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In this study, several measurement techniques were used to analyze the electric characteristics and traps in unintentionally doped n-type GaN grown by metal organic chemical vapor deposition.I-V measurements on Schottky diodes indicates the forward current appears due to thermionic field emission of electrons through the Schottky barrier, because there are high trap concentrations near the surface region. On the other hand, the electrons tunnel through the Schottky barrier at large reverse voltage, and through a smaller barrier by the assistance of a trap E2 at small reverse voltage. C-V measurements indicate the smaller V/III ratios, the larger carrier concentrations because of the increase of nitrogen vacancies. Therefore,the series resistance becomes smaller and capacitance larger. Schottky barrier height is much larger than the theoretical value of 0.84eV at low temperature, and is smaller at high temperature. Studies by transient capacitance measurements revealed the presence of a new majority-carrier trap with the activation energy of 1.34eV.
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