臺灣博碩士論文加值系統

光學尺的檢測部透過主尺與指標光柵的相對移動可得到位置的訊息，因此被廣泛應用於精密機械產業之中。然而機台與光學尺隨溫度而產生的形變(拉伸與收縮)，這對精密機械的精度有重要的影響。

傳統上對熱脹冷縮熱膨脹效應的探討僅至於靜態與穩態，然而對高精度的機台或量測而言，溫度的動態響應是必需探討的，而這種熱雜訊的時空影響也是本研究的重要目的之一。因此本文以Fabry-Perot干涉儀量測電動平台在動態時冷縮熱脹的變化，再與光學尺的訊號比較，探討兩者形變的關聯。

為了觀測平台的形變，本研究設計了三種雙共振腔架構，經由不同共振腔距離及不同的位置架設的組合，可得平台冷縮熱脹的影響。同時比對光學尺的主尺與讀頭在不同位置的影響，發現光學尺隨平台在正極限、中間以及負極限等位置時的位移不相同，因此光學尺會受溫度及機構的影響，在不同位置而有不同的變化量。

Linear encoder is widely used in the machinery industry. The detection unit of the linear encoder emerges the position signals through the relative displacement behavior the scale and the scanning reticle. However, the deformation of the machine and the linear encoder due to temperature drift results in an important influence on the precision machine.

Traditionally, the thermal expansion effects are only investigated as static and steady state. However, for high-precision machine or measurement, the dynamic response of temperature drift must be discussed. The influence of thermal noise is also one of the important purposes in this study. Therefore, the Fabry-Perot interferometer to measure the change of the thermal expansion of the platform. Then utilized the result of the linear encoder and that of Fabry-Perot interferometer are compared to determine the relationship between the deformations and temperature drift.

In order to inspect the deformation of the platform, three double-resonant cavity structures are designed in this study. Through the combination of different resonant cavity distances and different positions, the thermal expansion influence of platform can be obtained. That the displacements of the linear encoder with the platform at the positive limit, the middle and the negative limit are different, so that the linear encoder is affected by the temperature and the mechanism. There are different changes in different locations.

摘要 i
Abstract ii
目錄 iii
表目錄 v
圖目錄 vii
第一章 緒論 1
1.1 研究的動機與目的 1
1.2 文獻回顧 1
1.3 論文架構 5
第二章 工作原理 6
2.1 光學尺 6
2.1.1 測量方法 6
2.1.2 掃描原理 8
2.2 Fabry-Perot干涉原理 10
2.2.1 多光束干涉原理 11
2.2.2 透射光強 11
2.3 熱膨脹係數 13
第三章 量測系統研製 15
3.1 雙Fabry-Perot干涉儀系統 15
3.1.1 Fabry-Perot干涉儀 16
3.1.2 電動平台17
3.1.3 影像感測器 19
3.2 溫度檢測系統 20
3.3 加熱系統 22
第四章 量測結果與分析 24
4.1 光學尺加熱實驗 24
4.2 熱效應對光學尺影響之探討 27
4.2.1 相同共振腔長分置於對稱位置 28
4.2.1.1 共振腔長10 mm 28
4.2.1.2 共振腔長20 mm 35
4.2.2 相同共振腔長在不同位置 41
4.2.2.1 共振腔架設在左上方及中間 42
4.2.2.2 共振腔架設在右上方及中間 48
4.2.2.3 共振腔架設在左下方及中間 55
4.2.2.4 共振腔架設在右下方及中間 61
4.2.3 不同共振腔長在對稱位置 68
4.2.3.1 CCD1干涉儀共振腔長10mm與CCD2干涉儀共振腔長20mm 68
4.2.3.2 CCD1干涉儀共振腔長20mm與CCD2干涉儀共振腔長10mm 75
第五章 結論 83
參考文獻 84

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