臺灣博碩士論文加值系統

本研究以「熱裂解化學氣相沉積法(TCVD)」為主要製程，進行碳奈米螺旋線圈及奈米碳材的成長，並以其作為場發射燈泡之陰極燈絲。研究中藉由製程參數之調整，使陰極燈絲之性能最佳化，最後並封裝成一完整之場發射燈泡。研究內容主要分為三部分，首先利用化學均溫置換法於不銹鋼絲上置換奈米級貴金屬觸媒來成長碳奈米螺旋線圈，探討置換濃度與時間等參數對於碳奈米螺旋線圈成長之影響，並藉由參數調整來得到最佳置換條件。
第二部分則針對以TCVD成長碳奈米螺旋線圈及奈米碳材之製程部分，調整成長時間及成長溫度等參數來探討各參數對於碳奈米螺旋線圈形貌之影響，並分析以其所製作場發射陰極燈絲之場發射特性。第三部分則將上述最佳製程參數所成長之CNC陰極燈絲進行構型變化，並探討其對發光均勻度、場發射特性等之影響。最後將其實際封裝成FEL燈泡，並量測其光通量及發光效率，以了解未來場發射燈具之應用潛力。
研究結果顯示，在基材之置換過程中，貴金屬濃度為50 ppm及析鍍90秒為最佳置換條件。而在TCVD製程中，在800℃下成長10 min可獲得最佳場發射特性之CNC陰極燈絲。最後將長度6 cm及直徑1 mm之CNC陰極燈絲封裝為FEL燈泡後，在10 kV外加電壓下，可得到光通量229 lm、發光效率28 lm/W及演色性(Ra)大於 85之燈具。

關鍵詞：碳奈米螺旋線圈、化學置換法、場發射燈具

The synthesis of carbon nanocoils (CNCs) and carbon nano-products using thermal chemical vapor deposition (TCVD) to fabricate cathode wires for field emission bulbs (FEBs) is studied in this thesis. In this work, the performance of FE cathode wires was optimized via adjustment of the process parameters. These FE cathode wires were then used to assemble complete FEBs for evaluation. The results of this thesis contain three main sections. Firstly, the CNCs growth on stainless steel wires with nano-catalysts prepared with different chemical displacement parameters such as the concentration of the displacement time were compared. These displacement parameters were optimized in this section.
In the second part, the synthesis of carbon nanocoils and carbon nano-products using thermal chemical vapor deposition with different growth time and growth temperature was investigated. The effect of growth time and temperature on the CNC morphology was studied. The field emission characteristics of the FE wire cathodes fabricated with these CNCs were also evaluated.
In the last section, the influence of configuration on the lighting uniformity and FE properties was investigated with the wire cathodes fabricated with the aforementioned optimized process parameters. The wire cathode with optimized FE characteristics was sealed with phosphor anode to assemble a FEB. The luminous flux and lighting efficiency was measured to realize the application potential of the FEB.
The results show that, in the displacement process, the solution concentration of 50 ppm and displacement time of 90 sec is the optimal displacement condition. In the CNC synthesis process, the CNC wire cathodes with the best FE characteristics can be fabricated with the TCVD temperature of 800℃ and growth time of 10 min. The optimal configuration of the wire cathode is the length of 6 cm and diameter of 1 mm. When the optimal wire cathode was sealed with phosphor anode to assemble a FEB, the FEB achieved the luminous flux of 280 lm, the luminous efficiency of 28 lm/W and Ra value higher than 85 under the applied voltage of 10 kV.

Key words: carbon nanocoil, chemical displacement, field emission bulb

誌謝 ii
摘要 iii
ABSTRACT iv
目錄 vi
表目錄 ix
圖目錄 x
1.緒論 1
1.1 前言 1
1.2 研究動機 4
2. 文獻回顧及發展簡介 5
2.1 場發射燈源之簡介 5
2.1.1 場發射光源燈具發展 8
2.1.2場發射發光元件的設計與應用 10
2.2 場發射電子機制及原理 14
2.2.1 電子發射種類 14
2.2.2 場發射機制 15
2.3 碳奈米螺旋線圈之發展簡介 17
2.3.1 碳奈米螺旋線圈之成長機制 20
2.3.2 碳奈米螺旋線圏之性質及應用 24
2.3.3 碳奈米螺旋線圈的製備方法 25
2.4 觸媒製備方法 27
2.4.1 物理法 27
2.4.2 化學法 27
3. 研究方法與流程 30
3.1 研究流程 30
3.2 研究方法 30
3.2.1 基材製備 31
3.2.2 觸媒製備 31
3.2.3 化學氣相沉積法合成碳奈米螺旋線圈 31
3.3 研究設備 32
3.3.1 化學置換裝置 32
3.3.2 化學氣相沉積設備 33
3.3.3 真空場發射測試儀 34
3.4檢測分析儀器 35
3.5 實驗藥品與儀器 38
3.5.1 實驗藥品 38
3.5.2 實驗儀器 38
4. 結果與討論 39
4.1 置換參數對CNC陰極燈絲及其場發射特性之影響 39
4.1.1 鍍液濃度對CNC陰極燈絲及其場發射特性之影響 39
4.1.2 置換時間對CNC陰極燈絲及其場發射特性之影響 42
4.1.3 小結 46
4.2 TCVD參數對CNC陰極燈絲及其場發射特性之影響 46
4.2.1 成長時間對CNC陰極燈絲及其場發射特性之影響 46
4.2.2 成長溫度對CNC陰極燈絲及其場發射特性之影響 53
4.2.3 小結 59
4.3 CNC陰極燈絲之構型對其場發射特性之影響及場發射燈具製作 60
4.3.1 CNC陰極燈絲之長度對其場發射特性之影響 60
4.3.2 CNC陰極燈絲之直徑對其場發射特性之影響 62
4.3.3 場發射燈具製作與穩定性測試 65
5. 結論 68
6.未來展望 69
參考文獻 70

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