Contents
誌謝
中文摘要
英文摘要
圖目錄
表目錄
口試合格証明
Chapter 1 INTRODUCTION
1.1 Liquid phase epitaxial growth system
1.2 Short time LPE growth
1.3 Outline
2.1 Growth kinetics
2.2 Governing equations of convective mass transfer
2.3 Mass balance for a moving interface
2.4 Phase equilibrium
2.5 Diffusion limited growth
Chapter 3 BOUNDARY LAYER APPROXIMATION MODEL
3.1 Bounday layer concept
3.2 Governing equation under boundary layer approximation
3.3 Mathematic treatment-Similarity method
3.4 Finite difference scheme
3.5 Results and discussion
3.6 Conclusion
Chapter 4 TWO-DIMENSIONAL DRIVEN CAVITY MODEL
4.1 Stream function-vorticity formulation
4.2 Finite analytic scheme
4.3 Method of solution
4.4 Three growth mechanism
4.5 Setting time requirement
4.6 Sliding effect on the growth rate
4.7 Thickness uniformity
4.8 Conclusion
Chapter 5 MASS TRANSFER RATE MEASUREMENT WITH ELECTROCHEMICAL METHOD
5.1 Theoretical aspects
5.2 Experimental details
5.3 Limiting current measurement
5.4 Static diffusional mass transfer
5.5 Mass transfer rate measurement
5.6 Sliding distance effect
5.7 Melt geometry effect
5.8 Kinematic viscosity effect
5.9 Conclusion
Chapter 6 EXPERIMANTAL MEASUREMENT OF LPE GROWTH
6.1 LPE system setup
6.2 Parameters for the LPE growth
6.3 Thickness measurement
6.4 InGaAsP/InP growth-results and problems
6.5 GaAs/GaAs growth
6.6 Conclusion
Chapter 7 CONCLUSION AND SUGGESTIONS FOR FUTURE WORK
7.1 Summary and conclusion
7.2 Suggestions for Future Work
REFERENCE
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