臺灣博碩士論文加值系統

在本論文中，我們將粉末填入玻璃管內，並以垂直抽絲法來製作矽核光纖(silicon-cored fibers)。我們使用成本便宜許多的多晶矽粉取代成本高昂的單晶矽棒或晶種來製作矽核光纖。藉由優化抽絲的相關參數後，可以成功製作出長達數公尺的矽核光纖。最後抽出來的矽核光纖玻璃層直徑100-300微米、矽核心直徑10-30微米。由能量散佈分析儀可知製作出的矽核光纖有著高純度的特性。由拉曼、X光散射儀可知矽核光纖有著高度結晶的特性。由背向散射電子繞射儀分析得知其單晶的長度可維持超過100微米。
我們將矽核光纖以電弧平移台拉絲來進行二次抽絲，可製作出矽核椎狀光纖，已成功將原尺寸約20μm的矽核直徑抽細至2.9μm。
我們使用電弧加熱一段矽核光纖並同時控制緩慢進出料以製作一連串矽微米球，並將矽微米球置入單模光纖和中空光纖熔接後的空腔中製作光纖探針感測器，其感溫靈敏度約80pm/℃，最高感溫到700℃。除此之外，該開放式的架構也能進行酒精濃度的折射率液體量測，藉由快速傅利葉轉換分析得其靈敏度為-5.326±0.223/RIU。

Silicon-cored fibers were made by using a combined techniques of powder-in-tube and vertical-drawing. Much cheaper polycrystalline Si powders substituting expensive single-crystal Si powders or seed rods were packed into a fused silica tube. By optimizing the drawing parameters, several meters long silicon-cored fibers were obtained. The silicon-cored fibers were drawn with resultant silica cladding and Si core diameters being in the range of 100-300 m and 10-30 m, respectively. According to energy-dispersive x-ray spectroscopy, the fabricated Si core is in high purity. From Raman spectrum and X-Ray diffraction analysis, the silicon-cored fiber is high crystalline. The single crystalline property of silicon-cored fibers could continue for more than 100 m long according to electron backscatter diffraction analysis.
We also demonstrated a fiber drawing system for fabricating tapered silicon-cored fiber. A fiber drawing system equipped with arc discharges and motorized translation stage was used. We successfully fabricated tapered silicon-cored fibers with diameter of 2.9 μm in the waist section from an original SCF with diameter of 20 μm.
We heated a silicon-cored fiber to produce silicon microspheres sequentially by arc discharges. By tuning the splicing current parameter, SCF was slowly heated by arc discharging. And a silicon microsphere thus obtained was put in a hollow core fiber spliced with a single mode fiber to form a temperature fiber sensor. The measured thermal sensitivity was ~80pm/℃ for temperature range up to 700℃. The thermal sensitivity was about five times higher than those of silica fiber based. The structure could allow direct contact with an external environment, the fiber probe could also serve as a refractive index sensor with a sensitivity about -5.326±0.223/RIU.

口試委員審定書 i
誌謝 ii
CONTENTS iii
中文摘要 vi
ABSTRACT vii
Statement of Contributions ix
LIST OF FIGURES x
LIST OF TABLES xvii
LIST OF ABBREVIATIONS xviii
Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Literature Review 3
1.2.1 Fabrication Methods of Silicon-Cored Fibers 3
1.2.2 Fabrication of Tapered Silicon-Cored Fibers 7
1.2.3 Fabrication of Silicon Spheres 10
1.2.4 Silicon-Based Fabry–Pérot Optical Sensing Applications 16
1.3 Organization of the Thesis 20
Chapter 2 PNSL’s Fabrication of Silicon-Cored Fibers, Tapered Silicon-Cored Fibers and Silicon Microspheres 21
2.1 Fabrication of Silicon-Cored Fibers 21
2.1.1 A Silicon-cored Fiber Drawing Tower 21
2.1.2 Fabrication Process of Silicon-Cored Fibers 26
2.2 Fabrication of Tapered Silicon-Cored Fibers 38
2.2.1 Setup of External Arc Fusion Discharge System 38
2.2.2 Fabrication Process of Tapered Silicon-Cored Fibers 40
2.2.3 Comparison with Miniaturized Fiber Drawing Tower System 44
2.3 Fabrication of Silicon Microspheres 46
2.4 Summary 49
Chapter 3 Characteristics of Silicon-Cored Fibers, Tapered Silicon-Cored Fibers and Silicon Microspheres 50
3.1 Material Characteristics of Silicon-Cored Fibers 50
3.1.1 Cold Shrink and Solidfying Expansion of Silicon-Cored fibers 50
3.1.2 Raman Scattering Spectra of Silicon-Cored Fibers 54
3.1.3 Element Analysis by Using Energy Dispersive Spectroscopy 59
3.1.4 X-Ray Diffraction Analysis 64
3.1.5 Electron Back-Scattered Diffraction Analysis 66
3.2 Characteristics of Tapered Silicon-Cored Fibers 70
3.2.1 Number of Guided Modes 70
3.2.2 Raman Scattering Spectra of Tapered Silicon-Cored Fibers 73
3.3 Material Characteristics of Silicon Microspheres 75
3.3.1 Plateau-Rayleigh Capillary Instability 75
3.3.2 Raman Scattering Spectra of Silicon Microspheres 79
3.3.3 Electron Back-Scattered Diffraction Analysis 81
3.4 Summary 85
Chapter 4 Theory and Sensing Applications of Silicon Microsphere Resonator 86
4.1 Theory of Optical Fiber Fabry–Pérot Interferometer 86
4.1.1 Introduction of Optical Fiber Fabry–Pérot Interferometer 86
4.1.2 Reflective Spectrum and Free Spectral Range of Silicon Microsphere Resonator 87
4.2 Fabrication of Silicon-Microsphere Based Optical Fiber Probes 88
4.3 Silicon Microsphere Based Optical Fiber Probe for Sensing Applications 91
4.3.1 Temperature Sensing Application 91
4.3.2 Refractive Index Sensing Application 94
4.4 Summary 98
Chapter 5 Conclusion and Future Work 99
5.1 Conclusion 99
5.2 Future Work 100
References 101

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