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研究生:鄭蓮晃
研究生(外文):Cheng, Lien-Huang
論文名稱:氮化鈦鍍膜在不銹鋼之微結構與界面極限剪應力測量
論文名稱(外文):On the microstructure and interfacial shear stress of TiN-coated
指導教授:薛富盛薛富盛引用關係
指導教授(外文):Fuh-Sheng Shieu
學位類別:碩士
校院名稱:國立中興大學
系所名稱:材料工程學研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:1996
畢業學年度:84
語文別:中文
論文頁數:100
中文關鍵詞:穿透式電子顯微鏡電子能量耗失分析儀氮化鈦不銹鋼
外文關鍵詞:TEMEELSTiNStainless Steel
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本研究乃利用能量過濾穿透式電子顯微鏡配合週期性斷裂法的測試, 探討
氮化鈦鍍著於不銹鋼上其微觀結構與機械性質以中空陰極放電式電漿離子
鍍著法鍍著氮化鈦後, 利用微硬度測試, 獲得鍍膜硬度值分佈從1225
至1897 kg/mm2 , 以拉伸試驗機將試片拉伸, 計算裂紋密度, 再利用週期
性斷裂法 理論計算, 得到氮化鈦與不銹鋼間的界面極限剪應力分佈值
為5.25至8.84GPa製作TEM平面俯視試片, 以電子顯微鏡配合能量濾鏡觀察
氮化鈦晶粒於各層分佈, 結果發現 晶粒大小由不銹鋼表層向外遞增, 從9
nm至88 nm, 在混合層處則產生了二氧化鈦, 而經由試片座的傾斜觀察發
現鍍膜並無很明顯的從優取向本研究發現鍍膜中氧含量隨距離向基材方向
遞增, 而氮含量則隨距離向基材方向遞減, 由TEM試片觀察所發現的裂紋,
顯示殘留應力的存在, 其對鍍膜性質的影響, 不可忽視之
The microstructure and chemistry of the ion-plated TiN on AISI
304 stainless steel was studied by Zeiss 902A energy filter
transmission electron microscope(EFTEM) to understand the
structure-process relationship of the kollow cathod discharge
ion plating (HCD-IP) technique. Compared to conventional TEM,
EFTEM with in-column prism energy filter offers several
advantages including muchbetter image and diffraction sharpness.
The detection of the light elements such as nitrogen and oxygen
is easily achieved using the electron energy lossspectroscopy(
EELS) equipped with the microscope. The ion-plated TiN has equi-
axial grains with size varing from 88 nm at the coating surface
to 9 nm nearthe interface. A transition zone which is composed
of nanometer TiN grainsdispersed in the stainless steel was
observed. Unlike other deposition technique, e.g. sputtering or
chemical vapor deposition, the texture or pre-ferred orientation
in the thin film is not very profound. Results of EELS analysis
showed a deficiency in nitrogen but sufficiency in oxygen near
theTiN/steel interface, arising from the formation of TiO2
during early deposition.The mechanical properties of the TiN
coating and its interface with AISI 304 stainless steel were
evaluated by microindentation and periodic cracking method,
respectively. The hardness of the TiN coatings range from 1225
to 1897 kg/mm2, while the ultimate shear strength of the TiN/
steel was measured to be 5.25~8.84 GPa. Microcracks observed in
the TEM specimen indicate the existance of residual stresses
which could play an important role in controlling the
coatingproperties.
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