臺灣博碩士論文加值系統

隨著CMOS製程的進步，單晶片技術使電化學傳感系統更加小型化，並能使其適用於更快速檢測以及符合經濟效益的醫療診斷和環境監測系統。然而，低功耗和低雜訊仍然是現代電化學感測系統的最大挑戰。為了應對未來的臨床分析，此類晶片必須實現低功耗、微型化體積、快速和多信息傳感機制，以實現更準確和方便的電化學感測系統。
本論文提出了一微瓦雙模式電化學感測晶片，該晶片整合了三角波產生器和電流鏡架構的低雜訊截波穩定(chopper-stabilization)恆電位電路。此三角波產生器利用電流微縮技術，在無需大尺寸之被動元件情況下，提供一低頻率之三角波訊號以實現循環伏安法（CV）量測功能。該設計採用0.18μm CMOS製程製作，在±5μA的電流範圍內實現41pA最低電流解析度，同時保持R2線性度為0.998。當檢測到最大5μA感應電流時，系統從1.2V供應電源消耗16μW。其等效效率轉換為0.31、感應電流動態範圍為108dB。此晶片在雙模式（CA / CV）測量中，分別能與市售三電極式金電極以及與中興大學合作的矽奈米線感測器整合測試，量測sub-millimolar 和 femto-molar之鐵氰化鉀、多巴胺檢測變化。

With the advanced CMOS process, single-chip integration technology has made electrochemical sensing systems more miniaturized, making them suitable for fast and cost-effective medical screening and environmental monitoring systems. However, low power consumption and low noise are still the biggest challenges of current electrochemical sensing systems. In order to cope with future clinical analysis, the integrated IC must achieve low-power, small-volume, fast and multi-information sensing mechanisms for accurate and convenient electrochemical sensing. In this thesis, a microwatt electrochemical sensing chip with an integrated current-reducer pattern generator and a current-mirror based low-noise chopper-stabilization potentiostat circuit is presented. The pattern generator, utilizing the current reducer technique, creates a sub-Hz ramp signal for the cyclic voltammetry (CV) measurement without large-size passive components. The proposed design adopts the chopper-stabilization and low-noise biasing technique for the potentiostat and a counter-based time-to-digital converter to reduce the amplitude noise effects and to convert the sensing current signal to digital codes for further data processing. The design is fabricated using a 0.18-μm CMOS process and achieves a 41pA current resolution in the current range of ± 5μA while maintaining the R2 linearity of 0.998. The system consumes 16μW from a 1.2V supply when a maximum 5μA sensing current is detected. The power efficiency of the readout interface is 0.31, and the sensing current dynamic range is 108dB. The design is fully integrated into a single chip and is successfully tested in the dual-mode (CA/CV) measurements with commercial gold electrodes in a potassium ferricyanide solution and nanowire sensor in the dopamine solution in sub-millimolar and femto-molar concentrations, respectively.

Contents vi
List of Figures viii
List of Tables x
Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Challenges for CMOS electrochemical instrumentation 4
1.3 Target application and specs 4
1.4 Thesis organization 5
Chapter 2 Review of Electrochemical Sensing 6
2.1 Overview 6
2.2 Principles and structure of Electrochemical Transducer 7
2.3 Electrochemical sensing methods 9
2.4 Electrochemical instrumentation for amperometric sensing 12
2.4.1 Potentiostat 13
2.4.2 Resistive feedback based TIA 14
2.4.3 Switched-capacitive feedback based TIA 16
2.4.4 Current conveyor 17
2.4.5 Current-mirror based potentiostat 19
2.4.6 Summary of current readout topologies 21
Chapter 3 Microwatt Dual-Mode Front-End IC for Electrochemical Sensing Applications 22
3.1 Motivation and challenges 22
3.2 System architecture 23
3.3 Proposed front-end circuit for electrochemical sensing 24
3.3.1 Current-mirror based potentiostat 24
3.3.2 Noise analysis for the current-mirror-based potentiostat 25
3.3.3 Design of the rail to rail chopper opamp 28
3.3.4 Current to frequency converter 30
3.3.5 Time to digital converter 32
3.3.6 On-chip waveform generator 33
3.4 Experimental Results 39
3.4.1 Chip measurement results 40
3.4.2 Sensor integration measurement results 44
3.4.3 Comparison table 51
3.5 Brief summary 52
Chapter 4 Conclusion and Future Work 53
Reference 55

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