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研究生:張日謙
研究生(外文):Jih-Chien Chang
論文名稱:微液滴驅動之研究與探討
論文名稱(外文):Studies of actuation on micro liquid droplets
指導教授:楊宗勳楊宗勳引用關係
指導教授(外文):Tsung-Hsun Yang
學位類別:碩士
校院名稱:國立中央大學
系所名稱:光電科學研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:79
中文關鍵詞:鐵氟龍介電質電濕式微滴體
外文關鍵詞:micro liquid dropletsEWODTeflon
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  傳統上EWOD元件容易發生水解或膜破的缺陷,其原因為過高的電壓操作或是不穩固的疏水層所造成,因此本文提出了三個解決方案:1.採用高介電質材料二氧化鈦或五氧化二鉭做為介電層,以降低操作電壓。2.採用新型疏水材料Cytop��,以得到更穩固的疏水層。3.利用交流電訊號做為驅動電壓來源,透過DEP介電泳效應及表面張力原理的雙重影響,使得液滴在更低的電壓條件下獲得更大的驅動力。透過結構的改進,得到更穩定的EWOD微液滴操控平台。

  另一方面,本文利用虛擬儀控軟體LabVIEW設計人機介面,加上放大電路及操控電路的應用,成功地以全自動的方式來驅動EWOD元件上的滴液,並且透過全自動EWOD微液滴驅動系統做光學方面的應用,利用液滴的來回震盪,將雷射光束於水平軸上偏折至不同的方向,以達到光束掃描的效果。
This thesis reports three solutions to improve the defects, hydrophobic layer broken and electrolysis occurred easily, of a conventional electrowetting on dielectric (EWOD) Microfluidic system. These defects caused of high voltage applied and the hydrophobic material is not stable. First, the applied voltage could be decreased by using high dielectric material TiO2 or Ta2O5 to be dielectric layer. Second, we used Cytop�� to be the new and stable material of hydrophobic layer. Third, we changed the power source from DC voltage into AC, let liquid gets more thrusting power. The microfluidic system is more stable by using these three improved methods.

By the way, the automatic EWOD Microfluidic system was developed by using graphical development software Labview, voltage amplifier and a relay based circuit. In application, the scanning system which is based on optical refracting theorem was also discussed. The light beam would be refracted into different ways, depending on the harmonic motion of droplet.
第一章 導論............................................. 1
第二章 微流體的驅動.................................... 10
2.1 表面張力.................................... 10
2.1.1 毛細管電泳............................ 10
2.1.2 連續流電濕式.......................... 12
2.1.3 電濕式................................ 14
2.1.4 介電質電濕示 (EWOD) ................. 15
第三章 元件的設計與製作................................ 21
3.1 研究動機..................................... 21
3.2 高介電值材料於EWOD 元件上之應用........... 22
3.2.1 以鈦氧化物做為介電層.................. 22
3.2.2 以五氧化二鉭做為介電層................ 25
3.3 新型疏水性材料於EWOD 元件上之應用......... 26
3.3.1 Cytop�� ................................ 26
3.3.2 製作流程及參數........................ 27
3.4 以ITO 為基底之二維EWOD 元件設計與製造..... 33
3.5 二維陣列式EWOD 元件布線探討............... 37
結論............................................ 39
第四章 測試............................................ 40
4.1 優缺點比較與分析............................ 40
4.2 鈦氧化物為介電層之接觸角量測................ 42
4.3 五氧化二鉭為介電層之接觸角量測.............. 45
4.4 Cytop��測試.................................. 48
4.4.1 以Cytop��為疏水層之接觸角量測.......... 49
4.4.2 Cytop��應用於一維EWOD 元件............. 50
4.5 以ITO 為基底之二維EWOD 元件測試............. 54
4.6 主動式矩陣驅動原理測試...................... 58
第五章 應用............................................ 61
5.1 全自動二維EWOD 微液滴系統................. 61
5.2 光束掃描系統................................ 68
第六章 結論............................................ 71
參考資料....................................................73
附錄....................................................76
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