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研究生:楊昀融
研究生(外文):Yun-Rong Yang
論文名稱:量子點窄帶濾光片
論文名稱(外文):Narrow band pass filter with the spacer including quantum dots
指導教授:李正中李正中引用關係
學位類別:碩士
校院名稱:國立中央大學
系所名稱:光電科學與工程學系
學門:工程學門
學類:電資工程學類
論文出版年:2014
畢業學年度:102
語文別:中文
論文頁數:96
中文關鍵詞:量子點窄帶濾光片硫化鎘
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本論文主要分為兩個部分,第一部分是以化學水浴法鍍製硫化鎘量子點薄膜,我們以製程時間3分鐘以及氨水濃度1.2 M等參數,分別進行膜層內量子點大小分佈及薄膜結晶性的優化,再以後退火參數300°C―30分鐘處理,最後可以得到晶相單純及粒徑約2.5 nm的CdS量子點。第二部分是量子點窄帶濾光片的鍍製,我們以旋轉塗佈法及離子束濺鍍法成功鍍出pair number = 3、4、5的量子點窄帶濾光片,同時也量測到窄帶濾光片在雷射功率為11.2 mW激發下,中心波長穿透率因為量子點的增益分別提升為152.2 %、418.3 %及534.0 %。最後我們以本研究所寫的模擬程式,擬合在不同雷射功率下每一片窄帶濾光片中心波長之穿透率,並進一步算出spacer的等效消光係數k。
The thesis is consisted of two parts, the first part is about fabrication of CdS quantum dots by chemical bath deposition (CBD), in which we improve the size distribution of quantum dots, QDs, uniformity of crystalline phase. The optimized parameters are 3 minutes process time, 1.2 M ammonia, and 300˚C post-annealing with 30 minutes which results in the quantum dots of 2.5 nm with high performance of crystallization. The second part is about the fabrication of narrow band pass filter, NBPF, with spacers including quantum dots. We successfully fabricate QDs-NBPF with the 3, 4, 5 pair number by Ion-Beam Sputtering Deposition and spin coating. And then with the 325 nm He-Cd laser pumping, the transmission of QDs-NBPF with 3 pairs, 4 pairs and 5 pairs at the center wavelength are 152.2 %, 418.3 % and 534.0 %, respectively. Finally we calculate the equivalent extinction coefficient k of the spacer of the QDs-NBPF by fitting the transmission intensity on the center wavelength.
目錄
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 3
1.3 本文架構 4
第二章 基礎理論 5
2.1 量子點 5
2.2 薄膜理論 10
2.2.1 垂直入射之光學導納定義 10
2.2.2 等效導納與膜矩陣 13
2.2.3 單介面之反射與透射 16
2.2.4 窄帶濾光片穿透率之計算 17
第三章 量子點―窄帶濾光片模擬與設計 21
3.1 Matlab模擬方法與其他模擬軟體之比較 21
3.2 Matlab模擬結果 33
第四章 實驗與設備 37
4.1 化學水浴法鍍製量子點薄膜 37
4.1.1 化學水浴沉積法介紹 37
4.1.2硫化鎘成核機制 38
4.1.3實驗設備與參數介紹 39
4.1.4後退火製程 41
4.2 旋轉塗佈法鍍製量子點薄膜 42
4.3 鍍製窄帶濾光片 43
4.3.1實驗設備與參數介紹 43
4.3.2 多層膜監控方法 45

第五章 量測方法及架構 47
5.1.1 光激發螢光原理 47
5.1.2 螢光光譜量測儀器架構 49
5.2 量子點窄帶濾光片之量測 50
5.2.1 量測儀器架構 50
5.2.2 量測步驟 51
第六章 量測結果與分析 52
6.1 化學水浴法―CdS量子點薄膜 53
6.2 旋轉塗佈量子點薄膜 63
6.3 克服spacer脫膜的參數測試 65
6.4 量子點―窄帶濾光片 66
第七章 結論與未來工作 78
參考文獻 80

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