臺灣博碩士論文加值系統

金屬奈米結構中的侷域表面電漿共振(LSPR)，被認為是表面增強拉曼散射之主要機制。本研究透過光學薄膜導納概念，在不連續銀膜底下加入金屬層及SiO2薄膜，透過金屬層及SiO2薄膜使表面電場最大化，藉此提升不連續銀膜之電場增強效果。樣品利用掃描式電子顯微鏡觀察其表面結構，可看出其結構為隨機島狀分佈，而島狀結構之間擁有許多微小間隙，在此間隙間會產生侷域表面電漿共振。經由影像處理後，利用有限時域差分法(FDTD)模擬不連續銀膜之電場增強效果，發現經設計後的不連續銀膜表面增強拉曼散射平均增強因子可達104。在表面增強拉曼散射量測中，相較於直接在矽基板上沉積不連續銀膜，此結構擁有較強之表面增強拉曼散射訊號。此外，本文也探討調整SiO2膜厚對於表面增強拉曼訊號之影響，並觀察到SiO2膜厚從50nm到150nm時，表面增強拉曼訊號亦隨之增強。

The localized surface plasmon resonance in the metal nanostructure is generally believed to be the main mechanisms of the SERS enhancement. In this work, optical thin films underneath a silver island film were designed to electric field on the surface. We deposited the Ag mirror and the SiO2 film on the silicon substrate then deposited the silver island films on the surface of SiO2 film. Through this method the surface electric field will be enhanced. The surface morphology of each sample was imaged by SEM. A lot of narrow gaps between the silver islands were observed. The electric field distributions of these silver island films are simulated by the finite difference time domain method and the areal SERS enhancement factor can reach to 104. In the SERS measurement, compared with the silver island films deposited on a bare Si substrate, the silver island films on the optical thin film has stronger SERS signals. The SERS signal was gradually increased with the thickness of SiO2 layer from 50 nm to 150 nm.

目錄
中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 v
圖目錄 vi
第一章 緒論與文獻回顧 1
1.1 前言與研究動機 1
1.2 文獻回顧 2
1.2.1各種SERS基板 2
1.2.2奈米粒子近場模擬與不連續金屬薄膜 9
第二章 原理與方法 20
2.1表面增強拉曼散射 20
2.2表面電漿共振 22
2.3有限時域差分法 25
2.4光學導納 27
2.4.1膜矩陣 27
2.4.2導納軌跡 28
2.4.3金屬導納軌跡 29
第三章 實驗步驟與量測系統 31
3.1樣品設計 31
3.2電子槍蒸鍍系統 31
3.3樣品製鍍 32
3.4表面增強拉曼光譜量測 33
第四章 實驗結果與討論 34
4.1樣品設計及分析 34
4.1.1 設計及導納分析 34
4.1.2 奈米銀粒之有限時域差分法模擬 35
4.2島狀銀膜表面結構 38
4.3島狀銀膜近場模擬 41
4.4島狀銀膜拉曼光譜量測 46
第五章 結論 48
參考文獻 50

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