臺灣博碩士論文加值系統

本研究以電漿輔助化學氣相沈積法，使用甲烷氣體為碳源，於預先濺鍍鐵觸媒的基材上成長奈米碳管，產生表面形貌、長度及密度上具有差異的奈米碳管，並研究在不同溫度下場發射的性質。多數有較佳場發射性質(低起始電場)的樣品，在整個外加電場的範圍內展現了對溫度改變的場發射電流穩定性。而場發射性質較差的樣品在較低電場的區域，則出現了熱激發電子流的溫度效應現象，即奈米碳管的場發射能力直接影響到場發射的溫度效應。
最後，我們發現擁有優異場發射特性的奈米碳管從溫度20K ~ 575K的範圍內，具有傑出的場發射電流溫度穩定特性。

In our investigation, we used methane as carbon source and used Plasma enhanced chemical vapor deposition (PECVD) to grow carbon nanotubes on substrate which had been coated with iron as catalyst. We fabricated carbon nanotubes (CNTs) that owned different surface morphology, different length and different density. And we investigate the field emission characteristics of the CNTs at varied temperature of these samples.
Most samples which had better emission properties (lower turn on field) showed temperature independence in whole applied field range. But samples which had bad emission properties showed the temperature dependence phenomenon similar to thermionics emission. In other words, the temperature effect on field emission was directly influenced by the essential field emission abilities of carbon nanotubes.
Finally, we found CNTs which was excellent in field emission showed outstanding temperature stability in the temperature range from 20K to 575K.

TABLE OF CONTENTS

ACKNOWLEDGEMENTS ………………………………………………Ⅰ
CHINESE ABSTRACT ………………………………………………Ⅱ
ENGLISH ABSTRAST ………………………………………………Ⅲ
TABLE OF CONTENTS………………………………………………Ⅳ
LIST OF FIGURES…………………………………………………Ⅴ
LIST OF TABLES …………………………………………………Ⅵ

1 Motivation ………………………………………………… 1

2 Introduction ……………………………………………… 4
2.1 Carbon Nanotubes………………………………………… 5
2.1.1 Structures of Carbon Nanotubes…………………… 5
2.1.2 Properties of carbon nanotubes……………………10
2.1.3 Growth mechanism of carbon nanotubes……………14
2.2 Field emission……………………………………………17
2.3 Thermionic emission ……………………………………20

3 Experiment …………………………………………………23
3.1 Fabrication of PECVD carbon nanotubes…………… 24
3.1.1 Ion beam sputtering deposition (IBSD)………… 24
3.1.2 Microwave plasma enhanced CVD (MPECVD)…………25
3.1.3 Growth of PECVD carbon nanotubes…………………25
3.1.4 Sample’s fabrication condition …………………28
3.2 Characterization of carbon nanotubes………………28
3.2.1 Scanning electron microscopy (SEM)………………28
3.2.2 Field emission apparatus……………………………29

4 Results and Discussion …………………………………30
4.1 Empirical results……………………………………… 30
4.2 Discussion of emission mechanisms………………… 39

5 Conclusion………………………………………………… 60

REFERENCE……………………………………………………… 62

APPENDIX…………………………………………………………67
Sample A…………………………………………………………68
Sample B…………………………………………………………73
Sample C…………………………………………………………79
Sample D…………………………………………………………82
Sample E…………………………………………………………86
Sample F…………………………………………………………91
Sample G…………………………………………………………97
Sample H……………………………………………………… 101
Sample I……………………………………………………… 107
Sample J……………………………………………………… 110
Sample K……………………………………………………… 115
Sample L……………………………………………………… 121
Sample M……………………………………………………… 125
Sample N……………………………………………………… 130
Sample O……………………………………………………… 134
Sample P ………………………………………………………138
Sample Q……………………………………………………… 143
Sample R ………………………………………………………148

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