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We present here our studies on the fabrication and beam
characteristics of hydrogen(proton)-implanted gain-guided
tapered stripe laser diodes. By controlling different hydrogen
implantation energy and tapered-stripe dimension, we fabricated
various tapered stripe lasers. Then we measured their output
beam properties and compared with that of narrow stripe lasers.
We find the optimum hydrogen implantation energy is near 120keV.
Its hydrogen distribution peak is 0.9um to 1.0um far from the
active region. On the aspect of astigmatism aberration, we find
that the 6um narrow stripe laser has the smallest Seidel
astigmatism coefficient. Also, it is shown that the tapered
stripe structure is successfully in the lateral mode controlling
and the tapered laser with central section 6um wide fabricated
by 180keV hydrogen implantation is the best to maintain Gaussian
fundamentalode. The longitudinal mode purity is influenced by
the spatial-hole burning effect. Finally, from our experiment
results, the hydrogen implantation is better than that by
hydrogen molecule.
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