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研究生:張家榮
研究生(外文):Jia-Rong Chang
論文名稱:砷化銦/銻化鎵應力超晶格紅外光檢測器之研究
論文名稱(外文):The Study of InAs/GaSb Strained Layer Superlattics Infrared Detectors
指導教授:蘇炎坤、吳添壽
指導教授(外文):Yan-Kuin Sue, Tien-Shou Wu
學位類別:碩士
校院名稱:國立成功大學
系所名稱:電機工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:1996
畢業學年度:84
語文別:英文
論文頁數:76
中文關鍵詞:有機金屬化學氣相沉積系統
外文關鍵詞:MOCVD
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本論文為研究以有機金屬化學氣相沉積系統成長砷化銦/銻化鎵超晶格於
銻化鎵基板上,並探討其光電傳輸特性。由x射線繞射圖譜及光學顯微鏡
來判斷磊晶品質,以掃描式電子顯微鏡測量磊晶速率,以霍爾量測來測量
摻雜濃度,利用高解析穿透式電子顯微鏡,了解超晶格之磊晶情形,並藉
由傅利葉紅外光頻譜儀來量測材料之吸收光譜。我們將成長後的超晶格結
構,以顯影及濕蝕刻的方式使成為蝕刻至砷化銦緩衝層的高臺,同時將金
蒸著至超晶格及砷化銦緩衝層,在不同溫度下量測其電壓電流特,在偏
壓 0.1V時,量得漏電流為4×10-5 A/cm2,其最大R0A值為5×103 *cm2,
由吸收圖譜可發現三個波段的吸收,分別是1.45 *m、 3 *m 和 4.35 *m
等,而且這些實驗結果和理論計算相當接近,最後我們量得元件的偵測度
約為1.2×108 cm-Hz1/2/W。

This thesis includes the study of the electrical and optical
properties of the InAs/GaSb strained layer superlattice grown
on GaSb substrate by MOCVD. The quality of the epilayers were
determined by X-ray diffraction pattern and microscope. The
growth rate of the epilayer was determined by scanning
electronic microscope(SEM) .The doping concentration of the
epilayer was obtain by Hall measurement. High resolution
transmission electronic microscopy(HRTEM) were used to examine
the structure of the strained layer superlattice. Obvious
absorption was found by Fourier Transform Infrared Spectrum(
FTIR). The I-V characteristics of the device were measure at
different temperature, and it was found that these devices
exhibited small leakage currents, low breakdown voltages, and
high R0A products. The I-V characteristics of the device were
measured at different temperature. It was found that these
devices exhibited small leakage currents as low as 4×10-5 A/
cm2 at 77 K, and the R0A was about 5×103 *cm2. Three obvious
absorption peaks were found including the C1-HH1, C1-LH1, and
C2-HH1 transition, with energy 285 meV (4.35 *m), 410 meV (3
*m) and 855 meV(1.45 *m) respectively. The experimental
results were found to be in good agreement with the theoretical
results. Finally, the value of the specific detectivity
measured by the system was about 1.2×108 cm-Hz1/2/W.

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