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研究生:陳世溥
研究生(外文):Chen Shih-Pu
論文名稱:以雷射蝕鍍法製備多層高溫超導薄膜之研究
論文名稱(外文):Prepared Multilayer Superconducting Thin Film By Using KrF xcimer Pulsed Laser
指導教授:莊振益;吳光雄
指導教授(外文):J.Y.Juang;K.H.Wu
學位類別:碩士
校院名稱:國立交通大學
系所名稱:電子物理學系
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:1994
畢業學年度:82
語文別:中文
論文頁數:44
中文關鍵詞:多層膜超導薄膜脈衝雷射
外文關鍵詞:MultilayerSuperconducting Thin FilmPulsed Laser
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本論文將報告如何以雷射濺鍍法在釹鎵氧化物(NdGaO3)基板上製備多層高
溫超導薄膜.目前,本實驗室利用脈衝雷射蒸鍍技術在NdGaO3基板上成功地
成長釔鋇銅氧超導薄膜,其成果如下:在臨界溫度為 Tco=92K,臨界電流密
度(Jc)在77K時更高達8*10MA/cm2,尤其是釔鋇銅氧薄膜表面的平整度,經
由原子力顯微鏡(AFM)獲知其表面高低崎嶇相差不過5nm.利用這些已知之
經驗,進而用以製作超導/絕緣/超導的多層薄膜結構,輔以掃瞄式電子顯微
鏡,掃瞄穿隧式電子顯微鏡和 X-光繞射分析來探究其結構特性與傳輸性質
之關係.

We have investigated some of the fundamental parameters involed
in preparing YBCO/(I)/YBCO/NdGaO3 multilayer super- conducting
thin film by using KrF Excimer pulsed laser. For single layer
YBCO directly deposited onto NdGaO3 single crystal substrate,
high quality film were obtained; with Tco =92K, Jc(77K)>8*10MA/
cm2. In particular, due to the optimiza- tion of deposition
condition and the near perfect lattice matching between YBCO
and NdGaO3, the surface topography of the obtained film, as
revealed by atomic force microscopy (AFM), was extremely smooth
(with roughness smaller than 5nm over 3 micrometer scanned
length). With the results accompli- shed, we have also
proceeded to deposited PBCO, as well as NdGaO3 as the
insulating layer. It was found that the choice of these
intermediate layer of the aimed multilayer structure, has a
profound effect on the deposition of the subsequent
superconducting layer. The detail characterizations of the
microstructure analyses, and transport property measurements
were performed to delineate the interplays between the growth-
structure-properties.

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