臺灣博碩士論文加值系統

本研究主要探討表面聲波元件應用於奈米尺度的步進致動原理及技術。利用半導體製程技術在Y+128度切面之鈮酸鋰基材上製作交指叉換能器，產生10 MHz高頻的X-波傳表面聲波，藉助定子與滑座間的正向接觸力與摩擦力，推動滑座作線性步進移動。採用光纖式麥克森干涉儀量測滑座的步進位移，初步評估表面聲波馬達之性能。本研究內容包括表面聲波元件的設計原理、交指叉換能器的實驗分析、光纖式麥克森干涉儀及表面聲波馬達之量測結果。光纖式麥克森干涉儀的訊號經數位濾波處理及位移解調後，解析度可達本實驗所需，此表面聲波馬達可達奈米等級的步進位移。

The actuation technique of a surface acoustic wave (SAW) stepper with nanometer scale linear motion is experimentally investigated in this thesis. The SAW motor is composed of a stator made of a Y+128o cut, X-propagation lithium niobate substrate and silicon sliders with an array of pillar projections manufactured by semiconductor fabrication technique. Two sets of interdigital transducers deposited on the substrate are used to generate Rayleigh waves with driving frequency up to 9.7 MHz. The SAW motor is driven by friction exerted on the contact area between the slider and surface acoustic waves in retrogressive elliptical locus. Stepping motion of the SAW motor is measured directly by a fiber-optic Michelson interferometer with demodulation in digital signal processing method. A several nanometer displacement in each step is achieved during the experiment.

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1研究背景 1
1.2文獻回顧 1
1.3研究內容 2
第二章 工作原理及表面聲波元件的製作分析 4
2.1脈衝函數模型 4
2.1.1單相交指叉換能器 5
2.1.2雙相交指叉換能器 6
2.2交指叉電極製作 7
2.3交指叉換能器測試 7
2.4小波轉換訊號分析 8
第三章 表面聲波馬達的驅動及量測 10
3.1表面聲波馬達驅動方式 10
3.2預力的施加結構 10
3.3滑座類型 11
3.4光纖式麥克森干涉儀 11
3.5表面聲波馬達移動結果 16
第四章 結論與展望 20
參考文獻 22

[1] M. Kurosawa, M. Takahashi, and T. Higuch, “An ultrasonic XY stage using 10MHz surface acoustic wave,” IEEE Ultrason. Symp. Proc., 535-538, 1994.
[2] M. Kurosawa, M. Takahashi, and T. Higuch, “Optimum pre-load of surface acoustic wave motor,” IEEE Ultrason. Symp. Proc., 369-372, 1996.
[3] M. Kurosawa, M. Takahashi, and T. Higuch, “Elastic contact conditions to optimize friction drive of surface acoustic wave motor,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 45(5) , 1229-1237, 1998.
[4] M. Chiba, M. Takahashi, M. Kurosawa, and T. Higuchi, “Evaluation of a surface acoustic wave motor output force,” IEEE Ultrason. Symp. Proc., 250-255, 1997.
[5] T. Morita, M. Kurosawa, and T. Higuchi, “Simulation of surface acoustoic wave motor with spherical slider,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 46(4), 929-934, 1999.
[6] M. Takasaki, N. Osakabe, M. Kurosawa, and T. Higuchi, “Miniaturization of surface acoustic wave linear motor,” IEEE Ultrason. Symp. Proc., 679-682, 1998.
[7] T. Shigematsu, and M. Kurosawa, “Evaluation of surface acoustic wave motor stepping motion,” IEEE Ultrason. Symp. Proc., 531-536, 2001.
[8] M. Kurosawa, H. Itoh, K. Asai, M. Takasaki, and T. Higuchi, “Optimization of slider contact face geometry for surface acoustic wave motor,” IEEE Ultrason. Symp. Proc., 252-255, 2001.
[9] G. A Johnsen, T. L. Bagwell, J. L. Henderson, and R. C. Bray “Polymide as an acoustic absorber for high frequency saw applications,” IEEE Ultrason. Symp. Proc., 279-284, 1988.
[10] K. Asai, M. Kurosawa, and T. Higuchi, “Novel power circulation methods for a acoustic wave motor,” IEEE Ultrason. Symp. Porc., 667-670, 1999.
[11] F. Ruan, Y. Zhou, Y. L. Lam, S. Mei, C. Liaw, and J. Liu, “A precision fiber optic displacement sensor based on reciprocal interferometry,” Optics Communications, 176, 105-112, 2000.
[12] R. H. Tancrell, and M. G. Holland, “Acoustic surface wave filters,” IEEE Proc., 59, 393-409, 1971.
[13] D. Royer, and E. Dieulesaint, Elastic Waves in Solids, vol. II, 70-72, Springer-Verlag, Berlin, 1999.