臺灣博碩士論文加值系統

本實驗是利用MBE系統成長高品質的 NiFe80Fe20 / Ru / NiFe80Fe20 三層膜，以選取適當的基板（Al2O3(11-20)）與不同間隔層(Ru)厚度，藉此討論此三層膜系統之磁阻效應與隨著Ru厚度變化出現反鐵磁耦合振盪的情形。
近來已經有許多關於鐵磁性材料透過非磁性物質產生交換耦合與其巨磁阻(giant magnetoresistance)效應的研究，例如：Fe/Cr、Co/Cr、Co/Ru這些系統已經被廣泛的探討，在本實驗中我們利用此系統—NiFe80Fe20 / Ru / NiFe80Fe20 三層膜，並成功地找到反鐵磁耦合振盪現象。實驗中藉由反射式高能電子繞射儀（RHEED）探討其磊晶結構；縱向磁光科爾效應儀（LMOKE）、震動樣品分析儀（VSM）來量測其磁性行為；原子力顯微鏡（AFM）來觀察其原子表面型態；再利用磁阻量測儀（MR）看其磁阻變化率。以研究提升磁阻率(DR/Ro)為目的。

By molecular beam epitaxy (MBE), the author has prepared high-quality NiFe80Fe20 / Ru / NiFe80Fe20 trilayers with different spacer (Ru) thickness on Al2O3(11-20) substrates. This thesis study on the magnetoresistance effect and the oscillation behavior of antiferromagnetic coupling as a function of the Ru thickness in Ni80Fe20╱Ru╱Ni80Fe20 trilayers.
The oscillation of the interlayer coupling as a function of the spacer thickness and the giant magnetoresistance effect have been extensively studied in recent years. In particular, Fe/Cr, Co/Cr, Co/Cu systems have been studied by different authors. In this work, we use the trilayers system—NiFe80Fe20 / Ru / NiFe80Fe20 success to find the oscillation behavior of antiferromagnetic coupling. In our experiment, Reflection high-energy electron diffraction (RHEED) has been employed to study the epitaxial relation and surface of the trilayers structure. Longitudinal magneto-optical Kerr effect (LMOKE) and vibration sample Magnetometer (VSM) have been used to investigate the magneto-optical properties. Atomic Force Microscopy (AFM) has been used to observe the atom and roughness on the trilayers surface. We also use the Magneto-Resistance (MR) to observe the ratio of resistance with field.

第一章 前言與簡介
§1-1 前言1
§1-2 磁性的起源2
§1-3 磁阻簡介4
§1-4 磁阻效應現象及原理6
§1-5 GMR效應10
§1-6 磁異向性簡介16
§1-7 磁異向性的量測30
§1-8 界面粗糙度35
§1-9 交換耦合行為37
第二章 實驗儀器介紹
§2-1 成長樣品儀器：分子束磊晶系統43
§2-2 實驗測量儀器
【一】 磁光科爾效應儀49
【二】 反射式高能電子繞射儀55
【三】 原子力顯微鏡57
【四】 VSM61
【五】 磁阻量測儀62
第三章 實驗步驟
§3-1 系統真空環境的準備65
§3-2 基板的準備66
§3-3 樣品成長66
§3-4 樣品量測67
第四章 實驗結果和討論
§4-1 Ni80Fe20╱Ru╱Ni80Fe20三層膜於Al2O3(11-20)基板的成長機制與結構70
§4-2 改變Ru層厚度對於Ni80Fe20╱Ru╱Ni80Fe20三層膜反鐵磁耦合的影響77
§4-3 改變Ru層厚度對於Ni80Fe20╱Ru╱Ni80Fe20三層膜磁阻變化率的影響82
§4-4 改變Ni80Fe20╱Ru╱Ni80Fe20三層膜成長溫度對於飽和場與磁阻的影響90
第五章 結 論98
參考文獻 Reference100

[1].M.N. Baibich, J.M Broto, A.Fert et al.,Phys.Rev.Lett. 61, 2472 (1988)
[2].S.S.P. Parkin, Phys. Rev. Lett. 67, 3598 (1991)
[3].Jian-Qing Wang and Gang Xiao, Phys. Rev. B. 49, 3982 (1992)
[4].T. Valet A. Fert, Phys. Rev. B. 48, 7099 (1993)
[5].J.L. Fry, E. C. Ethridge, P.M. Levy, and Y. Wang, J. Appl.Phys.,69, 4780 (1991)
[6].P.J.H. Bloemen, H.W. van Kesteren, H.J.M. Swagten and W.J.M. de Jonge. Phys. Rev. B. 50, 13505 (1994)
[7].Soshin Chikazumi 著,張煦、李學養 譯 磁性物理學,52,經連出版社（1981）
[8].Eric E. Fullerton, M. J. Conover, J. E. Mattson, C. H. Sowers, and S. D. Bader. Phys. Rev. B. 48, 15755 (1993)
[9].See e.g. “Ultrathin Madnetic Structure Ⅱ, Measurement Techniques and Novel Magnetic Properties” ed. By B.Heinrich, J. A. C. Bland.(1994)
[10]. A. Fert ,P. Grunberg, A. Bartthelemy, F. Pertroff, W. Zinn.J.Magn. Magn.Mater, 140(1995)
[11]. J.C.S. Kools. IEEE Tran. Magn. 32, 3165 (996)
[12]. P. E. Camley and J. Barnas, Phys. Rev. Lett. 63 ,664 (1989)
[13]. P.M. Levy, S. Zhang and A. Fert, Phys. Rev. Lett. 65 ,1643(1995)
[14]. A. Vedyayev, B. Dieny and N. Ryzhanova. Europhys. Lett. 19, 329 (1992)
[15]. R.Q. Hood and L.M. Falicov，Phys. Rev. B. 46 859 (1992)
[16]. S. Zhang and P.M. Levy，Mater. Res. Soc. Symp. Proc. 313,53 (1993)
[17]. J. Inoue and S. Maekawa, Prog. Theor. Phys. 106, 187(1991)
[18]. K.B. Hathaway，Magnetic Coupling and Magnetoresistance，45
[19]. S.S.P. Parkin, N. More，and K.P. Roche. Phys. Rev. Lett. 64 ,2304 (1990)
[20]. Cullity，”Introduction to magnetic materials”.
[21]. Sóshin Chikazumi and Stanley H.Charap，”Physics of Magnetism”.
[22]. Maxwell，James Clerk，Atreatise on Electicity and Magnetism，Articles 437 and 438，Vol.2 1006pp.，2Vols.，3d(1891)ed.(New York:Dover Publications，1954).
[23]. Stoner，E.C., ”The Demagnetizing Factors for Ellipsoids”, Phil.Mag.7 36，803(1945).
[24]. See e.g，“Molecular Beam Epitaxy”，ed. By M.A. Herman and H. sitter (Berlin Springer，1989)
[25]. J.P. Qian and G.C. Wang，J. Van Sci. Technol. A8，4117 (1990)
[26]. Voigt. W，“Magneto and Electro Optic”，Teubner, Leiptig (1908)
[27]. Hulme，H.R. “Farady effect in ferromagnetics”，Pro. Roy. Soc, A135，237(1932).
[28]. M.J. Freiser，IEEE Trans. Magn.，MAG-4(2)，152 (1968).
[29]. Y. Souche, J.M. Alameda, Materials Research Society, 150,165.
[30] P.J.H. Bloemen，H.W. van Kesteren，H.J.M. Swagten and W.J.M. de Jonge，Physical Review B，50，13505 (1994)
[31] S. Colis，A. Dinia，C. Mény, P. Panissod，C. Ulhaq-Bouillet，and G. Schmerber，Physical Review B，Volume 62，pp. 11709 (2000)
[32] K. Pettit，S. Gider and S. S. P. Parkin，M. B. Salamon，PHYSICAL REVIEW B VOLUME 56，NUMBER 13 (1997)
[33] M. N. Baibich，J. M. Broto，A. Fert，F. Nguyen van Dau，F. Petroff，P. Etienne，G. Creuzet，A. Friederich and J. Chazelas，Phys. Rev. Lett. 61，2472 (1988)
[34] Hideo Fujiwara，IEEE，31，6 (1995)
[35] J. C. Slonczewski，IBM Research Division，Thomas J，Watson Research Center
[36] D. Stoeffler and F. Gautier， J. Magn. Magn. Mater. 140，529 (1995).
[37] S. Colis* A. Dinia，PHYSICAL REVIEW B VOLUME 62，NUMBER 17 (2000)
[38] Eric E. Fullerton，David M. Kelly，J. Guimpel，and Ivan K. Schuller，Phys. Rev. Lett. 68, 859–862 (1992)
[39] M. J. Hall，B. J. Hickey， M. A. Howson，M. J. Walker，J. Xu，D. Greig，and N. Wiser Phys. Rev. B 47，12785–12793 (1993)
[40] S. S. P. Parkin，R. Bhadra，Phys. Rev. Lett. 66 (1991)
[41] J. Barnas, A. Fuss, R. E. Camley, P. Grünberg, and W. Zinn Phys. Rev. B 42, 8110–8120 (1990)
[42] R. E. Camley，J. Barnas，Phys. Rev. Lett. 63 (1989) 664
[43] R. E. Camley，R. L. Stamps，J. Phys. Condens. Matter，5 (1993) 3727
[44] P. M. Levy，S. Zhang，Phys. Rev. Lett. 65 (1990) 1643
[45] S. Zhang，P. M. Levy，Phys. Rev. Lett. 45 (1992) 8689
[46] P. Bruno and C. Chappert , Phys. Rev. Lett. 16,1602 (1991)
[47]. P.K. Larsen and P.J. Dobson, “Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surface”, (NATO ASI Series, Series B: Physics Vol.188)