臺灣博碩士論文加值系統

此篇論文，我們提出與研究一種埋於可形變材料的一維光子晶體可調奈米雷射。相對於二維光子晶體結構，一維光子晶體在整合於積體光路中，可展示較小的元件圖形尺寸與傳統脊狀波導間較高的相容性。
我們首先模擬埋於聚二甲基矽氧烷內的一維光子晶體奈米共振腔，在在外力壓縮下，因晶格常數縮小所造成的光學特性變化。我們透過一連串的奈米製程實現該元件設計，並於量測結果展示此元件具有低雷射閥值之單模雷射行為。
由於其非連續性結構之特性，我們進一步施加壓縮與拉伸應力於聚二甲基矽氧烷，藉由縮小或擴張元件的晶格常數來達成調變波長的目的。在實驗上我們成功實現大波長調變率以及於通訊頻帶波段寬廣的波長調變範圍。除此之外，藉由重複壓縮與釋放元件，驗證此元件的調變波長是具有極高的可靠度與再現性。
由於此元件的大波長調變率，我們進一步利用該元件來實現光學應力感測器。首先我們藉由探討此元件於施加非軸向應力下的光學特性來建立一資料庫，供我們所提出的應力感測器設計之用，該設計是由三個任意角度組合的奈米雷射所形成，具有辨識不同未知平面應力的能力與功效。我們相信此論文提出的可調奈米雷射與光學應力感測器或能在可撓積體通訊光路以及環境應力感測等應用上提供另一種嶄新的可能。

In this thesis, we propose and study on 1D photonic crystal (PhC) tunable nanolasers buried in deformable material via compressing. Comparing with 2D PhC, 1D PhCs shows smaller device footprints and high compatibility with conventional optical ridge waveguide in photonic integrated circuits.
We firstly simulate the optical properties of 1D PhC tunable nanocavity in PDMS under compression to decrease the lattice constants for demonstrating reproducible wavelength tuning. And then the 1D PhC tunable nanolasers in PDMS are realized by a series of nano-fabrication processes. Single mode lasing with low threshold from the device is obtained in measurement.
Because of its discontinuous structure, we further decrease/increase the lattice constants by applying compressing and stretching strain to the PDMS. We successfully realize the large wavelength tunability and wide wavelength tuning range in the telecommunication bands. In addition, the repeating compression/relaxing process in measurements are also executed for proving the high reliability and reproducibility of wavelength tuning by our devices.
Owning to the large wavelength tunability of this device, we utilize this device to realize optical strain sensors. By studying the optical properties of the devices under non-axial strain, we successfully build a database for our strain sensor. The strain sensor we proposed is consisted of three nanolasers arranged in arbitrary angles, which shows the capabilities of identifying different unknown planar strain. We believe the proposed tunable nanolasers and optical strain sensors in this thesis could provide new scenario in flexible telecommunication photonic integrated circuits and ambient strains sensing.

Table of Contents
摘要...I
Abstract...III
Table of Contents...V
Table Captions...VII
Figures Captions...VIII
Chapter 1...1
Introduction...1
1.1 Photonic Crystal and Photonic Crystal Lasers...1
1.2 1D PhC Nanolasers...3
1.3 Wavelength Tunable PhC Nanolasers...4
1.4 Thesis Overview...7
Chapter 2...8
Simulation, Fabrication, and Measurement Setup...8
2.1 Numerical Simulation Methods: Finite-Element Method...8
2.1.1Simulating Structural Deformation by Strain...9
2.1.2Moving Mesh...12
2.1.3Simulating Optical Properties of the Deformed PhC Structure...13
2.2 Fabrication Process...16
2.2.1Overiew...16
2.2.2Epitaxial Structure...18
2.2.3Depositing Si3N4 Hard Mask...19
2.2.4Defining PhC Patterns...20
2.2.5Transferring PhCs by Dry Etching Processes...21
2.2.6Transferring PhCs onto PDMS...22
2.3 Measurement Setup...24
2.4 Summary...26
Chapter 3...27
Wavelength Tunable 1D PhC Nanolaser in PDMS via Compressing...27
3.1 1D PhC Nanolaser Buried in PDMS...28
3.2 Wavelength Tuning of 1D PhC Nanolaser in PDMS via Compressing...32
3.3 Summary...37
Chapter 4...38
4.1 Motivation...38
4.2 1D PhC Nanolaser under Applied Non-Axial Strain...38
4.3 Design of Planar Strain Sensor...43
4.4 Summary ...48
Chapter 5...49
Conclusion and Future Works...49
5.1 Conclusion...49
5.2 Future Works...50
References...52

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