臺灣博碩士論文加值系統

我們已經完成表面微細加工之壓阻式壓力計的設計、模型建立及製造。我
們對圓形及方形薄板上電阻放置的位置、方向及有效電阻長度作了最佳化
的分析，可使壓力計的靈敏度達到 0.15mV/V/psi。薄板受到較大壓力時
產生的大撓度是造成壓力計具有線性誤差的主要原因，利用 S. P.
Timoshenko及A. Foppl 的方法，可以解出薄板在大撓度下所產生的應變
，它們和實驗結果具有相當的一致性。由於得到的是解析解，所以這個方
法可以作為電路對線性誤差補償的依據。利用Y. Kanda的理論，我們找出
壓力計的輸出電壓會隨溫度升高而降低的關係，這個結果和實驗十分吻合
，由於是解析解，對於做電路對溫度的補償應會有相當的助益。在交大半
導體中心，用濕式蝕刻及特殊方法長二氧化矽…等克難方法之下，我們做
出了表面微細加工之壓阻式壓力計的成品，顯示了這個製程的可行性。

Surface micromachined piezoresistive pressure sensor has been
designed, modeled, and fabricated. The optimal position,
orientation, and length of effective resistors on circular and
square plate have been found. The sensitivity of 0.15 mV/V/psi
could be achieved by the optimization design. The linearity
error of pressure sensor is dominated by the large deflection
of plates. The strain under large deflection of circular and
square plates could be solved by the methods of S. P.
Timoshenko and A. Foppl respectively. Experimental measurements
showed consistent agreement. Because the solutions are
analytic, they could be used in the linearity compensation
circuitry. The output voltage of pressure sensor and
temperature relationships have been predicted by Y. Kanda's
theory and verified by experimental measurements. It could be
used in the temperature compensation circuitry. We conquer some
difficulties to fabricate surface micromachined piezoresistive
pressure sensor in the Semi Conductor Research Center, NCTU. It
shows the possibility of fabricating surface micromachined
pressure sensor in Taiwan.