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研究生:葉芳裕
研究生(外文):Fang-Yuh Yeh
論文名稱:雙穿透性基極電晶體之數值模擬與二維電洞雲層蕭基二極體之研製
論文名稱(外文):Numerical Simulation of the Dual-Gate Permeable Base Transistor and Fabrication of the Schottky/2DHG Diode
指導教授:王水進、方炎坤
指導教授(外文):S. J. Wang, Y. K. Fang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:電機工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:1993
畢業學年度:81
語文別:英文
論文頁數:94
中文關鍵詞:穿透性基極電晶體二維電洞雲層蕭基二極體分子束磊晶成長截止頻率
外文關鍵詞:Permeable Base Transistor (PBT)Schottky/2DHG DiodeMolecular
相關次數:
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本論文主要分成兩大部分:第一部分是雙穿透性基極電晶體之數值模擬,
第二部分是δ-摻雜二維電洞雲層蕭基二極體之研製。因為在傳統的穿透
性基極電晶體裡面,它的閘極金屬寬度需要做到次微米的範圍,這在元件
的製作上有相當的困難,所以我們就用雙閘極的結構來解決這個問題。由
於源極與汲極之間的電流亦可由上下兩排閘極金屬之間的間隔來控制,所
以閘極金屬寬度可以做成較大的尺寸,無需做到次微米的範圍。在本論文
的第一部分,我們針對雙穿透性基極電晶體做二維的數值模擬。考慮了雜
質濃度、上下兩排閘極間的寬度、以及閘極金屬的厚度對元件內部操作及
互導的影響。我們發現,當適當地選取參數,吾人可獲得空乏型及加強型
元件。與傳統的穿透性基極電晶體比較,雙穿透性基極電晶體的歐力效應
減少了。為了提供更自由的元件設計,採取了雙閘極的結構,但也同時犧
牲了互導。在本論文的第二部分,我們利用分子束磊晶成長硼高摻雜矽來
製作二維電洞雲層蕭基二極體。因為這個元件是利用二維電洞雲層來當作
通道,有很大的載子濃度,所以可以有效地降低它的串聯電阻,而提高它
的RC截止頻率。初步的測量包含了單層及雙層通道元件的C-V及I-
V特性圖。我們分別在單層及雙層通道元件中獲得了超過 50 伏及 35 伏
的反向崩潰電壓。在零偏壓時,雙通道元件的電容值大約為單通道元件電
容值的兩倍。測量結果亦顯示雙通道元件具有較大的非線性電容-電壓特
性,所以我們預期雙通道元件將擁有較大的截止頻率。

The gate's metal-stripe spacing for conventional PBT is
required to be in the submicron range. The requirement for
submicron design is commom problem for device implementation.
The use of dual-gate structure for PBT can solve this problem.
The Dual-gate PBT offers an additional barrier control by the
spacing between the upper and lower gratings. So, the Dual-gate
PBT allows a much large range of spacing design for the two
neighboring gate's metal in the same plane. In the first part
of this thesis, the two-dimensional numerical simulations for
the Dual-gate PBT were made. The influences of variations in
doping concentration, spacing between the upper and lower
gratings, and gate's metal thickness on internal device
operation and transconductance have been considered. We found
that by proper choice of the device parameters, enhancement and
depletion mode devices can be obtained. The Early effect is
reduced for the Dual-gate PBT as compared to the conventional
PBT. Using the dual-gate structure for PBT to offer more
freedom in device design is at the expense of reduced
transconductance. In the second part of this thesis, a
Schottky/2DHG barrier diode based on boron δ-doped silicon
grown by molecular beam epitaxy (MBE) was fabricated.
Preliminary measurements included I-V and C-V characteristics
from both single and coupledδ-doped devices. Breakdown
voltages over 50 V and 35 V were obtained for the single and
coupled δ-doped devices, respectively. The zero-bias
capacitance of the coupled δ-doped layer diode is about twice
that of the single δ-doped layer diode. The coupled δ-doped
layers diode exhibits a larger C-V nonlinearity, and a higher
RC cutoff frequency fc is expected for the coupled δ-doped
layers devices.

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