臺灣博碩士論文加值系統

本研究透過快速熱退火(RTA)在不同氣氛下退火ZnO，以獲得製備p-type ZnO所需氣氛環境，再利用高溫擴散爐在N型 ZnO上擴散銀化合物(硝酸銀)，並且實現製備P型氧化鋅透明導電薄膜。透過改變擴散溫度(400℃至600℃)，研究銀化合物在不同擴散溫度對氧化鋅透明導電薄膜電特性的影響。利用霍爾量測系統、X-ray繞射儀(XRD)、拉曼光譜分析、能量散佈分析儀(EDS)、場發掃描式電子顯微鏡(FE-SEM)、穿透光譜進行量測分析，以獲得銀化合物擴散至氧化鋅薄膜，以形成P型氧化鋅的最佳條件。研究結果顯示，當擴散溫度為550℃，氮氣(N2)環境時，可得到最佳P型氧化鋅透明導電薄膜電特性，該薄膜電阻率為3.16 Ω-cm、遷移率為1.77 cm^2/vs、載子濃度為6.69× 10^18 cm^-3。

In this study, ZnO was annealed in different ambiance by rapid thermal annealing (RTA) to obtain a p-type ZnO, and then to use high temperature diffusion furnace to diffused silver-containing compounds on n-type ZnO/-glass substrates, the p-type ZnO transparent conductive films were prepared. The effects of different silver-containing compounds diffusion temperatures (400℃ to 600℃) on the electrical properties of ZnO transparent conductive films were studied. The Hall measurement system, XRD, Raman, EDS, FE-SEM, and penetrating spectrum for measurement analysis were used to obtain the best conditions for the silver-containing compounds diffusion into ZnO films to prepare p-type ZnO. The results showed that the silver-containing compounds diffusion temperature was 550℃ and nitrogen (N2) atmosphere environment, the best p-type ZnO transparent conductive film was obtained, and the resistivity of the film was 3.16 Ω-cm, mobility was 1.77 cm^2/vs and carrier concentration was 6.69× 10^18 cm^-3.

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
第一章 緒論 1
1-1 前言 1
1-2 研究目的 4
第二章 基礎理論 5
2-1 氧化鋅結構特性 5
2-2 氧化鋅的摻雜 7
2-2-1 p-type氧化鋅摻雜 7
2-3 量測分析儀器 8
2-3-1 霍爾量測 8
2-3-2 X光繞射儀(X-ray diffraction，XRD) 10
2-3-3 拉曼光譜儀(Micro-Raman Spectroscopy) 11
2-3-4 能量散佈分析儀(EDS) 11
2-3-5 場發掃描式電子顯微鏡(FE-SEM) 12
2-3-6 穿透光譜(transmission spectra) 13
第三章 實驗流程 14
3-1 高溫擴散爐 14
3-2 快速熱退火系統 16
3-3 實驗步驟 17
3-3-1 基板清洗 17
3-3-2 實驗材料的準備 19
3-3-3 擴散熱處理ZnO 20
第四章 實驗結果與討論 22
4-1 不同氣氛對ZnO薄膜之分析 22
4-1-1 不同氣氛對ZnO之電特性分析 22
4-1-2 不同氣氛對ZnO之XRD分析 26
4-1-3 不同氣氛對ZnO之SEM分析 29
4-2 銀化合物(硝酸銀)擴散於ZnO之分析 33
4-2-1 銀化合物(硝酸銀)擴散於ZnO之電特性分析 33
4-2-2 銀化合物(硝酸銀)擴散於ZnO之XRD分析 35
4-2-3 銀化合物(硝酸銀)擴散於ZnO之Raman分析 36
4-2-4 銀化合(硝酸銀)物擴散於ZnO之EDS分析 37
4-2-5 銀化合物(硝酸銀)擴散於ZnO之穿透率分析 39
第五章 結論 41
參考文獻 42

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