體填充率
下，超薄鈦均熱板 (氧化鎢奈米線 )具有較低熱阻及較小溫差；熱阻值隨著加熱功率
的增加而減少。在三種工作流體填充率 (125%、 100%、 75%)下，125%的工作流體
填充率具有較低熱阻值與最小溫差。 工作流體填充率 125%之超薄鈦均熱板 (氧化
鎢奈米線 )在加熱功率 4 W時擁有 1.13 ℃/W的最低熱阻與 4.5℃的最小溫差。

The vapor chamber is a thermal-conducting element that utilizes the principle of two-phase flow. In this study, titanium was used as the material of the closed container, and the copper mesh was used as wick structure and the tungsten oxide nanowire was prepared on the evaporator section and then packaged by laser welding technology. The effect of the nanostructure in the evaporator section and the filling rate of the working fluid on the thermal performance of the vapor chamber was discussed.
In this study, a 0.3 mm and 0.15 mm titanium foil were used to make a vapor chamber and a 200 mesh with a copper mesh of vapor-liquid separated was used as the wick structure and a tungsten oxide nanowire was prepared on the evaporator section, followed by diffusion bonding and laser bonding. After the package, vacuum and the water injection and seal the water injection tube.
The experimental results show that under the same working fluid filling rate, the ultra-thin titanium vapor chamber (tungsten oxide nanowire) has lower thermal resistance and smaller temperature difference; the thermal resistance value decreases with the increase of heating power. At three working fluid fill rates (125%, 100%, 75%), 125% of the working fluid filling rate has a lower thermal resistance and a minimum temperature difference. The ultra-thin titanium vapor chamber (tungsten oxide nanowire) with a working fluid filling rate of 125% has a minimum thermal resistance of 1.13 ° C/W and a minimum temperature difference of 4.5 °C at a heating power of 4 W.

摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 前言 1
1.2 研究動機與目的 2
第二章 文獻回顧 5
2.1　熱管及均熱板運作原理 5
2.1.1 密閉容器 7
2.1.2 工作流體 10
2.1.3 毛細結構 15
2.2 奈米微結構 20
2.3 超薄型均熱板及熱管 25
2.3.1封裝製程 27
2.4 小結 28
第三章 實驗方法 29
3.1 實驗流程規劃 29
3.2 均熱板材質及幾何參數 30
3.3 試片清潔 31
3.4 微結構製程 31
3.5 奈米微結構製程 32
3.6 雷射銲接製程 34
3.7 氦氣測漏 34
3.8 抽真空注水及封尾 35
3.9 檢測儀器及原理 37
3.9.1 場發射掃描式電子顯微鏡 37
3.9.2 接觸角量測儀 38
3.10 熱性能檢測 38
3.10.1 熱響應檢測 39
3.10.2 熱阻檢測 39
第四章 結果與討論 42
4.1 氧化鎢奈米線 42
4.1.1 鎢薄膜厚度 42
4.1.2 成長氣氛 42
4.1.3 潤濕性分析 45
4.1.4 X-ray繞射檢測 46
4.2 封裝結構檢測 46
4.2.1 金相檢測 47
4.2.2 氣室高度尺寸檢測 48
4.2.3 氦氣測漏 49
4.3 熱性能檢測 50
4.3.1 熱響應檢測 50
4.3.2 熱阻檢測 53
第六章 參考文獻 57
符號彙編 63

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