臺灣博碩士論文加值系統

原子力顯微鏡為一利用探針掃描樣品表面以得到奈米解析度之成像技術，其致動器採用壓電材料以達到奈米級精度。然而，遲滯效應造成控制壓電材料之驅動電壓與實際伸長量呈現一非線性關係。遲滯效應會降低量測的正確度，並造成表面影像失真。此外，在材料機械特性之計算上亦會產生誤差。本研究為了改善一自製高速掃描器之非線性特性，設計一像散式位移量測架構以量測致動器之電壓與位移關係，並且藉由系統鑑別建構致動器之數學模型，進而推算出校正驅動電壓訊號。實驗結果顯示利用校正驅動訊號可成功提升致動器之位移線性度，在XYZ三個軸向上皆達到0.995以上之決定係數。最後，利用校正驅動訊號控制原子力顯微鏡對一標準方格樣品進行掃圖，結果顯示本方法可改善遲滯效應所造成之失真現象。

Atomic force microscopy (AFM) is an imaging technique that utilizes a cantilever tip to scan the sample surface at nanoscale. Piezoelectric materials are used in the AFM scanner to achieve nanometer resolution. However, the hysteresis effect of the piezoelectric materials causes a nonlinear relationship between the driving signal and the actual displacement, which causes the accuracy reduction and image distortion. Moreover, the hysteresis effect also generates calculation error in the mechanical properties measurement. In this thesis, to compensate the nonlinear effect of a home-made high-speed scanner, an astigmatic detection system was built to measure the scanner displacement. Mathematical models of the three-axis scanner were constructed by system identification. To generate modified driving signals. The experimental results show that the proposal method improved the scanner linearity with the coefficient of determination of over 0.995 in three directions. Finally, a standard sample was imaged using the modified driving signals. The result confirms that the proposed method can
improve the image distortion due to the hysteresis effect.

致謝 I
摘要 II
Abstract III
圖目錄 VI
表目錄 IX
第一章 緒論 1
1.1研究動機 1
1.2文獻回顧 2
1.2.1原子力顯微鏡 2
1.2.2高速原子力顯微鏡 6
1.2.3壓電遲滯補償 9
1.3 內容簡介 15
第二章 研究方法 16
2.1 研究方法概述 16
2.2 系統識別 17
2.2.1模型假設 18
2.2.2參數識別 21
2.3校正電壓求取 21
第三章 Z軸壓電致動器非線性效應補償 24
3.1 Z軸光學讀取頭靈敏度校正實驗 24
3.1.1實驗架構 24
3.1.2 實驗流程 30
3.1.3 實驗結果 30
3.2 Z軸遲滯曲線量測實驗及校正訊號驗證實驗 33
3.1.1實驗架構 33
3.2.2 實驗流程 36
3.2.3 實驗結果 37
第四章 XY軸壓電致動器非線性效應補償 48
4.1 實驗架構 48
4.2 實驗流程 50
4.3 實驗結果 51
第五章 原子力顯微鏡掃圖實驗 71
5.1實驗架構 71
5.2實驗流程 74
5.3實驗結果 76
第六章 結論與展望 80
6.1結論 80
6.2未來工作 80
參考文獻 81
附錄A壓電元件規格表 84
附錄B探針規格表 85
附錄C樣品規格表 86

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