臺灣博碩士論文加值系統

在本論文中我們將研究製作特殊排列的球狀/非球狀微透鏡陣列結構，並觀察在不同製程中所製造的微透鏡陣列表面形貌與結構參數，以及其對於低色溫燭光OLED元件光學性質與效率的影響。
本研究分為四個部分：光微影(photolithography)、擴散板微影(diffuser lithography)、傾斜微影(tilt lithography)、複合微影(結合傾斜微影和擴散板微影，composite lithography)製程。在光微影與擴散板微影中，探討在相同光罩圖案下有無擴散板對於填充率的影響。在傾斜微影製作微透鏡實驗中，我們利用在光罩上方架設菲涅耳透鏡的方式，製做出具有傾斜的微結構。最後，在複合微影製作微透鏡實驗中，成功的製作出具有填充率77%的傾斜微透鏡陣列結構，其所能促進低色溫燭光OLED元件的電流效率和功率效率分別可以達到19%和32.7%。

In this thesis, we will fabricate specially arranged spherical/aspherical microlens arrays. We will observe surface morphology and feature sizes of microlens arrays made by different manufacturing processes, and investigate the influences of parameters of microlens arrays on optical properties and efficiencies of low-color-temperature candle-like organic light-emitting devices (OLED).
Four different manufacturing processes will be proposed in this thesis: photolithography, diffuser lithography, tilt lithography, and composite lithography (combined with diffuser lithography and tilt lithography). For the photolithography and diffuser lithography, we study the influences of the diffuser film on the gap, fill factor, and surface morphology of the produced microstructures. In the tilt lithography experiment, we used an additional Fresnel lens on the photomask to make tilt microstructures. Final, in the composite lithography experiment, we successfully make tilt microlens arrays, having a fill factor of 77%. The tilt microlens array can improve the luminous current efficiency and luminous power efficiency of a low-color-temperature candle-like OLED up to 19% and 32.7%, respectively

第一章 序論 1
1.1 前言 1
1.2 研究動機 2
1.3 文獻回顧 2
第二章 理論基礎 9
2.1 Snell’s Law 9
2.2 擴散板 10
2.3 菲涅耳透鏡( Fresnel lens) 11
2.4 填充率( Fill factora) 的計算 12
2.5 輝度效率 13
2.6 OLED色彩鑑定 14
第三章 實驗步驟與量測方法 17
3.1 以光微影製程製作微透鏡陣列結構 17
3.2 以擴散板微影製程製作微透鏡陣列結構 19
3.3 以傾斜微影製程製作微透鏡陣列結構 20
3.4 以複合微影製程製作微透鏡陣列結構 22
3.5 光罩設計 24
3.6高分子模造技術 24
3.6.1以PDMS製作B模仁 24
3.6.2 B模仁抗沾黏處理 25
3.6.3以PDMS製作C模仁 25
3.7 性質分析 25
3.7.1表面形貌分析 25
3.7.2光學效率分析 26
3.8 製程設備與量測儀器 26
3.8.1 旋轉塗佈機 27
3.8.2 加熱板 27
3.8.3 4吋曝光頭 28
3.8.4 真空烘箱 28
3.8.5 紫外光臭氧機組 29
3.8.6 紫外光硬化機 30
3.8.7 輝度計 30
3.8.8 掃描式電子顯微鏡 31
第四章 結果與討論 33
4.1 光微影製程 33
4.2 擴散板微影製程 45
4.3 傾斜微影製程 52
4.4 複合微影製程 64
第五章 結論 73
第六章 未來工作 75

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