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研究生:翟光耀
研究生(外文):Kuang-Yao Chai
論文名稱:光子晶體偏振分光鏡之設計與製作
論文名稱(外文):Design and fabrication of photonic crystal polarization beam splitter
指導教授:陳昇暉李正中李正中引用關係
指導教授(外文):Sheng-Hui ChenCheng-Chung Lee
學位類別:碩士
校院名稱:國立中央大學
系所名稱:光電科學研究所
學門:工程學門
學類:電資工程學類
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:64
中文關鍵詞:光子晶體偏振分光鏡自我複製法
外文關鍵詞:autocloningpolarization beam splitterphotonic crystal
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本研究利用自我複製式光子晶體(autocloned photonic crystal)設計並製造出一偏振分光鏡(polarization beam splitter),並探討結構參數對光子能隙之影響。自我複製法為結合微影及薄膜沉積之製造多维光子晶體技術。本設計與傳統偏振分光鏡不同的是,元件為平面且可於垂直入射工作。本研究使用有限差分法(FDTD method)模擬其穿透光譜圖及頻帶結構圖。從模擬結果可發現在某些波段下垂直偏振(TE)處於能隙(band gap)而平行偏振(TM)處在通帶(pass band)。因此可有效的在垂直入射時分開兩種偏振態。我們使用TiO2 及SiO2 堆疊29 層之二維波狀結構,並且利用抗反射
膜(anti-reflection coating)之設計來消除波紋(ripples)。此PBS 之工作範圍約為200 nm (1100 nm~1300 nm),消光比(extinction ratio)為139。
I
A novel design of photonic-crystal polarization beam splitter was demonstrated. The beam splitter is a 2-dimensional wavy structure of multilayer thin films consisted with a number of alternate high and low
refractive indices transparent dielectric layers deposited sequentially on a periodic structured substrate. The fabrication of the photonic-crystal polarization beam splitter is based on the autocloning method which integrated the techniques of lithography and thin-film deposition. Different from the traditional polarization beam splitters, the photonic-crystal polarization beam
splitter is a flat type of polarizer working at normal incident angle. The transmission and reflectance spectra were analyzed using finite-difference time-domain method (FDTD). From the analysis result, we found the photonic
bandgap was happened at transverse electric (TE) mode and the passband at transverse magnetic (TM) mode. So, the photonic crystal polarization filter can separate TE mode and TM mode effectively at normal incident angle. To fabricate the polarization beam splitter, we have chosen TiO2 and SiO2 as high and low refractive index materials and deposited 29 layers of wavy structure. The AR (anti-reflection) coating has been applied to reduce ripples. The working wavelength range of the PBS is about 200 nm (1100 nm~1300 nm) in infrared region and the extinction ratio is 139.
摘要...............................................................................................................................I
Abstract........................................................................................................................ II
圖目錄.......................................................................................................................... V
表目錄...................................................................................................................... VIII
致謝............................................................................................................................. III
目錄.............................................................................................................................IV
第一章 序論....................................................................................................... 1
1-1 背景................................................................................................................ 1
1-2 研究目的........................................................................................................ 3
1-3 本文架構........................................................................................................ 7
第二章 有限時域差分法與偏振分光鏡之設計............................................... 9
2-1 光子晶體特性與理論.................................................................................... 9
2-1-1 週期函數與倒晶格............................................................................ 9
2-1-2 布洛赫定理...................................................................................... 10
2-1-3 布理淵區、頻帶結構及能隙.......................................................... 11
2-2 有限時域差分法(Finite-Difference Time-Domain method; FDTD) .......... 14
2-3 自我複製式二維光子晶體之設計.............................................................. 24
2-3-1 角度與高低折射率材料比例之影響.............................................. 25
2-3-2 相同膜層厚度下不同週期之影響.................................................. 31
2-3-3 增加高低折射率材料厚度之影響.................................................. 33
2-3-4 抗反射膜(Anti-Reflection coating)之設計...................................... 35
2-3-5 偏振分光鏡(Polarization beam splitter; PBS)之設計...................... 36
第三章 儀器與研究方法................................................................................. 40
3-1 自我複製式光子晶體製作流程.................................................................. 40
3-2 製程設備...................................................................................................... 42
3-3 量測儀器...................................................................................................... 44
第四章 結果與討論......................................................................................... 45
第五章 結論與未來工作................................................................................. 48
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