本研究是針對一能量打到一工作件物體表面上，而使得工作件物體表面產
生一層很薄的電離層(Plasma)，然而我們再將此電離層細分為離子區
(Presheath) 和空間放電區(Sheath)兩區。再由這兩區加以深入的探討研
究其內部的一些能量、動量或熱量等的傳遞及交互作用之問題。例如我們
用了BGK 的模式去藉由其質子(particle)、衝量(momentum)和能量(
ener- gy) 的守恆方程式去決定其離子濃度(ion density)、流體動力速
度(hy- drodynamic velocity)和溫度(temperature) 的大小。我們不僅
探討了碰撞 (collision)和離子化(ionization)的情形，我們更深入探討
了能量經由工作件表面所發生的離子放射(emission)和反射(reflection)
的情形對於空間放電區(Shesth)內所造成的影響。更甚而對整個電離區(
Plasma)的影響。以致於最終完成一個相當完整性之能量作用於物體表面
現象的各項研究探討。

Transport phenomena across the sheath and prehesth between a
plasma and workpiece surface are kinetically investigated.
Ion collisions simulating by the BGK model and ionization
propose by Emmert et al. are included in the presheath. In
addition to the electric potential variations of ion density、
hydrodynamic velo- city and temperature are determined in
order to satisfying con- servation of particle、momentum and
energy. A general derivation of the presheath subject to ion
collisions and ionization and space charge region where ion
emission reflection by the surface wall take place is also
provided.