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研究生:吳昌成
論文名稱:垂直共振腔面射型雷射二極體之研製及可靠度研究
論文名稱(外文):Fabrication and reliability studies of vertical cavity surface emitting lasers
指導教授:戴國仇, 張俊彥
指導教授(外文):Cai, Chun-Jin
學位類別:博士
校院名稱:國立交通大學
系所名稱:電子研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:1994
畢業學年度:83
語文別:中文
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COVER
CONTENTS
Abstract (in Chinese)
Abstract (in English)
Acknowledgement (in Chinese)
Contents
Figure Captions
1. Introduction
1.1 overview
1.2 Outlines
2. Fabrication of Vertical Cavity Surface Emitting Lasers
2.1 Introduction
2.2 Principle of Device Design
2.3 Device Processing
2.4 Visible InGaPInGaA1P VCSELs
2.4.1 Structure Design
2.4.2 Pulsed Characteristics
2.4.3 Continuous-wave Characteristics
2.4.4 Further Prospects
2.5 0.85μm GaAsA1GaAs VCSELs
2.5.1 Structure Design
2.5.2 Device Characteristics
2.6 0.98μm InGaAsGaAs VCSELs
2.6.1 Structure Design
2.6.2 Device Characteristics
2.7 Summary
3. Reliability of GaAsA1GaAs Quantum Well VCSELs
3.1 Introduction
3.2 Reliability Analysis
3.2.1 Burn-in
3.2.2 Weibull Distribution
3.2.3 Accelerated Testing and Arrhenius Model
3.2.4 Setup of Aging Experiments
3.3 Lifetime of 0.85μm VCSELs
3.3.1 Aging Tests
3.3.2 Mean-time-to-failure
3.3.3 Characteristics of Aged Devices
3.4 Summary
4. Reliability of InGaAsGaAs Strained Quantum Well VCSELs
4.1 Introduction
4.2 Effect of Implant Energy
4.3 Effect of Rapid Thermal Annealing
4.4 Effect of Device Dimension
4.5 summary
5. Failure Mode Analysis
5.1 Degradation Mechanisms of Diode Lasers
5.2 Gradual Degradation of VCSELs
5.3 Sudden Failure Experiments
5.4 Sumary
6. Conclusion
6.1 Conclusion
6.2 Suggestions of Future work
References
Figures
Appendix A Device Processing of VCSELs
Appendix B Semi-insulating Iron-droped InP Grown by Lp-MOCVD
Appendix C.1 Doping of InGaP Grown by LP-MOCVD
Appendix C.2 Magnesium Doping of InGaA1P Grown by LP-MOCVD
Vita (in Chinese)
Publication List
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